Position sensor for a mechanical device, including: an optical emitter arranged for projecting an incident radiation on a positioning track of the mechanical device provided with multiple optical sections; an optical detector arranged for detecting a reflected radiation coming from the positioning track and for generating a corresponding measurement signal; an electronic processing unit arranged for calculating, on the basis of such measurement signal, a reflectance value indicative of the reflectivity of the zone of the positioning track hit by the incident ray so as to distinguish the different optical sections of the positioning track. The position sensor also comprises a signaling module arranged for sending a warning signal as a function of the reflectance value, in order to provide to the user indications relative to the level of deterioration of the optical sections of the positioning track.

A position detecting member includes a base portion including a light-receiving surface having a black color tone and a back surface located on an opposite side to the light-receiving surface. A surface layer portion including at least the base portion is made of ceramic. An average value of root mean square slopes (RΔq) on the light-receiving surface in a roughness curve is larger than an average value of root mean square slope (RΔq) on the back surface.

A measurement device has: a slider which holds a substrate and is movable parallel to the XY plane; a drive system that drives the slider; a position measurement system which emits beams from a head section to a measurement surface in which grating section are provided on the slider, which receives respective return beams of the beams from the measurement surface, and which is capable of measuring position information in at least directions of three degrees of freedom including the absolute position coordinates of the slider; a mark detection system that detects a mark on the substrate; and a controller which detects the marks on the substrate using the mark detection system while controlling the drive of the slider, and which obtains the absolute position coordinates of each mark based on the detection result of each mark and measurement information by the position measurement system at the time of detection.

Disclosed herein is a high throughput optical scanning device and methods of use. The optical scanning device and methods of use provided herein can allow high throughput scanning of a continuously moving object with a high resolution despite fluctuations in stage velocity. This can aid in high throughput scanning of a substrate, such as a biological chip comprising fluorophores. Also provided herein are improved optical relay systems and scanning optics.

A life detection device of an encoder is used for the encoder including a scale and a head. The scale is housed in a scale frame. The head relatively moves along the scale to detect an amount of relative movement with the scale. The life detection device includes environmental condition detection means, life determination means, and informing means. The environmental condition detection means is configured to detect an environmental condition related to life detection in the encoder. The life determination means is configured to determine a life of a component constituting the encoder based on a detection result by the environmental condition detection means. The informing means is configured to inform the life based on a determination result by the life determination means.

A position-measuring device includes a scale having first and second measuring graduations, which each include graduation structures that respectively extend parallel to first and second directions. A first scanning unit is associated with the first measuring graduation, and second and third scanning units are associated with the second measuring graduation. A fourth scanning unit is associated with the first or second measuring graduation. In the former case, a first straight connecting line running through scanning locations of the first and fourth scanning units and a second straight connecting line running through scanning locations of the second and third scanning units are parallel or form a predetermined angle therebetween that is not equal to a sum of the angles of the first and second directions. In the latter case, the scanning locations of the second, third and fourth scanning units do not lie on a common straight connecting line.

An optical encoder is provided. The encoder includes an optical disc mounted on a shaft, the optical disc containing pit and land markings; an optical pickup unit for an optical disc that receives light from the optical disc and supplies as an output an electrical signal representative of the received light, comprising: a reading head objective lens, and dynamic steering actuators that control the focus and tracking of the reading head objective lens; a processor that receives as an input the electrical signal from the optical pickup unit and reports motion of the substrate based on the received at least one electrical signal.

A device for measuring length of an object, comprising a coilable tape having a plurality of machine-readable measurement codes on at least one surface, each of the plurality of machine-readable measurement codes encoding for a length value corresponding to a length, a scan engine having a reading zone through which the coilable tape can be extended, the scan engine being configured to detect a machine-readable measurement code positioned within a reading zone, a processor in communication with the scan engine, and an output means selected from one or more of a visual display, a wireless transmitter, a memory, and a remote device, wherein upon extending the coilable tape to a particular length, such that the machine-readable measurement code encoding for the corresponding length value is positioned within the reading zone, the scan engine detects the machine-readable measurement code, receives the corresponding length value and provides the corresponding length value to the processor, the processor processes the corresponding length value, and provides the processed length value to the output means.

A controller for use with a position encoder includes one or more motion inputs suitable to couple to motion outputs of the position encoder and a limit input suitable to couple to a limit output of the position encoder. The controller also includes an actuator interface, a command interface, and circuitry coupled to the one or more motion inputs, the limit input, the actuator interface, and the command interface. The circuitry is configured to receive a command through the command interface to move a structural member coupled to the position encoder to a new position and control an actuator through the actuator interface to move the structural member toward the new position. A limit indication is received from the position encoder through the limit input and the controller stops or reverses the movement of the structural member by controlling the actuator in response to receiving the limit indication.

A reference voltage generator circuit generates a reference voltage corresponding to a power supply voltage. A current/voltage converter circuit converts a photocurrent output by a photoreceiver into voltage, and outputs a voltage obtained by adding the converted voltage and the reference voltage. A sample and hold circuit holds a voltage of a capacitor in response to a sample and hold signal, the capacitor having the voltage input at one end and the reference voltage input at another end. An amplifier circuit outputs an output signal where a voltage held by the sample and hold circuit is amplified with the reference voltage as a reference.