A thermoresistive micro sensor device includes a semiconductor chip; a through hole, which runs through the semiconductor chip from an upper side to a lower side; electrically conductive structures, wherein the middle section of each of the electrically conductive structures spans over the through hole at the upper side of the semiconductor chip; an electrically insulating arrangement for electrically insulating the electrically conductive structures and the semiconductor chip from each other, wherein the through hole runs through the electrically insulating arrangement; and a contact arrangement including contacts, wherein each of the contacts is electrically connected to one of the first end sections or one of the second end sections, so that electrical energy is fed to at least one of the electrically conductive structures to heat the respective electrically conductive structure, and so that an electrical resistance of one of the electrically conductive structures is measured at the contact arrangement.

A reference volume for use with pressure change flow rate measurement apparatus has an internal structure comprising elements with cross section and length comparable to the cross section and length of adjacent interstitial fluid regions. The reference volume may have one or more heat conduction elements exterior to and in good thermal contact with a corrosion resistant material that defines the internal fluid holding region.

A reference volume for use with pressure change flow rate measurement apparatus has an internal structure comprising elements with cross section and length comparable to the cross section and length of adjacent interstitial fluid regions. The reference volume may have one or more heat conduction elements exterior to and in good thermal contact with a corrosion resistant material that defines the internal fluid holding region.

To provide a flow sensor having improved responsiveness compared to the prior art, the flow sensor of the present invention includes an insulation board, a flow-rate detection resistance element, and a temperature compensation resistance element. Each of the flow-rate detection resistance element and the temperature compensation resistance element is arranged on the insulation board such that a terminal temperature of the temperature compensation resistance element approaches a terminal temperature of the flow-rate detection resistance element. Accordingly, responsiveness can be improved.

An inner housing part has through-holes for connecting first lead pins (power supply terminal, output terminal, ground terminal) with the connector pins. The inner housing part has grooves that house second lead pins for adjusting output signals of a sensor chip. Three of the grooves each has a shape in which a distance between opposing sides of the groove is less than a diameter of the second lead pin that corresponds to the groove. The inner housing part is fixed to a case by a thermoset adhesive so as to house lead pins arranged in the case included in a sensor element. The second lead pins are fitted in the grooves, suppressing lifting of the inner housing part during curing of the adhesive.

An inner housing part has through-holes for connecting first lead pins (power supply terminal, output terminal, ground terminal) with the connector pins. The inner housing part has grooves that house second lead pins for adjusting output signals of a sensor chip. Three of the grooves each has a shape in which a distance between opposing sides of the groove is less than a diameter of the second lead pin that corresponds to the groove. The inner housing part is fixed to a case by a thermoset adhesive so as to house lead pins arranged in the case included in a sensor element. The second lead pins are fitted in the grooves, suppressing lifting of the inner housing part during curing of the adhesive.

A physical quantity measurement device includes a housing forming a measurement flow path, a physical quantity sensor that detects a physical quantity of fluid in the measurement flow path, and a sensor support that supports the physical quantity sensor. The sensor support includes a support front surface on which the physical quantity sensor is disposed, and a support back surface behind the support front surface. The housing includes a floor surface facing a support end of the sensor support, a front wall surface facing the support front surface, and a back wall surface opposite to the front wall surface across the floor surface and facing the support back surface. A front distance between the physical quantity sensor and the front wall surface in a front-back direction is larger than a floor distance between the floor surface and the support end in a height direction orthogonal to the front-back direction.

A physical quantity measurement device includes a housing forming a measurement flow path through which the fluid flows and a container space that houses a part of a detection unit. An inner surface of the housing includes a housing intersecting surface that intersects an arrangement direction in which the measurement flow path and the container space are arranged, a housing flow path surface extending from the housing intersecting surface toward the measurement flow path, and a housing container surface extending from the housing intersecting surface toward the container space. The housing includes a housing partition that protrudes from the inner surface toward the detection unit and contacts the detection unit between the housing and the detection unit such that the housing partition separates the measurement flow path and the container space from each other.

A physical quantity measurement device includes a housing forming a measurement flow path including a measurement inlet and a measurement outlet. The measurement flow path includes a sensor path in which a physical quantity sensor is disposed, an upstream curved path curved to extend from the sensor path toward the measurement inlet, and a downstream curved path curved to extend from the sensor path toward the measurement outlet. An inner surface of the housing includes an upstream outer curved surface that defines an outer outline of a curved part of the upstream curved path, and a downstream outer curved surface that defines an outer outline of a curve part of the downstream curved path. A degree of recess of the downstream outer curved surface is larger than a degree of recess of the upstream outer curved surface.

A physical quantity measurement device includes a housing forming a through flow path, and a measurement flow path branching from the through flow path. A physical quantity sensor is provided in the measurement flow path. An inner surface of the housing includes an inlet ceiling surface and an inlet floor surface which face each other and define an inlet through path that is between and connects an inlet of the through flow path and an inlet of the measurement flow path, The inlet ceiling surface includes a ceiling inclined surface that extends from the inlet of the through flow path and is inclined with respect to the inlet floor surface. A distance between the ceiling inclined surface and the inlet floor surface gradually decreases in a direction from the inlet of the through flow path toward an outlet of the through flow path.