In an inspection apparatus, a plurality of light source parts (42, 43) for irradiating an object area on a surface of an object (9) with light from a plurality of directions, respectively, are provided, and a first picked-up image representing an object area is acquired in one image pickup part (32, 33) by light irradiation from one of the plurality of light source parts and a second picked-up image is acquired in the image pickup part by light irradiation from the plurality of light source parts. Further, a first defect candidate area is detected by comparing the first picked-up image with a first reference image corresponding to the first picked-up image and a second defect candidate area is detected by comparing the second picked-up image with a second reference image corresponding to the second picked-up image. Then, an overlapping area in the first defect candidate area and the second defect candidate area is specified as a defect area in the object area. It is thereby possible to detect a defect on the satin-finished surface of the object with high accuracy.

The present disclosure relates to a lighting apparatus. A lighting apparatus according to an embodiment of the present disclosure includes: a dome structure including a first opening opened in a circular or polygonal shape at least partially in one surface thereof, and a second opening opened in a circular or polygonal shape at least partially in the other surface so as to be larger than the first opening; a plurality of reflective plates configured to connect one line the first opening and one line of the second opening; a PCB provided in the dome structure and disposed at a predetermined first angle based on a region of the other surface that excludes the second opening in the other surface of the dome structure; and a light source disposed on the PCB, in which light outputted at the first angle from the inside of the dome structure through the light source is reflected through at least one of the plurality of reflective plates, and the reflected light is emitted through the second opening to an object disposed at a lower end of the second opening and spaced apart from the dome structure.

An illumination unit comprising a first electromagnetic wave source including circuitry for outputting a first electromagnetic wave in a first direction to illuminate a first region of a sample; a second electromagnetic wave source including circuitry for outputting a second electromagnetic wave in a second direction substantially opposite to the first direction; and a reflector configured to reflect the second electromagnetic wave substantially in the first direction to illuminate a second region of the sample.

A device, system, and method related to operator guided inspection is disclosed. A portable inspection device (“PID”) is comprised of a housing, display, camera, light array, gyro, location sensor, a non-transitory computer-readable medium, a processor, and a computer-executable instruction set stored on the non-transitory computer-readable medium. The method is comprised of the steps of selecting an inspection task using the PID; capturing an image of the DUT; providing a reference image with reference dimensions; fixing the focal distance on the camera; providing a region of interest (“ROI”) and an alignment region (“AR”) on the display of the PID; adjusting the lighting of the PID to match the illumination on the DUT with the illumination in the reference image; adjusting the distance between the PID and the DUT such that the DUT fits in the ROI; rotating the PID until the ROI and AR merge into a Merged Region; calibrating the Merged Region with the reference image by scaling the pixel-level distances of the Merged Region with the reference dimensions of the reference image; and performing an automated inspection routine on one or more special characteristics of the DUT. The operator guided inspection system (“OGIS”) includes a plurality of PIDs capable of measuring a plurality of DUTs.

A fused imaging device and method are disclosed. The device comprises a light source component, an image capture component, and a control component. The control component may be configured to control the light source component to illuminate a target object based on a preset plurality of first optimal lighting configurations. The control component may further control the image capture component to capture images of the target object to obtain multiple first images, under the illumination of the light source component and generate a target image of the target object, based on the first images. The control component may further adjust the incidence angle, pattern, and wavelength of the light source in the light source component, as well as the exposure, lens focus, and polarization of the image capture component, to detect target object defects in captured images of the target object.

An illumination module may include a laser diode array configured to emit laser radiation; a phosphor illumination unit that is configured to emit phosphor radiation following an exposure to the laser radiation; a multiple-angle illumination unit; and intermediate optics that is configured to convey the phosphor radiation to the multiple-angle illumination unit. The multiple-angle illumination unit is configured to receive the phosphor radiation and to dark field illuminate a region of a sample wafer from multiple angles during inspection of the wafer.

A defect image including a defect and a defect-free image not including a defect for an article different from an inspection article are acquired to teach an identifier when inspecting for a defect in the inspection article. The identifier that has learned the images is made to identify whether an extracted inspection image obtained by segmenting the inspection image of the inspection article includes the defect and the identification results of the identifier are used to determine whether a defect is present in the inspection article. When teaching the identifier the defect, the identifier is provided with, as learning images, a plurality of extracted defect images generated from the defect image by changing an extracting region for extraction from the defect image such that the defect in the defect image is at a different position in each of the plurality of extracted defect images.

An inspection tunnel for illuminating an outer surface of an object to be inspected, comprising a frame with an arch shape of the inspection tunnel; light sources distributed on an inner face of the frame, configured for illuminating the outer surface of the object; a light diffusing screen with an arch shape and extending in front of the light sources; wherein the light diffusing screen contacts at least some of the light sources.

According to various embodiments of the present invention, an optical capture system is provided. In one embodiment, a micro-scale optical capturing system is provided with low divergence (approximately 1°) of the incident light and low acceptance angle (<8°) of the captured light. According to embodiments, a micro-scale optical capturing system is provided with a large number of collimated high-power white LEDs as light sources, between 60 and 100 units, for example, and may be positioned at distances of about 650 mm from the sample. In one embodiment, a digital camera using 50 mm focal objective with a 25 mm length extension tube captures images of the sample. This provides a working distance of approximately 100 mm and at the same time maintains ×0.5 magnification for microscale captures, with an image size of 4×4 microns per pixel.

An inspection system including an illumination subsystem and an image sensing subsystem, the illumination subsystem providing a plurality of illumination modalities, the system simultaneously illuminating at least two areas of an object with different ones of the plurality of illumination modalities, images of which are acquired by a single sensor forming part of the image sensing subsystem.