A vacuum bell probe for detecting leaks in underground gas pipes may include a flexible suction cup having a bottom side forming a suction opening. The suction cup may define an interior volume. The bottom side may include a soft seal ring having a higher elasticity than the suction cup, surrounding the suction opening and forming a contact surface adapted to create a seal in contact with a ground surface under which a gas leak may be assumed such that a vacuum may be generated within the interior volume upon contact to the ground surface.

Disclosed is a mass-spectrometry leak detector including a multi-stage turbomolecular pump, a mass spectrometer connected to the suction side of the turbomolecular pump, a preliminary vacuum pump connected to the pressure side of the turbomolecular pump, and a booster pump stage. The suction side of the booster pump stage has a connection for a test object and the pressure side is connected to the pressure side of the turbomolecular pump and to the suction side of the preliminary vacuum pump by means of a gas line path. The stages of the turbomolecular pump and the booster pump stage are arranged on a common shaft and have a common drive and the gas line path is interrupted, by means of a separation, between the pressure side of the booster pump stage and the suction side of the pump stage of the turbomolecular pump connected to the mass spectrometer.

A method for detecting a leak in a heat exchanger plate includes positioning the heat exchanger plate between a first fixture and a second fixture to create both a first sealed space between the heat exchanger plate and the first fixture and a second sealed space between the heat exchanger plate and the second fixture. The first sealed space is on one side of the heat exchanger plate and the second sealed space is on the other side of the heat exchanger plate. The method includes supplying an inert gas to the second sealed space, drawing a vacuum in the first sealed space, and detecting whether the first sealed space includes the inert gas. The presence of inert gas indicates the plate is not leak-tight.

The present invention includes: an inspection table configured to support a three-way valve device in such a state that a first opening and a second opening are sealed by a sealing member; a communication hole provided through the inspection table and configured to hermetically communicate with a third opening in a state wherein the three-way valve device is supported by the inspection table; an enclosure configured to cover the three-way valve device to form a sealed space except for the communication part; a helium-gas supply path for supplying a helium gas into the three-way valve device via the communication part and the third opening; a leak tester device configured to determine whether or not there is a leakage of the helium gas into the sealed space; and a helium-gas suction discharge path for suctioning and discharging the helium gas supplied via the third opening and the communication part.

A vacuum pump comprises: a pump rotor portion configured such that multiple rotor blade stages including stacking portions formed in a ring shape and turbine blades radially formed on an outer peripheral side of the stacking portions are stacked on each other; a rotor shaft to which inner peripheral surfaces of the stacking portions of the multiple rotor blade stages stacked on each other are fixed; and a communication path allowing communication between a clearance space between the rotor shaft and each stacking portion and a pump exhaust path in which the turbine blades are arranged and discharging gas in the clearance space through the pump exhaust path.

A device for evacuating a film chamber using a pump system that comprises at least two vacuum pumps, designed to evacuate the film chamber alternately. A suction capacity of the first vacuum pump is greater than that of the second vacuum pump and the final pressure achievable by the first vacuum pump is less than that of the second vacuum pump.

A method for leak detection of a test specimen includes providing an evacuable film test chamber which is operatively coupled to a pressure measuring device, and at least one processor operatively coupled to the pressure measuring device; measuring a pressure within the evacuable film test chamber by the pressure measuring device at predetermined times during a measurement period of time; calculating by the processor, a first or higher order derivative of a pressure change with respect to time at a first predetermined time, and a first or higher order derivative of a pressure change with respect to time at least at a second predetermined time during the measurement period of time, to provide at least a pair of derivative values; and categorizing by the processor a leaky or tight state of the specimen under test by a pattern recognition process based on the pair of derivative values.

The invention relates to a gas leakage search device including a test gas spray device for spraying a test object with a test gas, a vacuum assembly for evacuating the test object, wherein the vacuum assembly has a vacuum pump and a gas detector downstream of the test object for measuring the test gas proportion, and an analysis unit which evaluates the measurement signal of the gas detector. The invention is characterized in that a data communication connection is established between the spray device and the analysis unit; the spray device is designed to detect at least one point in time of the spraying process and to transmit same to the analysis unit, and the analysis unit is designed to output the corresponding measured test gas proportion at the transmitted point in time of the spraying process.

A leak detector for checking the sealing tightness of an object to be tested includes a detection inlet to be connected to the object, a first pumping device, and a gas detector. The first pumping device includes a first rough vacuum pump, at least one second rough vacuum pump, and a turbomolecular pump. The gas detector is connected to the turbomolecular pump. The outlet of the at least one second rough vacuum pump is connected to the first rough vacuum pump, between two in-series pumping stages of the first rough vacuum pump.

A spray device for detecting leaks is provided, including: a duct including an inlet configured to be connected to a tracer gas source, and an outlet; a valve interposed between the inlet and the outlet; a casing receiving the duct and the valve; at least one probe arranged in the duct, the at least one probe being configured to measure a parameter revealing a presence of the tracer gas in the duct; and at least one information device borne by the casing, configured to provide information on the presence of tracer gas in the duct in relation to a measurement performed by the at least one probe.