An optical position measuring instrument including a scale and a scanning unit, wherein the scanning unit and the scale are movable with respect to one another. The scanning unit includes a detector unit, and a reflector unit that has a first and second wave front correctors and a beam direction inverter. The reflector unit is disposed so that beams first pass through the scale and the first wave front corrector, then a back-reflection of partial beams is effected in a direction of the scale, and the partial beams then pass through the scale and the second wave front corrector before the partial beams then arrive at the detector unit, wherein it is ensured that wave front deformations of the partial beams are converted into wave front deformations that compensate for resultant wave front deformations of the partial beams upon a second diffraction at the scale.

A position detection apparatus (100) includes a scale (20) including a reference position grating (22), a detector (10), a detection grating (19), and a signal processor (10), the signal processor acquires a relative reference position between the scale and the detector by using a light intensity distribution of a divergent light beam obtained via the reference position grating and the detection grating, the detection grating has a first spatial frequency that is offset by a predetermined frequency offset amount with respect to a local spatial frequency of an interference image from the reference position grating, the detection grating is provided in an optical path between the scale and a light receiver of the detector, and the light receiver detects a component of a second spatial frequency that is lower than the first spatial frequency in the light intensity distribution transmitting through the detection grating.

A heterodyne two-dimensional grating measuring device and measuring method thereof includes a light source, a reading head, a photoelectric receiving module, and a signal processing system. The light source is configured to generate two beams of linearly polarized lights having characteristics of overlapping, polarization orthogonal, and fixed frequency difference. The reading head is configured to receive the two beams of the linearly polarized lights, the two beams of the linearly polarized lights are respectively incident on a surface of a moving two-dimensional measuring grating to generate ±1-order diffracted lights of two dimensions, and the ±1-order diffracted lights are respectively incident to the photoelectric receiving module through the reading head. The photoelectric receiving module is configured to generate beat frequency signals, the signal processing system is configured to perform differential calculation on the beat frequency signals to realize a displacement measurement of measuring grating for four-fold optical subdivision.

A scale includes a diffraction grating configured to condense diffracted light in a periodic direction of the diffraction grating in order to detect a reference position. A light receiving element array is configured to receive light from the diffraction grating. The light receiving element array includes first to fourth light receiving elements configured to output signals having phases different from each other. The first light receiving element and the second light receiving element are adjacent to each other and are arranged between the third light receiving element and the fourth light receiving element. The processing unit generates a signal representing the reference position based on a differential signal between a signal from the first light receiving element and a signal from the third light receiving element and a differential signal between a signal from the second light receiving element and a signal from the fourth light receiving element.

A scale includes a substrate, a metal layer of Ni formed on one principal surface of the substrate, and a scale grating formed on the metal layer. A plurality of gratings of Cr are disposed at a predetermined interval in the scale grating.

A scale includes a substrate, a metal layer of Ni formed on one principal surface of the substrate, and a scale grating formed on the metal layer. A plurality of gratings of Cr are disposed at a predetermined interval in the scale grating.

A detector that detects relative positions of a first object and a second object in directions different from each other on a predetermined plane, includes an illumination optical system configured to illuminate a first mark provided on the first object and a second mark provided on the second object, and a detection optical system configured to detect interference light of diffracted lights from the first mark and the second mark illuminated by the illumination optical system. A light intensity distribution is formed, on a pupil plane of the illumination optical system, to illuminate the first mark and the second mark from a direction tilted with respect to a normal of the predetermined plane. A pupil plane of the detection optical system allows the interference light to pass through and block at least a part light other than the interference light.

An optical position-measurement device includes a reflection measuring standard and a scanning unit, which is movable in relation thereto in at least one measurement direction. The reflection measuring standard has an incremental measuring graduation and a reference marking in at least one reference position. In addition to scanning device(s) for the incremental signal generation, the scanning unit includes for the reference signal generation at least one light source, imaging optics, a diaphragm structure arranged in a diaphragm plane, and a plurality of detector elements. Via the imaging optics, imaging of the reference marking onto the diaphragm structure is implemented. The reference marking is provided on the reflection measuring standard and is integrated into the incremental measuring graduation. In addition, the imaging optics has a variable, object-side focal length along a transversal direction oriented perpendicular to the measurement direction.

An optical position-measurement device includes a reflection measuring standard and a scanning unit, which is movable in relation thereto in at least one measurement direction. The reflection measuring standard has an incremental measuring graduation and a reference marking in at least one reference position. In addition to scanning device(s) for the incremental signal generation, the scanning unit includes for the reference signal generation at least one light source, imaging optics, a diaphragm structure arranged in a diaphragm plane, and a plurality of detector elements. Via the imaging optics, imaging of the reference marking onto the diaphragm structure is implemented. The reference marking is provided on the reflection measuring standard and is integrated into the incremental measuring graduation. In addition, the imaging optics has a variable, object-side focal length along a transversal direction oriented perpendicular to the measurement direction.

The photoelectric rotary encoder includes: a generally disk-shaped scale with a grating-like pattern formed with a predetermined period along a measurement direction, the measurement direction being a direction of rotation of a measurement target that rotates on a predetermined axis, the scale being plate-like and centered on an axis of rotation; and a head that detect, from the scale, the amount of displacement caused by the rotation of the measurement target. The head includes a light source, a diffraction unit with grating parts, and a light-receiving unit with light-receiving elements. The grating parts of the diffraction unit are formed as deformed grating parts that spread cut wide, from the center on the axis of rotation, along the grating-like pattern of the scale. The light-receiving elements are formed as linear grating parts.