The invention relates to a torque sensor (1000; 1100) having a base body (1001; 1101) which extends in a radial direction (Y) of the base body from an annular inner flange (1003; 1103) having first force application points (1005; 1105), via a mechanically weakened sensor portion (1007; 1107) equipped with measurement transducers (10, 20) which generate output signals, to an annular outer flange (1009; 1109) having second force application points (1011; 1111), wherein a rubber-elastic sealing membrane (1031; 1131) arranged axially between the outer flange (1009; 1109) and the inner flange (1003; 1103) covers the mechanically weakened sensor portion (1007; 1107) in a fluid-tight manner.

In an embodiment, a relative deflection detector may include at least two structural arcs, and a predetermined number of means for measuring position capable of determining the relative deflection in a first component. The at least two structural arcs may be for example, comprised of a first and second structural arc whereby the first and second structural arcs are attached to the first component at respective first and second predetermined locations and whereby each arc is comprised of a respective sequence of indicators, such as, for example, codes inscribed on the outer circumference of each arc. The first and second structural arcs may be positioned in concentric and coplanar relationship with each other. The predetermined number of sensors may be comprised of a first and second optical encoder sensor each positioned in proximate and coplanar relationship with the first and second structural arcs so as to read the first sequence of codes, second sequence of codes, or both, and thereby detect positions of each structural arc (e.g., a first position corresponding to the first structural arc and a second position corresponding to the second structural arc). The first and second positions may be used to calculate and thereby determine a relative deflection of the first component.

An inner support member, a detection deformable body, and a ring-shaped outer support member are disposed sequentially from the inside to the outside around a Z axis as a central axis. Inner surfaces in the vicinity of inner support points of the detection deformable body connect to outer surfaces of the inner support member via inner connecting members, and outer surfaces in the vicinity of outer support points of the detection deformable body connect to inner surfaces of the outer support member via outer connecting members. When a torque acts in the clockwise direction on the outer support member (130) while the inner support member is fixed, detection parts are displaced outwardly, and detection parts are displaced inwardly. These displacements are detected electrically as changes in capacitance values of four capacitor elements including opposing electrodes.

A flexible sensor that includes a printed circuit board (PCB), a capacitive structure on the PCB, and mechanical coupling sites. The PCB includes a slot extending from an outer edge of the PCB to an inner portion of the PCB, and the slot defines a first edge and a second edge facing the first edge. The first and second edges are separated by a gap when the PCB is in an unflexed state. The slot is configured to permit the PCB to flex so as to vary a relative position of the first edge with respect to the second edge. The capacitive structure on the PCB includes a first edge electrode on a portion of the first edge of the PCB, and a second edge electrode on a portion of a second edge of PCB. The second edge electrode is aligned with the first edge electrode across the slot.

The invention relates to a method for measuring the torque of a drive unit (10), particularly a vehicle drive unit (10), said drive unit (10) comprising at least one bearing (20) for connecting to a fixed support point (21), and at least one sensor (22) being provided which measures a change in force and/or position, particularly a relative rotation of the drive unit (10), as a sensor value, wherein a torque at the drive unit (10) is determined as a measurement value on the basis of said sensor value.

A torque sensor according to the present invention includes: an annular deformation body; first and second displacement electrodes which cause displacement by elastic deformation of the annular deformation body; first and second fixed electrodes arranged at positions opposite to the first and second displacement electrodes; and a detection circuit that outputs an electric signal indicating a torque based on a variation amount of capacitance values of first and second capacitive elements each of which is configured of the displacement electrode and the fixed electrode. The annular deformation body includes a high elastic portion and a low elastic portion having a spring constant smaller than a spring constant of the high elastic portion. The detection circuit outputs a first electric signal corresponding to a capacitance value of the first capacitive element and a second electric signal corresponding to a capacitance value of the second capacitive element as an electric signal indicating the acting torque, and determines whether the torque sensor functions normally based on a ratio between the first electric signal and the second electric signal.

The invention relates to a component transducer (20) for sensing a torque component (Mx, My, Mz); wherein an element (21) made of piezoelectric crystal material comprises element surfaces; wherein a force component (Fx, Fy, Fz) produces electric polarization charges on the element surfaces; and wherein the torque component (Mx, My, Mz) to be sensed consists of at least one pair having force components (+Fx, Fx; +Fy, Fy; +Fz, Fz) wherein said force components (+Fx, Fx; +Fy, Fy; +Fz, Fz) of a pair have the same axis of action and opposite directions of action. The component transducer (20) receives the force components (+Fx, Fx; +Fy, Fy; +Fz, Fz) of a pair separately.

A torque sensor according to the present invention includes a strain body, first structure Y-axis connecting portions, second structure X-axis connecting portions and a detection element. The first structure Y-axis connecting portions are disposed on a positive side and a negative side of a Y-axis relative to the strain body, and the second structure X-axis connecting portions are disposed on a positive side and a negative side of an X-axis relative to the second structure. The strain body includes four deformable bodies each including a displacement portion that is displaced in a Z-axis direction by elastic deformation. The deformable bodies are respectively disposed in a first quadrant, a second quadrant, a third quadrant, and a fourth quadrant. The detection element includes a capacitive element that detects a change in capacitance value by a displacement of the displacement portion of each of the deformable bodies in the Z-axis direction.

A tool driver for use in robotic surgery includes a base configured to couple to a distal end of a robotic arm, and a tool carriage slidingly engaged with the base and configured to receive a surgical tool. In one variation, the tool carriage may include a plurality of linear axis drives configured to actuate one or more articulated movements of the surgical tool. In another variation, the tool carriage may include a plurality of rotary axis drives configured to actuate one or more articulated movements of the surgical tool. Various sensors, such as a capacitive load cell for measuring axial load, a position sensor for measuring linear position of the guide based on the rotational positions of gears in a gear transmission, and/or a capacitive torque sensor based on differential capacitance, may be included in the tool driver.

An inner support member, a detection deformable body, and a ring-shaped outer support member are disposed sequentially from the inside to the outside around a Z axis as a central axis. Inner surfaces in the vicinity of inner support points of the detection deformable body connect to outer surfaces of the inner support member via inner connecting members, and outer surfaces in the vicinity of outer support points of the detection deformable body connect to inner surfaces of the outer support member via outer connecting members. When a torque acts in the clockwise direction on the outer support member (130) while the inner support member is fixed, detection parts are displaced outwardly, and detection parts are displaced inwardly. These displacements are detected electrically as changes in capacitance values of four capacitor elements including opposing electrodes.