The invention in provides an apparatus, system and method of monitoring a sealing device. The apparatus comprises an inlet configured to receive pressurised fluid from a seal activation fluid pressure source and an outlet configured to be connected to a sealing device to deliver pressurised fluid to a seal element of the sealing device to energise the sealing device in use. A fluid barrier is disposed between the inlet and the outlet and is operable to isolate the inlet from the outlet. A fluid chamber is defined between the fluid barrier and the outlet, and the apparatus comprises means for detecting a change in condition in the fluid chamber indicative of a change in volume of the seal element of the sealing device.

A connector is described, including a housing including an internal volume, a port in the housing for receiving a conduit and providing access to the internal volume, a sealing arrangement for sealing the internal volume in the housing and a seal integrity test system including a sensor coupled to the housing. The seal integrity test system is configured to provide a measurement based on the pressure inside the internal volume of the housing to establish the integrity of the sealing arrangement.

A seal integrity verification system includes a pressure source, a valve, and a pressure sensor. The pressure source is fluidly connected to a housing having at least one sealing member. The valve is fluidly connected to the pressure source and the housing. The valve is movable between a first open position and a closed position. The pressure sensor is arranged to provide a first signal indicative of a pressure within the housing.

A pressure-adjustable auxiliary control system for high-pressure gas sealing detection includes: a high-pressure chamber environment monitoring unit configured to construct high-pressure test gas sealing environment and to test sealing performance of a sealing member; a first gas pipeline divided into two branches, of which one branch is connected to the high-pressure chamber environment monitoring unit as a first gas replacement path; a second gas pipeline which is connected to a test gas pressurization path together with the other branch of the first gas pipeline, where a first booster pump processing unit and a second booster pump processing unit are sequentially arranged in the test gas pressurization path for pressurizing the test gas, and are connected to the high-pressure chamber environment monitoring unit; a system air control module configured for control of respective air control valves; and a booster pump air control module and a driving air source preprocessing unit.

A method is provided for testing an annular seal within a gas turbine engine. During this method, a vacuum is applied to a first volume through a conduit. The annular seal is between the first volume and a second volume. A vacuum pressure is measured within the conduit while the vacuum is applied. The measured vacuum pressure is compared to a threshold vacuum pressure. A difference between the measured vacuum pressure and the threshold vacuum pressure is indicative of leakage across the annular seal from the second volume to the first volume.

A method for testing whether a sealing method is effective may include the steps of testing a flow characteristic of the substrate, sealing the substrate, re testing the flow characteristic of the substrate, then comparing the before and after flow characteristics of the substrate to determine whether the sealing step was effective or to quantify a sealing effectiveness to the sealing step.

This seal state detection device includes a plurality of part case members including a cylinder facing part and a rod facing part and are aligned in a circumferential direction of a cylinder by causing the cylinder facing part to face the cylinder and the rod facing part to face a rod so that a housing chamber for housing a part of the cylinder and a part of the rod is formed between the cylinder facing part and the rod facing part. The cylinder facing part includes a seal part which contacts with the cylinder. The seal part includes a protruding part formed at one end and a recessed part formed at the other end in the circumferential direction of the cylinder. The protruding part and the recessed part are fitted to each other when the plurality of part case members are aligned in the circumferential direction of the cylinder.

A wafer processing apparatus includes a vacuum chuck on which a wafer is seated, a ring cover installed on a circumferential portion of the vacuum chuck, a medium supply part connected to the vacuum chuck to supply an inspection medium to the vacuum chuck, and a sealing ring which is installed in the vacuum chuck to support the wafer and into which the inspection medium supplied to the vacuum chuck is introduced.

An actuator system includes a piston-cylinder arrangement including a piston that is movable with respect to a cylinder. A first flow path is in fluid communication with the piston-cylinder arrangement and a second flow path is in fluid communication with the piston-cylinder arrangement. A control system is operable to fluidly connect the first flow path to a source of high-pressure fluid and to connect the second flow path to a drain to move the piston in a first direction. A pressure sensor is fluidly connected to the first flow path and is operable to measure sufficient pressure data during the movement of the piston to generate a pressure versus time curve. The control system is operable to compare the generated pressure versus time curve to a known standard pressure versus time curve stored in the control system to determine the condition of the piston-cylinder arrangement.

In a steam turbine seal packing performance monitoring system, steam pressure is measured by installing a pressure sensor inside a seal packing for preventing steam from leaking, so that pressure information can be transmitted using magnetic field communication in order to externally monitor seal packing performance. The system includes a seal packing unit that is installed on a rotor shaft and has a plurality of seal packs disposed along an axial direction of the rotor shaft; a pressure sensor installed inside the seal packing unit to detect a pressure of steam leaked from inside the seal packing unit and to transmit a magnetic field signal by converting a detection signal indicative of the detected pressure into the magnetic field signal; and an adapter for receiving the magnetic field signal, converting the received magnetic field signal into pressure data, and calculating a leakage amount of steam based on the pressure data.