Patent classifications
G01N21/896
SLOPE, P-COMPONENT AND S-COMPONENT MEASUREMENT
An optical scanning system including a radiating source capable of outputting a source light beam, a de-scan lens that is configured to output a de-scanned light beam, the de-scanned light beam is created by focusing light reflected from the sample and the de-scan lens is located approximately one focal length of the de-scan lens from an irradiation location where the light beam irradiates the sample, a focusing lens that is configured to output a focused light beam, a collimating lens that is configured to output a collimated light beam, a polarizing beam splitter that is configured to be irradiated by the collimated light beam, and a detector that is configured to be irradiated by at least a portion of the collimated light beam that is not reflected by the polarizing beam splitter.
Method and device for locating the origin of a defect affecting a stack of thin layers deposited on a substrate
A method for locating, in a deposition line including a succession of compartments, an origin of a defect affecting a stack of thin layers deposited on a substrate in the compartments, in which each thin layer is deposited in one or more successive compartments of the deposition line and pieces of debris remaining on the surface of a thin layer deposited in a compartment act as masks for the subsequent depositions of thin layers and are the origin of defects, includes obtaining at least one image showing the defect, determining, from the at least one image, a signature of the defect, the signature containing at least one characteristic representative of the defect, and identifying at least one compartment of the deposition line liable to be the origin of the defect from the signature of the defect and using reference signatures associated with the compartments of the deposition line.
Method and device for locating the origin of a defect affecting a stack of thin layers deposited on a substrate
A method for locating, in a deposition line including a succession of compartments, an origin of a defect affecting a stack of thin layers deposited on a substrate in the compartments, in which each thin layer is deposited in one or more successive compartments of the deposition line and pieces of debris remaining on the surface of a thin layer deposited in a compartment act as masks for the subsequent depositions of thin layers and are the origin of defects, includes obtaining at least one image showing the defect, determining, from the at least one image, a signature of the defect, the signature containing at least one characteristic representative of the defect, and identifying at least one compartment of the deposition line liable to be the origin of the defect from the signature of the defect and using reference signatures associated with the compartments of the deposition line.
Belt-like glass film quality inspection method and glass roll
In cutting a band-shaped glass film along a longitudinal direction thereof and evaluating linearity of an end side formed in association with the cutting to inspect quality of a cut band-shaped glass film, the following steps are performed: an imaging step of dividing the end side into a plurality of segments and imaging each of the plurality of segments; a linear approximation step of calculating an approximate straight line of the end side based on a plurality of points different from each other on the end side in each of a plurality of images obtained in the imaging step; a variation calculation step of calculating a variation value of the plurality of points based on the approximate straight line; and an evaluation step of evaluating the linearity of the end side based on a plurality of variation values respectively corresponding to the plurality of images.
METHOD FOR THE IDENTIFICATION OF DEFECTS IN TRANSPARENT SLABS AND RELATED SYSTEM
A method (and system) for the identification of defects in transparent slabs comprises at least the phases of supply of at least one transparent slab to be inspected; acquisition of at least one image of at least one portion of the slab along an acquisition line; identification of at least one defect in the slab depending on the acquired image; at least one emission phase of at least one light radiation transmitted inside the slab along an emission line substantially transverse to the acquisition line and adapted to be incident with at least one defect in the slab in order to identify the position thereof, the light radiation incident with the defect being diffused by the latter at least in part outside the slab.
METHOD FOR THE IDENTIFICATION OF DEFECTS IN TRANSPARENT SLABS AND RELATED SYSTEM
A method (and system) for the identification of defects in transparent slabs comprises at least the phases of supply of at least one transparent slab to be inspected; acquisition of at least one image of at least one portion of the slab along an acquisition line; identification of at least one defect in the slab depending on the acquired image; at least one emission phase of at least one light radiation transmitted inside the slab along an emission line substantially transverse to the acquisition line and adapted to be incident with at least one defect in the slab in order to identify the position thereof, the light radiation incident with the defect being diffused by the latter at least in part outside the slab.
Lighting for defect inspection of sheet-shaped objects, defect inspection apparatus for sheet-shaped objects, and method of defect inspection of sheet-shaped objects
A lighting for defect inspection of sheet-shaped objects includes: an elongated light application unit configured to apply illumination light to a sheet-shaped object, the light application unit extending in a second direction that is orthogonal to a first direction on a surface of the sheet-shaped object; a first light shielding unit that is located on a light path from the light application unit to the sheet-shaped object, the first light shielding unit having light shielding sections and opening sections alternately arranged; and a second light shielding unit that is located between the first light shielding unit and the sheet-shaped object, the second light shielding unit having light shielding sections and opening sections alternately arranged in a direction parallel to the second direction.
REGION PROBER OPTICAL INSPECTOR
An optical scanning system including a radiating source that outputs a light beam, a time varying beam reflector that reflects the light beam through a scan lens towards a transparent sample at an incident angle of plus or minus ten degrees from Brewster's angle, a focusing lens configured to be irradiated by light scattered from the transparent sample, and a detector that is irradiated by the light scattered from the transparent sample. The detector outputs a signal that indicates an intensity of light measured by the detector. None of the light scattered from the transparent sample is blocked. The light scattered from the transparent sample is scattered from the top surface of the transparent sample, the bottom surface of the transparent sample, or any location in between the top surface of the transparent sample and the bottom surface of the transparent sample.
LINEAR DEFECT INSPECTION DEVICE
The present disclosure relates to a defect inspection device including: an imaging part that captures an image of a first frame having a predetermined width and a predetermined length along a width direction and a length direction of a test object, respectively; an image division part that divides the image of the first frame of the test object captured by the imaging part into a plurality of second frames smaller than the first frame along the width direction of the test object; a brightness calculation part that measures a brightness value of each of the plurality of the second frames, and calculates a defect determination value of the first frame based on the brightness values of the plurality of the second frames; and a control part that determines a line defect existing along the length direction of the test object based on the calculated defect determination value of the first frame.
METHODS OF PROCESSING A VISCOUS RIBBON
Methods of processing a viscous ribbon include supplying a molten material from a supply vessel. Methods include forming the molten material into the viscous ribbon. The viscous ribbon travels along a travel path. Methods include receiving thermal light energy produced from the viscous ribbon. Methods include generating an image of the viscous ribbon from the thermal light energy. Methods include detecting a defect of the viscous ribbon from the image.