According to one embodiment, a gyro sensor system including a gyro sensor unit is disclosed. The unit includes a movable body, a spring mechanism, a detector, an adjuster, and a rotation angle acquisition unit. The spring mechanism vibrates the movable body. A detector detects an amplitude of vibration of the movable body due to Coriolis force. The adjuster adjusts a first resonance frequency of vibration of the movable body in free vibration and a second resonance frequency of vibration of the movable body due to Coriolis force on the movable body so that the first and second resonance frequencies are to coincide with each other based on the amplitude of the vibration due to Coriolis force. The rotation angle acquisition unit acquires a rotation angle of the movable body, based on the amplitude of the vibration due to Coriolis force.

According to one embodiment, a gyro sensor system including a gyro sensor unit is disclosed. The unit includes a movable body, a spring mechanism, a detector, an adjuster, and a rotation angle acquisition unit. The spring mechanism vibrates the movable body. A detector detects an amplitude of vibration of the movable body due to Coriolis force. The adjuster adjusts a first resonance frequency of vibration of the movable body in free vibration and a second resonance frequency of vibration of the movable body due to Coriolis force on the movable body so that the first and second resonance frequencies are to coincide with each other based on the amplitude of the vibration due to Coriolis force. The rotation angle acquisition unit acquires a rotation angle of the movable body, based on the amplitude of the vibration due to Coriolis force.

A gyroscope includes connecting portions which are provided between a mass body and a mass body and connects the mass body with the mass body. Here, the connecting portions includes a fixing portion fixed to a substrate, a shuttle provided between the fixing portion and the mass body, a shuttle provided between the fixing portion and the mass body, a beam connecting the fixing portion with the shuttle, a beam connecting the fixing portion with the shuttle, a beam connecting the mass body with the shuttle, a beam connecting the mass body with the shuttle, and a beam connecting the shuttle with the shuttle. The fixing portion is provided between the shuttle and the shuttle.

A gyroscope includes connecting portions which are provided between a mass body and a mass body and connects the mass body with the mass body. Here, the connecting portions includes a fixing portion fixed to a substrate, a shuttle provided between the fixing portion and the mass body, a shuttle provided between the fixing portion and the mass body, a beam connecting the fixing portion with the shuttle, a beam connecting the fixing portion with the shuttle, a beam connecting the mass body with the shuttle, a beam connecting the mass body with the shuttle, and a beam connecting the shuttle with the shuttle. The fixing portion is provided between the shuttle and the shuttle.

A gyro sensor includes: a first signal generation unit that generates a first driving signal and a second driving signal with a different phase by 180 degrees from the first driving signal; a movable detection portion that vibrates in accordance with the first and second driving signals and is displaced in accordance with an angular velocity; a fixed detection portion that is disposed to face the movable detection portion; and a second signal generation unit that generates a signal with the same phase as the first or second driving signal and applies the signal to the fixed detection portion.

In a first aspect, the angular rate sensor comprises a substrate and a rotating structure anchored to the substrate. The angular rate sensor also includes a drive mass anchored to the substrate and an element coupling the drive mass and the rotating structure. The angular rate sensor further includes an actuator for driving the drive mass into oscillation along a first axis in plane to the substrate and for driving the rotating structure into rotational oscillation around a second axis normal to the substrate; a first transducer to sense the motion of the rotating structure in response to a Coriolis force in a sense mode; and a second transducer to sense the motion of the sensor during a drive mode. In a second aspect the angular rate sensor comprises a substrate and two shear masses which are parallel to the substrate and anchored to the substrate via flexible elements. In further embodiments, a dynamically balanced 3-axis gyroscope architecture is provided. Various embodiments described herein can facilitate providing linear and angular momentum balanced 3-axis gyroscope architectures for better offset stability, vibration rejection, and lower part-to-part coupling.

A rotation rate sensor having a first structure movable with respect to the substrate, a second structure movable with respect to the substrate and with respect to the first structure, a first drive structure for deflecting the first structure with a motion component parallel to a first axis, and a second drive structure for deflecting the second structure with a motion component parallel to the first axis. The first and second structures are excitable to oscillate in counter-phase, with motion components parallel to the first axis, the first drive structure having a first spring mounted on the substrate to counteract a pivoting of the first structure around an axis parallel to a second axis extending perpendicularly to a principal extension plane, the second drive structure having a second spring mounted on the substrate to counteracts a pivoting of the second structure around a further axis parallel to the second axis.

A rotation rate sensor having a first structure movable with respect to the substrate, a second structure movable with respect to the substrate and with respect to the first structure, a first drive structure for deflecting the first structure with a motion component parallel to a first axis, and a second drive structure for deflecting the second structure with a motion component parallel to the first axis. The first and second structures are excitable to oscillate in counter-phase, with motion components parallel to the first axis, the first drive structure having a first spring mounted on the substrate to counteract a pivoting of the first structure around an axis parallel to a second axis extending perpendicularly to a principal extension plane, the second drive structure having a second spring mounted on the substrate to counteracts a pivoting of the second structure around a further axis parallel to the second axis.

According to one embodiment, a vibration device is disclosed. The device includes a mass unit including a mass unit, a catch and release mechanism to catch and release the mass unit and including an electrode unit, and a control unit to control catching and releasing of the mass unit by a voltage to be applied between the mass unit and the electrode unit. The control unit controls the voltage such that a voltage greater than a steady voltage is to be applied between the mass and electrode units before the steady voltage is applied between the mass and electrode units. The voltage greater than the steady voltage is to be applied in at least part of a period during which the mass unit is vibrating after the mass unit is released from the catch and release mechanism.

Embodiments for modifying a spring mass configuration are disclosed that minimize the effects of unwanted nonlinear motion on a MEMS sensor. The modifications include any or any combination of providing a rigid element between rotating structures of the spring mass configuration, tuning a spring system between the rotating structures and coupling an electrical cancellation system to the rotating structures. In so doing unwanted nonlinear motion such as unwanted 2nd harmonic motion is minimized.