An inspection apparatus for performing inspection of an object includes an illumination device, an imaging device, and a processor. The illumination device performs an anisotropic illumination and an isotropic illumination for the object. The imaging device images the object illuminated by the illumination device. The processor performs processing for the inspection of the object based on an image obtained by the imaging device. The processor generates an inspection image based on (i) plural first images obtained by the imaging device while the illumination device respectively performs plural anisotropic illuminations and (ii) a second image obtained by the imaging device while the illumination device performs an isotropic illumination, and performs the processing based on the inspection image.

Provided herein is an apparatus including a photon emitter array. The photon emitter array includes a number of photon emitters selectively oriented in a number of polarized orientations. The photon emitters are configured to controllably emit photons onto a surface of an article. The apparatus also includes a photon detector positioned to receive photons scattered from features on the surface of the article. The photon detector simultaneously receives photons oriented in the number of polarized orientations. In addition, the photon detector provides information for mapping the features on the surface of the article.

Described herein are high intensity illumination systems including lighting arrays of lights, such as light emitting diodes, configured to illuminate a surface. The lighting arrays are configured to illuminate the surface with illumination comparable to or multiple times brighter than the ambient illumination, such as sunlight. Also described herein are methods of using a high intensity illumination system to illuminate a surface for applications including imaging, object detection, and object localization. The systems and methods described herein may be applied to a range of industries including farming, agriculture, construction, and autonomous vehicles.

Provided herein is an apparatus, including at least two photon emitters, each with a preselected polarization orientation, and configured to emit polarized photons onto a surface of an article, and a processing means configured to process photon-detector-array signals corresponding to photons scattered from surface features of the article, and generate one or more surface features maps for the article from the photon-detector-array signals corresponding to the photons scattered from the surface features of the article.

A light-emitting table suitable for use in metrology includes a plurality of light sources and a field to be illuminated. Light-emitting centers of the light sources represent starting points of light source axes which perpendicularly intersect the field to be illuminated. The light-emitting centers of the light sources on one side and the field to be illuminated on the other side delimit an intermediate space in the interior of the light-emitting table. Located between the light source axes within the intermediate space are curved and mirrored surfaces, the focal points or caustics (K) of which are located within the intermediate space between the curved and mirrored surfaces and the field to be illuminated. A coordinate measuring machine for capturing the coordinates of a workpiece includes at least one optical sensor and a light-emitting table for illuminating the workpiece during measurement of the coordinates of the workpiece using the sensor.

Provided is an optical foreign substance detection device using light scattering and image analysis to detect and analyze a foreign substance included in a target object, and the optical foreign substance detection device includes an optical housing; a light irradiation unit connected to and installed in a lower portion of the optical housing, and has a plurality of light sources arranged to irradiate light toward the target object below that the light sources irradiate light so that light scattering is generated by a foreign substance; an optical unit built into an upper portion of the optical housing, and captures the target object so the foreign substance included in the target object is detected by using light scattering of the foreign substance by the light irradiated from the light source and creates an image; and a user device that receives, stores, reproduces, and analyzes the image created from the optical unit.

Described herein are high intensity illumination systems including lighting arrays of lights, such as light emitting diodes, configured to illuminate a surface. The lighting arrays are configured to illuminate the surface with illumination comparable to or multiple times brighter than the ambient illumination, such as sunlight. Also described herein are methods of using a high intensity illumination system to illuminate a surface for applications including imaging, object detection, and object localization. The systems and methods described herein may be applied to a range of industries including farming, agriculture, construction, and autonomous vehicles.

An illumination module may include a laser diode array configured to emit laser radiation; a phosphor illumination unit that is configured to emit phosphor radiation following an exposure to the laser radiation; a multiple-angle illumination unit; and intermediate optics that is configured to convey the phosphor radiation to the multiple-angle illumination unit. The multiple-angle illumination unit is configured to receive the phosphor radiation and to dark field illuminate a region of a sample wafer from multiple angles during inspection of the wafer.

Described herein are high intensity illumination systems including lighting arrays of lights, such as light emitting diodes, configured to illuminate a surface. The lighting arrays are configured to illuminate the surface with illumination comparable to or multiple times brighter than the ambient illumination, such as sunlight. Also described herein are methods of using a high intensity illumination system to illuminate a surface for applications including imaging, object detection, and object localization. The systems and methods described herein may be applied to a range of industries including farming, agriculture, construction, and autonomous vehicles.

Described herein are high intensity illumination systems including lighting arrays of lights, such as light emitting diodes, configured to illuminate a surface. The lighting arrays are configured to illuminate the surface with illumination comparable to or multiple times brighter than the ambient illumination, such as sunlight. Also described herein are methods of using a high intensity illumination system to illuminate a surface for applications including imaging, object detection, and object localization. The systems and methods described herein may be applied to a range of industries including farming, agriculture, construction, and autonomous vehicles.