G01N2021/8825

MULTI-FIELD LAYER INSPECTION METHOD FOR SURFACE OF CYLINDRICAL OBJECT

Disclosed is a multi-field layer inspection method for the surface of a cylindrical object, in which several areas for bright, dark, and edge fields are extracted from multiple images, and these extracted areas are combined to form a complete lateral area in each field, enabling accurate detection of recessed defects below the reference plane, protruding defects above it, as well as planar defects.