A flow velocity sensor includes a substrate, a resistor, and a signal processing section. The substrate has first and second substrate surfaces outwardly opposite to each other. The first substrate surface is exposed to a fluid. The resistor is mounted on the second substrate surface. The resistor has a heat generating portion facing the second substrate surface. The signal processing section is configured to receive a signal from the resister. The signal from the resistor represents heat dissipation of the resistor. A fluid velocity is detected based on the signal from the resistor.

A monitoring and control system for a flow duct and a method for determining a component status of an operational component disposed within a flow passage of the flow duct utilizing the system are provided. In one exemplary aspect, the system includes at least two sensors that are disposed within the flow passage and configured to sense a characteristic of a fluid flowing therethrough. The sensors may be averaging sensors. Each sensor extends circumferentially about an axial centerline defined by the flow duct. The sensors are arranged in an overlapped arrangement. Particularly, the sensors extend circumferentially about the axial centerline such that the sensors physically overlap one another circumferentially. Additionally, the sensors may be disposed within the same or substantially the same plane axially. Signals generated by the sensors may be utilized to monitor and control the fluid and various operational components disposed within the flow passage.

A monitoring and control system for a flow duct and a method for determining a component status of an operational component disposed within a flow passage of the flow duct utilizing the system are provided. In one exemplary aspect, the system includes at least two sensors that are disposed within the flow passage and configured to sense a characteristic of a fluid flowing therethrough. The sensors may be averaging sensors. Each sensor extends circumferentially about an axial centerline defined by the flow duct. The sensors are arranged in an overlapped arrangement. Particularly, the sensors extend circumferentially about the axial centerline such that the sensors physically overlap one another circumferentially. Additionally, the sensors may be disposed within the same or substantially the same plane axially. Signals generated by the sensors may be utilized to monitor and control the fluid and various operational components disposed within the flow passage.

An object of the present invention is to provide a gas sensor device capable of detecting a temporal change with high accuracy and maintaining measurement accuracy over a long period under a temperature environment susceptible to a complicated and wide range of change. The gas sensor device includes: heat insulating films 8a and 8b formed on a substrate 2; a first heater 3 provided on the heat insulating films 8a and 8b and configured to measure physical quantity of gas; and a reference resistor 4 formed in a resistive layer same as the first heater and formed on the heat insulating films 8a and 8b. The gas sensor device further includes a second heater 5 that simultaneously heats the first heater 3 and the reference resistor 4.

An object of the present invention is to provide a gas sensor device capable of detecting a temporal change with high accuracy and maintaining measurement accuracy over a long period under a temperature environment susceptible to a complicated and wide range of change. The gas sensor device includes: heat insulating films 8a and 8b formed on a substrate 2; a first heater 3 provided on the heat insulating films 8a and 8b and configured to measure physical quantity of gas; and a reference resistor 4 formed in a resistive layer same as the first heater and formed on the heat insulating films 8a and 8b. The gas sensor device further includes a second heater 5 that simultaneously heats the first heater 3 and the reference resistor 4.

A flow-rate sensor is provided with a lead frame, a semiconductor chip that is disposed on one surface of the lead frame, and in which a diaphragm including a void portion on the lead frame side is formed, a flow rate detecting unit that is formed on the one surface including the diaphragm of the semiconductor chip, and resin that includes a flow passage opening portion exposing at least a portion of the flow rate detecting unit formed on the diaphragm, and covers the lead frame and the semiconductor chip. A lower side resin portion of the resin covering another surface side of the lead frame, on an opposite side to the one surface side thereof, has a thinned portion that is thinner than a periphery thereof in a region facing a peripheral edge portion of the diaphragm.

A flow-rate sensor is provided with a lead frame, a semiconductor chip that is disposed on one surface of the lead frame, and in which a diaphragm including a void portion on the lead frame side is formed, a flow rate detecting unit that is formed on the one surface including the diaphragm of the semiconductor chip, and resin that includes a flow passage opening portion exposing at least a portion of the flow rate detecting unit formed on the diaphragm, and covers the lead frame and the semiconductor chip. A lower side resin portion of the resin covering another surface side of the lead frame, on an opposite side to the one surface side thereof, has a thinned portion that is thinner than a periphery thereof in a region facing a peripheral edge portion of the diaphragm.

Traditional flow sensors include an upstream resistive sensor element, a downstream resistive sensor element and an intervening heater resistive element. To help reduce the size and/or cost of such flow sensor, it is contemplated that the heater resistor may be eliminated. When so provided, the space required for the heater resistive element, as well as the corresponding heater control circuit, may be eliminated. This can reduce the cost, size and complexity of the flow sensor.

Traditional flow sensors include an upstream resistive sensor element, a downstream resistive sensor element and an intervening heater resistive element. To help reduce the size and/or cost of such flow sensor, it is contemplated that the heater resistor may be eliminated. When so provided, the space required for the heater resistive element, as well as the corresponding heater control circuit, may be eliminated. This can reduce the cost, size and complexity of the flow sensor.

A sensor for determining at least one parameter of a fluid medium, in particular an induction air-mass flow of an internal combustion engine, flowing through a measuring channel. The sensor has a sensor housing, in particular a plug-in sensor, which is introduced or may be introduced into a flow pipe and in which the measuring channel is developed, and at least one sensor chip, disposed in the measuring channel, for determining the parameter of the fluid medium. The sensor housing has a plurality of channel walls, which delimit the measuring channel. The sensor chip is situated on a sensor carrier. At least in the region of the sensor carrier, at least a first channel wall of the plurality of channel walls and a second channel wall of the plurality of channel walls, which differs from the first channel wall, or the sensor carrier have at least partly magnetic properties.