A flow meter system and method are provided for monitoring gas flow in a conduit. The flow meter system includes a plurality of components including: a sensor for sensing a flow rate of the gas flow; a communication device for transmitting information corresponding to the sensed flow rate to a remote device; an energy harvesting device for producing electrical energy from the gas flow to power operation of the communication device or other component of the flow meter system; and an energy storage device for storing electrical energy generated by the energy harvesting device.

A method for estimating a flow rate of a material (e.g., a multiphase fluid) may include: flowing the material through one or more of a plurality of receptacles of a dielectric contrast analysis structure that includes: a bulk dielectric substance and the plurality of receptacles in the bulk dielectric substance; exposing the dielectric contrast analysis structure to incident electromagnetic radiation; detecting and analyzing a resultant electromagnetic radiation from the exposed dielectric contrast analysis structure to yield a phase fraction in the material and a phase distribution in the material; measuring a differential pressure across the dielectric contrast analysis structure; and estimating the flow rate of the material using the differential pressure, the phase fraction, and the phase distribution in the material.

A measurement carrier includes a housing having an internal space, and a flow-rate measuring device located within the internal space. A bottom surface of the housing includes a first inflow hole, a second inflow hole, and an outflow hole, which provide fluid communication between the internal space and an outer space. The flow-rate measuring device may include a first flow-rate measuring sensor in fluid communication with the first inflow hole, and a second flow-rate measuring sensor in fluid communication with the second inflow hole.

A measurement carrier includes a housing having an internal space, and a flow-rate measuring device located within the internal space. A bottom surface of the housing includes a first inflow hole, a second inflow hole, and an outflow hole, which provide fluid communication between the internal space and an outer space. The flow-rate measuring device may include a first flow-rate measuring sensor in fluid communication with the first inflow hole, and a second flow-rate measuring sensor in fluid communication with the second inflow hole.

A flow meter includes a cylindrical body having an exterior surface and an interior surface defining an inner diameter of the cylindrical body. The cylindrical body also includes an outlet end and an inlet end. The inlet end is shaped and dimensioned for selective attachment to an inlet pipe or hose having an inner diameter that is small than the inner diameter of the cylindrical body. The flow meter also includes a gauge tap formed within the cylindrical body, the gauge tap being positioned adjacent the outlet end of the cylindrical body at a position between the outlet end and the inlet end. A pressure gauge is secured within the gauge tap for measuring the pressure within the cylindrical body and ultimately the flow of fluid through the cylindrical body. A nozzle is attached at the outlet end of the cylindrical body and at least one nozzle insert is provided for selective attachment to the nozzle so as reduce the size of the outlet in order to extend the normal range of the flow meter.

A method for calibrating a product valve disposed along a flow path in a duct, with a calibration valve in a duct remote from the product valve and having a geometric shape and operational parameters corresponding to those of the product valve. A calibration controller establishes calibration conditions and, in responsive thereto, generates a calibration flow rate (CFM) function by measuring for the calibration valve, a sparse set of flow rates and determining a surface-fit mathematical representation of fluid flow through the calibration valve over applied calibrated flow rates and the measured pressure drops. The CFM Function is transferred to a product blade controller, which in turn, processes the representation of the mathematical surface, and controls fluid flow through product valve based on values extracted from the received CFM Function as well as at least one parameter control signal indicative of a desired set point.

A method for calibrating a product valve disposed along a flow path in a duct, with a calibration valve in a duct remote from the product valve and having a geometric shape and operational parameters corresponding to those of the product valve. A calibration controller establishes calibration conditions and, in responsive thereto, generates a calibration flow rate (CFM) function by measuring for the calibration valve, a sparse set of flow rates and determining a surface-fit mathematical representation of fluid flow through the calibration valve over applied calibrated flow rates and the measured pressure drops. The CFM Function is transferred to a product blade controller, which in turn, processes the representation of the mathematical surface, and controls fluid flow through product valve based on values extracted from the received CFM Function as well as at least one parameter control signal indicative of a desired set point.

An airflow sensor assembly for an air duct is provided. The airflow sensor assembly includes the air duct having an interior wall and an exterior wall, a high pressure pickup device, a low pressure pickup device, a pressure redirection device, and a pressure sensor. The pressure redirection device is fluidly coupled to the high pressure pickup device and the low pressure pickup device and includes a low inlet, a high inlet, and a common outlet. The pressure sensor is selectively fluidly coupled to the high pressure pickup device and the low pressure pickup device and includes a first inlet and a second inlet. The second inlet is fluidly coupled to the common outlet of the pressure redirection device.

A mask arrangement for masking a substrate in a processing chamber is provided. The mask arrangement includes a mask frame having one or more frame elements and is configured to support a mask device, wherein the mask device is connectable to the mask frame; and at least one actuator connectable to at least one frame element of the one or more frame elements, wherein the at least one actuator is configured to apply a force to the at least one frame element.

An abnormality detection method performed using a flow rate control device including a restriction portion, a control valve, a first pressure sensor, a second pressure sensor, and a downstream valve, includes a step of changing the control valve and the downstream valve from an open state to a closed state, a step of measuring an upstream pressure or a downstream pressure in the closed state, and at least one step of (a) extracting an upstream pressure at a point when a difference between the upstream pressure and the downstream pressure reaches a predetermined value as an upstream convergence pressure, and extracting the downstream pressure as a downstream convergence pressure, and (b) extracting the time from a point when the control valve are changed to a closed state to a point when a difference between the upstream pressure and the downstream pressure reaches a predetermined value as a convergence time.