An inertial sensor includes a substantially planar, rotationally symmetric proof mass, a capacitive pick-off circuit connected to the proof mass, an electrical drive circuit connected to the four pairs of electrodes. The drive circuit is arranged to apply first in-phase and anti-phase pulse width modulation (PWM) drive signals with a first frequency to the first and third electrode pairs, such that one electrode in each pair is provided with in-phase PWM drive signals and the other electrode in each pair is provided with anti-phase PWM drive signals and to apply second in-phase and anti-phase PWM drive signals with a second frequency, different to the first frequency, to the second and fourth electrode pairs, such that one electrode in each pair is provided with in-phase PWM drive signals and the other electrode in each pair is provided with anti-phase PWM drive signals.

A micro-gyroscope for determining a rate of rotation about a Z-axis includes a substrate and two sensor devices each of which comprises at least one drive mass, at least one anchor, drive elements, at least one sensor mass and sensor elements. The drive mass is mounted linearly displaceably in the direction of an X-axis, and can be driven in an oscillatory manner with respect to the X-axis. The sensor mass is coupled to the drive mass by means of springs. The sensor mass is displaceable in the Y-direction, and sensor elements detects a deflection of the sensor mass in the Y-axis. The two sensor devices are disposed parallel to each other and one above the other in the direction of the Z-axis, and the drive mass in these two sensor devices are coupled to each other by means of a coupling spring.

A micro-gyroscope for determining a rate of rotation about a Z-axis includes a substrate and two sensor devices each of which comprises at least one drive mass, at least one anchor, drive elements, at least one sensor mass and sensor elements. The drive mass is mounted linearly displaceably in the direction of an X-axis, and can be driven in an oscillatory manner with respect to the X-axis. The sensor mass is coupled to the drive mass by means of springs. The sensor mass is displaceable in the Y-direction, and sensor elements detects a deflection of the sensor mass in the Y-axis. The two sensor devices are disposed parallel to each other and one above the other in the direction of the Z-axis, and the drive mass in these two sensor devices are coupled to each other by means of a coupling spring.

An angular velocity acquisition device includes a movable body, a drive electrode to which a drive voltage is applied to vibrate the movable body in a first direction, at least one stopper that stops the movable body at a predetermined position, a hold electrode which receives a hold voltage to hold the movable body at the predetermined position, a detection unit that detects a predetermined physical quantity depending on an amplitude of the vibration of the movable body in a second direction based on a Coriolis force acting on the movable body that vibrates in the first direction, and an angular velocity calculation unit that calculates an angular velocity of the movable body based on the predetermined physical quantity detected by the detection unit.

A vibration gyroscope includes: a mass part supported to be displaceable in a first direction and a second direction; an exciter vibrating the mass part in the first direction; and a detector detecting a displacement amount of the mass part in the second direction. The first direction and the second direction are orthogonal to each other. A resonance frequency of the mass part in the first direction coincides with a resonance frequency of the mass part in the second direction. A Q-factor of vibration of the mass part in the second direction is smaller than a Q-factor of vibration of the mass part in the first direction.

A vibration gyroscope includes: a mass part supported to be displaceable in a first direction and a second direction; an exciter vibrating the mass part in the first direction; and a detector detecting a displacement amount of the mass part in the second direction. The first direction and the second direction are orthogonal to each other. A resonance frequency of the mass part in the first direction coincides with a resonance frequency of the mass part in the second direction. A Q-factor of vibration of the mass part in the second direction is smaller than a Q-factor of vibration of the mass part in the first direction.

The invention related to a microelectromechanical systems gyroscope, which comprises a plurality of sensing modules sensing angular velocities on tri-axes, a plurality of outer frames set at outside of the sensing modules, and a plurality of driving shafts set between the frames respectively. The driving shafts are connected with two adjacent frames by first and second flexible connecting elements, respectively, and the frames are connected with the sensing modules by a plurality of transporting units. Thus, tri-axes sensing is provided.

An angular velocity sensor includes: a substrate; a drive beam supported via a support member with a fixing part; a drive weight supported with the drive beam; a detection weight supported via a beam part including a detection beam with the drive weight; and a detection part in the detection beam generating an electric output corresponding to a displacement of the detection beam when an angular velocity is applied. When the angular velocity is applied while the drive weight and the detection weight vibrate and are driven by the drive beam, the detection beam is displaced in a direction intersecting the vibration direction. The angular velocity is detected based on a change of an output voltage of a detection piezoelectric film in accordance with a displacement of the detection beam.

An angular velocity sensor includes: a substrate; a drive beam supported via a support member with a fixing part; a drive weight supported with the drive beam; a detection weight supported via a beam part including a detection beam with the drive weight; and a detection part in the detection beam generating an electric output corresponding to a displacement of the detection beam when an angular velocity is applied. When the angular velocity is applied while the drive weight and the detection weight vibrate and are driven by the drive beam, the detection beam is displaced in a direction intersecting the vibration direction. The angular velocity is detected based on a change of an output voltage of a detection piezoelectric film in accordance with a displacement of the detection beam.

A gyroscope includes a proof mass, and a first transduction/suspension structure coupled to the proof mass with a laterally flexible first coupling spring from a first coupling direction. A second transduction/suspension structure is coupled to the proof mass with a laterally flexible second coupling spring from a second coupling direction. A third transduction/suspension structure is coupled to the proof mass with a transversally flexible third coupling spring from a third coupling direction. A fourth transduction/suspension structure is coupled to the proof mass with a transversally flexible fourth coupling spring from a fourth coupling direction. Each transduction/suspension structure comprises elongated beams. Piezoelectric transducers are deposited on some elongated beams, and are configured to bend the corresponding elongated beams in the device plane and to measure the bending of the corresponding lateral elongated beams in the device plane.