A scanning acoustic microscope includes a signal processor and one or more signal paths. In operation, each signal path couples an ultrasonic transducer to the signal processor that processes signals received from the signal paths to produce an ultrasonic scan image. Each signal path has a response characteristic that includes a response characteristic of the ultrasonic transducer. In order to compensate for variations between the signal paths or variations between different transducers in the same signal path, at least one of the signal paths includes a signal path equalizer. The equalizer may be responsive to a set of equalization coefficients. The coefficients are selected such that the response characteristic of the signal path including the equalizer more closely matches a reference characteristic response. The equalizer may operate on a transmitted or received signal or be used to generate an ultrasonic pulse.

The present invention provides an acoustic wave acquiring apparatus including: a probe configured to receive an acoustic wave from an object through an object holding unit that holds the object; an acoustic matching material holding unit configured to form a space, which holds an acoustic matching material, between the object holding unit and the probe; a scanning unit configured to allow the probe to scan in a first direction on the surface of the object holding unit, and in a second direction crossing the first direction; and a supplying unit configured to supply the acoustic matching material to the space by using a predetermined supply-amount pattern, wherein the supplying unit uses different supply-amount patterns in the case where the probe scans in the first direction and in the case where the probe scans in the second direction.

A method for operating a scanning acoustic microscope. The method including: scanning a sample in an X-Y plane by a transducer unit having one or more transducers. Wherein the scanning includes: moving the transducer unit in the X direction for a linear scanning of the sample; after the linear scanning of the sample by the transducer unit, displacing the transducer unit in the Y direction by a displacement increment; and varying a size of the displacement increment of the transducer unit in the Y direction for the scanning of the sample.

Described are transducer assemblies and imaging devices comprising: a microelectromechanical systems (MEMS) die including a plurality of piezoelectric elements; a complementary metal-oxide-semiconductor (CMOS) die electrically coupled to the MEMS die by a first plurality of bumps and including at least one circuit for controlling the plurality of piezoelectric elements; and a package secured to the CMOS die by an adhesive layer and electrically connected to the CMOS die.

Described are transducer assemblies and imaging devices comprising: a microelectromechanical systems (MEMS) die including a plurality of piezoelectric elements; a complementary metal-oxide-semiconductor (CMOS) die electrically coupled to the MEMS die by a first plurality of bumps and including at least one circuit for controlling the plurality of piezoelectric elements; and a package secured to the CMOS die by an adhesive layer and electrically connected to the CMOS die.

The invention relates to an ultrasonic microscope for inspecting an object, comprising an object holder for holding the object in an object region; a scan head; a first transducer supported by the scan head and configured to emit first acoustic pulses along an emission direction, to focus the first acoustic pulses in a focal point, to detect second acoustic pulses emerging from the object and to output a first detection signal representing the second acoustic pulses detected by the first transducer; a first actuator configured to move the first transducer relative to the scan head along a vertical direction which is essentially parallel to the emission direction; and a controller configured to control the first actuator based on the first detection signal. Further, the invention relates to a carrier for carrying an acoustic pulse transducer of an ultrasonic microscope within an immersion liquid.