A leak detecting device for a fluid filled vessel including a housing, tube, anchoring attachment, resilient member, and opening. The housing has a continuous perimeter edge sized to extend around an underwater surface, the housing forming a hollow interior. The tube extends through an aperture into the hollow interior of the housing, having a first end on an interior side of the housing and a second end on an exterior side of the housing. The anchoring attachment is secured to the first end of the tube. The resilient member is secured to the perimeter edge of the housing and adapted to contact and form a seal between the housing and the underwater surface. The opening is formed through an entirety of a wall of the housing, wherein the opening is accessible from an exterior of the housing.

It is an object of the present invention to enhance reliability of an allowable limit conductance used for setting a threshold value for evaluating sealability of a test object, and further, enhance reliability of the sealability evaluation. By leak testing a test object 9A with a sealing defect 9g, a leakage characteristic that shows a relationship between an internal-external pressure difference and a leak flow rate is obtained. A conductance of a test object with a similar artificial leak 9B having a similar artificial leak device 29 disposed therein, conducting the leak-detected substance is measured. The similar artificial leak device 29 has a leakage characteristic similar to the obtained leakage characteristic. An allowable limit conductance is obtained based on results of the measurement. Sealability of a test object 9 is evaluated based on a threshold value set with a standard artificial leak device 9S having the allowable limit conductance.

Systems and methods for sensing water device run time, transmitting this data via a network to a database which analyzes, records and reports the individual run times and the aggregate use over any given timeframe. Sensors used to measure device use time do not directly measure flow rate, and may sense device run time by sensing water flow, through electronic signals, vibration, etc. The sensors may be battery powered and transmit discrete data packets via radio frequency to powered node units. A system of node units communicates with a central internet gateway which uploads the data packets to a cloud-based database which organizes, analyzes, stores and reports the information. The system allocates the cost of water flowing through a common water meter to a plurality of individual units within a collection of geographically proximate units. The systems are useful in multi-unit buildings or complexes having stacked plumbing.

A computing system having a memory and a processor configured to process flow data packets (FDPs) collected from a set of sensor devices, each installed in a toilet that collects a flow data packet (FDP) in response to a detected event, wherein each FDP includes a sequence of flow rate values collected over the course of the detected event. The processor is configured to: issue a first type of alert in response to a number of flow rate values in a current FDP being above a threshold; issue a second type of alert in response to a detected abnormal behavior of the current FDP relative to previously collected FDPs for an associated toilet; and issue a third type of alert based on a water usage for the toilet, wherein the water usage is based on calculated flow rate for a toilet determined from at least one FDP.

Disclosed herein are an apparatus and method for gas leakage measurement in a high pressure reactor. In particular, the present invention relates to an apparatus for gas leakage measurement in a high pressure reactor including: a gas inlet; a first valve equipped to one side of the gas inlet; a flowmeter; a pressure gauge measuring an internal pressure of the reactor; a gas outlet; and a second valve, wherein if in internal pressure reaches a preset pressure by closing the second valve and injecting a gas to the reactor through the flowmeter in the state of opening the first valve, the gas leakage status in the reactor is measured through pressure changes in the pressure gauge after closing the first valve.

A method for measuring wafer bow value comprising the following steps is provided. Place a wafer on a wafer chuck apparatus. A gas inlet process is performed on gas inlet passageways of a passageway pair of the wafer chuck apparatus. A gas outlet process is performed on gas outlet passageways of a passageway pair of the wafer chuck apparatus. A leak rate of each channel pair is measured by the control unit when the wafer is placed on the wafer chuck apparatus and during the gas inlet process and gas outlet process are performed. A wafer bow value of the wafer on the wafer chuck apparatus is estimated by the leak rate of the passageway pair. A wafer chuck apparatus is provided. A semiconductor process flow is provided.

A leak detecting device for a fluid filled vessel including a housing, a clamp, a resilient member, and an opening. The housing has a continuous perimeter edge sized to extend around an underwater surface, the housing forming a hollow interior. The clamp secures to the housing. The resilient member secures to the perimeter edge of the housing and is adapted to contact and form a seal between the housing and the underwater surface. The opening is formed through an entirety of a wall of the housing, wherein the opening is accessible from an exterior of the housing.

Systems and methods for sensing water device run time, transmitting this data via a network to a database which analyzes, records and reports the individual run times and the aggregate use over any given timeframe. Sensors used to measure device use time do not directly measure flow rate, and may sense device run time by sensing water flow, through electronic signals, vibration, etc. The sensors may be battery powered and transmit discrete data packets via radio frequency to powered node units. A system of node units communicates with a central internet gateway which uploads the data packets to a cloud-based database which organizes, analyzes, stores and reports the information. The system allocates the cost of water flowing through a common water meter to a plurality of individual units within a collection of geographically proximate units. The systems are useful in multi-unit buildings or complexes having stacked plumbing.

A flow detector for detecting flow rates of fluid in pipes by measuring the temperature of the pipe and the ambient temperature and determining from the signals whether there is a flow in the pipe, by the shape of the temperature signals without providing any heat input to the pipe or fluid.

A method for testing a container (11) having an interior volume (12) for tightness, comprising the following steps: providing the container (11) in a pressure chamber (10) and reducing pressure within the pressure chamber (10) or increasing pressure within the container (11) as far as a predefined test pressure, ascertaining a pressure profile (100) within the pressure chamber (10) over time, comparing the pressure profile (100) to a reference profile (200) in order to determine whether a leak is present within the container (11), wherein ambient conditions of the container (11) and/or the pressure chamber (10) are monitored and the reference profile (200) is adapted to changing ambient conditions.