Patent classifications
G01R31/2858
Crack detecting and monitoring system for an integrated circuit
Embodiments of the disclosure provide a system for detecting and monitoring a crack in an integrated circuit (IC), including: at least one electrically conductive perimeter line (PLINE) extending about, and electrically isolated from, a protective structure formed in an inactive region of the IC, wherein an active region of the IC is enclosed within the protective structure; a circuit for sensing a change in an electrical characteristic of the at least one PLINE, the change in the electrical characteristic indicating a presence of a crack in the inactive region of the IC; and a connecting structure for electrically coupling each PLINE to the sensing circuit.
Sensor for gate leakage detection
Aspects generally relate methods and apparatuses of gate leakage detection of a transistor. A gate pad is coupled to a gate of a MOS transistor. A gate leakage detection circuit is coupled to the gate pad, wherein the gate leakage detection circuit is configured to estimate a gate leakage current. Based on the estimated gate leakage current determining a quality of a gate fabrication process.
Die edge integrity monitoring system
An edge crack monitoring system for an integrated circuit provided on a die, comprises a conductive trace comprising at least a first conductive path for allowing current in a first direction, and a second adjacent conductive path for allowing current in a second direction opposite to the first direction. Both adjacent conductive paths form at least one loop surrounding a semiconductor device on a die. The arrangement of the trace is adapted to provide compensation of EM interferences. The trace comprises two terminals being connectable to a detection circuit for detecting damages by generating a fault signal upon detection of disruption of the conductive trace due to a damage. The conductive trace comprises high resistance portions with a resistance of at least 1 k, adapted for reducing self-resonance.
Embedded photodetector as device health monitor for hot carrier injection (HCI) in power semiconductors
A semiconductor device with at least one embedded photodetector is disclosed. The at least one photodetector is embedded in a hot carrier injection (HCI) area, and detects a quantity of emitted photons. Further, the photodetector triggers a warning when the photodetector detects a number of photons greater than a threshold number of photons. Additional embodiments are directed to a method of detecting HCI. The method includes embedding a photodetector in a power semiconductor device, setting at least one threshold number of photons, detecting photons, determining a number of photons, determining when the number of photons is above a threshold number of photons, and generating a warning. When the number of photons is above the threshold, the warning is triggered. Further embodiments are directed to an article of manufacture comprising at least one semiconductor device with at least one photodetector embedded in an area predicted to experience HCI.
Method for evaluating hot carrier injection effect of device
A method for evaluating a Hot Carrier Injection (HCI) effect of a device is provided. The method includes, a ratio of a substrate current to a drain current of a first device at different gate-source voltages is acquired, and recorded as a first current ratio; a ratio of a substrate current to a drain current of a second device at different gate-source voltages is acquired, and recorded as a second current ratio, the second device is subjected to process parameter adjustment or device parameter adjustment relative to the first device; and an influence of the process parameter adjustment or the device parameter adjustment on an HCI effect of the device is determined based on the second current ratio and the first current ratio.
Apparatuses and methods involving adjustable circuit-stress test conditions for stressing regional circuits
An example method includes stressing, under different circuit-stress test conditions, a plurality of different types of regional circuits susceptible to time dependent dielectric breakdown (TDDB), and in response, monitoring for levels of reliability failure associated with the plurality of different types of regional circuits. The method includes storing a set of stress-test data based on each of the levels of reliability failure, the set of stress-test data being stored within the integrated circuit to indicate reliability-threshold test data specific to the integrated circuit. Within the integrated circuit, an on-chip monitoring circuit indicates operational conditions of suspect reliability associated with dielectric breakdown of at least one of the plurality of different types of regional circuits. And, the method further includes, during operation of the integrated circuit, adjusting at least one of the different circuit-stress test conditions based on the indicated operational conditions of suspect reliability.
Test condition determining apparatus and test condition determining method
The object is to provide a technique for enabling determination of an appropriate test condition. A test condition determining apparatus includes a map generating unit, a withstand voltage estimating unit, and a test condition determining unit. The map generating unit generates a wafer map relevant to a plurality of chips, based on measurement values of thicknesses and carrier concentrations of an epitaxial growth layer, and measurement results of crystal defects in the epitaxial growth layer and a substrate. The withstand voltage estimating unit estimates a withstand voltage of each of the chips based on the wafer map. The test condition determining unit determines a test condition of a test to be conducted on the chips, based on a result of the estimation made by the withstand voltage estimating unit.
Method and apparatus for predicting failures in direct current circuits
A method of monitoring the condition of a circuit comprises establishing a known baseline signal for a type of circuit (each is somewhat different) and defining these characteristics in terms of the lead and trailing edge angular components (@ zero crossing point), the voltage (amplitude), and the period (time length) of the waveform. Ideally, the angular component of the square wave should be vertical, or at 90 degrees to x-axis. The baseline non-regular square wave that is composed of current, voltage, any harmonic thereof, or the combination of these signals which best indicate predictive measurement attributed to the type of circuit being monitored. Future wave forms indicate the rate of decay based upon the aggregated angular, amplitude, and period components of the zero-crossing points when compared to the baseline signal and/or prior waveform of the observed specific splice. The rate of decay can help determine the life expectancy of the circuit.
ELECTROMIGRATION SIGN-OFF TOOL
The present disclosure relates to a method of performing electromigration sign-off. The method includes determining a change in temperature due to joule heating from an RMS current of a first interconnect. The change in temperature due to joule heating is added to a change in temperature due to device self-heating to determine a first change in real temperature. A first average current limit is determined for the first interconnect using the first change in real temperature. A first average current on the first interconnect is compared to the first average current limit to determine if a first electromigration violation is present on the first interconnect. A second average current is determined for a second interconnect using a second change in real temperature. The second average current is compared to a second average current limit to determine if a second electromigration violation is present on the second interconnect.
Die edge integrity monitoring system
An edge crack monitoring system for an integrated circuit provided on a die, comprises a conductive trace comprising at least a first conductive path for allowing current in a first direction, and a second adjacent conductive path for allowing current in a second direction opposite to the first direction. Both adjacent conductive paths form at least one loop surrounding a semiconductor device on a die. The arrangement of the trace is adapted to provide compensation of EM interferences. The trace comprises two terminals being connectable to a detection circuit for detecting damages by generating a fault signal upon detection of disruption of the conductive trace due to a damage. The conductive trace comprises high resistance portions with a resistance of at least 1 k, adapted for reducing self-resonance.