A flow-rate sensor is provided with a lead frame, a semiconductor chip that is disposed on one surface of the lead frame, and in which a diaphragm including a void portion on the lead frame side is formed, a flow rate detecting unit that is formed on the one surface including the diaphragm of the semiconductor chip, and resin that includes a flow passage opening portion exposing at least a portion of the flow rate detecting unit formed on the diaphragm, and covers the lead frame and the semiconductor chip. A lower side resin portion of the resin covering another surface side of the lead frame, on an opposite side to the one surface side thereof, has a thinned portion that is thinner than a periphery thereof in a region facing a peripheral edge portion of the diaphragm.

An electronic utility gas meter using MEMS thermal mass flow sensor to meter gas custody transfer and MEMS gas thermal property sensor to compensate the metering values due to gas composition variations is disclosed in the present invention. The meter is designed to have a MEMS mass flow sensor to meter the city utility gas consumption independent of environmental temperature and pressure while a MEMS gas thermal property or dual gas thermal property sensors to compensate the tariff due to the gas composition variations for compliance with the current regulation requirements of tariff and remove the major concerns for the wide deployment of the thermal mass MEMS utility gas meters.

A sensor SA has a flow sensor that measures a flow rate of intake air in a measurement flow path. The flow sensor has a film-shaped sensor film portion overlapped on a substrate front surface of a sensor substrate. The sensor film portion has a heat generating resistor that heats the sensor film portion and a temperature measuring resistor that measures a temperature of the sensor film portion. The heat generating resistor and the temperature measuring resistor are arranged in a depth direction Z along the substrate front surface of the sensor substrate. A length dimension LM1 of an upstream temperature measuring resistor is equal to or larger than a length dimension LM2 of a downstream temperature measuring resistor.

A sensor SA has a flow sensor that measures a flow rate of intake air in a measurement flow path. The flow sensor has a film-shaped sensor film portion overlapped on a substrate front surface of a sensor substrate. The sensor film portion has a heat generating resistor that heats the sensor film portion and a temperature measuring resistor that measures a temperature of the sensor film portion. The heat generating resistor and the temperature measuring resistor are arranged in a depth direction Z along the substrate front surface of the sensor substrate. A length dimension LM1 of an upstream temperature measuring resistor is equal to or larger than a length dimension LM2 of a downstream temperature measuring resistor.

A microneedle probe for measuring a sap flow in a plant is disclosed, the microneedle probe including: a substrate; and a sensor unit which is installed on the substrate, generates heat, and measures a temperature that changes in accordance with a sap flow.

A microneedle probe for measuring a sap flow in a plant is disclosed, the microneedle probe including: a substrate; and a sensor unit which is installed on the substrate, generates heat, and measures a temperature that changes in accordance with a sap flow.

The present invention provides methods for determining a parameter associated with a flow of a fluid located within a fluid conduit, based on measuring the difference between electrical signals of at least two second sensing elements contacting different positions on am exterior of the fluid conduit. The sensing elements comprise an assembly of nanoparticles being in electric contact with conductive electrodes; wherein the electrical signals of the sensing elements are responsive to at least one of pressure and temperature. Further provided is a clamping device configured to reduce a cross-sectional diameter of a portion of the fluid conduit, in order to determine said parameter.

Proposed is an air velocity sensor (meter) for measuring the flow velocity of a fluid, particularly, the air velocity of gas. More specifically, proposed is a technical field related to an air velocity sensor which measures air velocity or temperature through the heat transfer of a fluid by using a hot wire, that is, a heating element, of a small cross-section, and which expands the surface areas of a temperature sensor, the heating element, and a soldering part in order to further improve the accuracy of a hot wire flow velocity sensor having higher accuracy, even with respect to a low flow velocity, than a general mechanical anemometer, so as to minimize resistance, and thus can easily measure very low flow rates by inducing a quick change in a current to quickly respond to minute changes in resistance and sensitively operate, that is, by improving reaction speed.

Provided are a heater that heats a fluid, and a temperature detector that detects a temperature of the fluid, and a flow rate of the fluid flowing through a main channel is corrected based on a tendency of a detection value detected by the temperature detector to change over time.

Methods and apparatuses associated with flow sensing devices are provided. An example flow sensing device includes a flow cap component and a sensor component. The flow cap component or sensor component may include a heating element. The flow cap component can at least partially define a flow channel configured for a media to flow therethrough. The heater element may be orthogonal or perpendicular to the flow channel. The sensor component may include at least one thermal sensing element disposed upstream of the heater element and at least one thermal sensing element disposed downstream of the heater element. The sensor component may include two or more thermal sensing elements disposed in either the upstream direction or downstream direction of the heater element. Thermal sensing elements may be spaced different distances from the heater element to increase the accuracy and precision of flow rate measurement at low flow rates.