A thermal compensator, for use in connection with arrayed waveguide grating (AWG) modules which are, in turn, utilized in conjunction with wavelength multiplexing and de-multiplexing within optical networks, is disclosed. The thermal compensator comprises a bow-shaped frame member, a central bar member, and a screw. The bow-shaped frame member is characterized by a higher or great coefficient of thermal expansion (CTE) than that of the central bar member such that the bow-shaped frame member can expand and elongate at a greater rate than can the central bar member under hot temperature conditions, however, under cold temperature conditions, the rate of contraction of the bow-shaped member is effectively retarded by the slower rate of contraction of the central bar member. The bow-shaped frame member is adapted to be attached to a movable section of an athermal arrayed waveguide grating (AAWG) module such that the expansion and contraction movements of the bow-shaped member influence the movement of a movable section of the athermal arrayed waveguide grating (AAWG) module in order to maintain the proper focus of the athermal arrayed waveguide grating (AAWG) module across disparate temperature conditions within which the athermal arrayed waveguide grating (AAWG) module is designed to operate.

Disclosed are an optical phased array chip and a method of manufacturing the same. The optical phased array chip includes a plurality of optical switches and a plurality of optical phased arrays implemented on a single integrated circuit, wherein the single integrated circuit includes a silicon substrate, a lower layer formed on an upper portion of the silicon substrate, a silicon layer formed on an upper portion of the lower layer, a first upper layer, a second upper layer and a third upper layer sequentially arranged on the silicon layer, and an electrode that penetrates through the first upper layer while being grounded to the silicon layer and is formed on an upper portion of the first upper layer.

An optoelectronic chip includes optical inputs having different passbands, a photonic circuit to be tested, and an optical coupling device configured to couple said inputs to the photonic circuit to be tested.

Disclosed is a microwave plasma processing apparatus including: a chamber that accommodates a workpiece; a microwave generating source that generates microwaves; a waveguide unit that guides the microwaves toward the chamber; a planar antenna made of a conductor having a plurality of slots that radiate the microwaves toward the chamber; a microwave-transmitting plate made of a dielectric material that constitutes a top wall of the chamber and transmits the microwaves radiated from the plurality of slots; a gas supply mechanism that supplies a gas into the chamber; and an exhaust mechanism that exhausts an atmosphere in the chamber. The planar antenna includes a plurality of slot groups each forming one unit including one or more of the slots, and the slots are formed so as to form an odd number of the slot groups equal to or more than three in a circumferential direction.

A single mode waveguide with a straight portion and a curved portion, the curved portion having the shape of an adiabatic bend. The single mode waveguide has a curved portion that is shaped according to an adiabatic bend, with a curvature that varies continuously, and that vanishes at a point at which the curved portion is contiguous with a straight portion of the waveguide. The absence of curvature discontinuities avoids the coupling, within the waveguide, of optical power from a fundamental mode into a higher order mode and the curvature of the curved portion results in attenuation of optical power, in higher order modes, that may be coupled into the waveguide at either end.

Tapered cavity structures disposed within a stratum may be configured as a spectral component splitters, a spectral component combiners, and various combinations thereof including a reflective mode of operation. The tapered cavities have an aperture at their wider and a tip at the narrower, and are dimensioned such that multi-spectral radiant energy admitted into the cavity via the aperture would depart the tapered cavity via its side periphery at a depth and/or direction dependent on its frequency and/or its polarization, and that a plurality of spectral components admitted to the cavities via the its peripheral side or sides will be mixed and emitted via the aperture. Reflective type structures where portions of radiant energy is selectively absorbed and other portions are reflected are also considered. Differing stratums are disclosed. Applications of the tapered cavities in a stratum are also disclosed

An arrayed waveguide, an input-side slab waveguide, an output-side slab waveguide, an input waveguide, and an output waveguide are included. Provided are a groove formed to extend in a direction crossing a plurality of the output waveguides, and an optical conversion unit made of a conversion material that converts near-infrared light to visible light, the groove being filled with the optical conversion unit. The conversion material is, for example, a phosphor or fluorescent substance that converts near-infrared light to visible light.

An arrayed waveguide grating (AWG) device for use in an optical transceiver is disclosed, and can de-multiplex an optical signal into N number of channel wavelengths. The AWG device can include an AWG chip, with the AWG chip providing a planar lightwave (PLC) circuit configured to de-multiplex channel wavelengths and launch the same into output waveguides. A region of the AWG chip may be tapered such that light traveling via the output waveguides encounters an angled surface of the tapered region and reflects towards an output interface region of the AWG chip. Thus detector devices may optically couple to the output interface region of the AWG chip directly, and can avoid losses introduced by other approaches which couple an output of an AWG to detectors by way of a fiber array or other intermediate device.

Provided is a phase error compensating apparatus. The phase error compensating apparatus may include a waveguide array disposed between a first free propagation region and a second free propagation region and configured to allow a light signal passed through the first free propagation region to move toward the second free propagation region, in which a length of each of the waveguides included in the waveguide array may be adjusted to compensate for a phase error of light signals passed through the waveguides.

A grating for line-narrowing a laser beam that is outputted from a laser apparatus at a wavelength in a vacuum ultraviolet region may include: a grating substrate; a first aluminum metal film formed above the grating substrate, the first aluminum metal film having grooves in a surface thereof; and a first protective film formed by an ALD method above the first aluminum metal film.