A method for programming a three-dimensional (3D) workpiece scan path for a metrology system comprising a 3D motion control system, a first type of Z-height sensing system, and a second type of Z-height sensing system that provides less precise surface Z-height measurements over a broader Z-height measuring range. The method comprises: placing a representative workpiece on a stage of the metrology system, defining at least a first workpiece scan path segment for the representative workpiece, determining preliminary actual surface Z-height measurements along the first workpiece scan path segment, and determining a precise 3D scan path for moving the first type of Z-height sensing system to perform precise surface Z-height measurements. The precise 3D scan path is based on the determined preliminary actual surface Z-height measurements. The precise 3D scan path may be used for performing precise surface Z-height measurements or stored to be used in an inspection program.

A confocal chromatic device for inspecting the surface of an object such as a wafer, including a plurality of optical measurement channels with collection apertures arranged for collecting the light reflected by the object through a chromatic lens at a plurality of measurement points, the plurality of optical measurement channels including optical measurement channels with an intensity detector for measuring a total intensity of the collected light. A method is also provided for inspecting the surface of an object such as a wafer including tridimensional structures.

Apparatus and method for facilitating a microscopic imaging of at least one anatomical structure can be provided. For example, with a spectrally-encoded confocal microscopy (SECM) system, it is possible to provide at least one first electro-magnetic radiation to the anatomical structure(s). In addition, a mobile device can be provided which can communicate with the SECM system. The mobile device can have a sensor arrangement, and with such sensor arrangement, it is possible to receive at least one second electro-magnetic radiation that is based on the first radiation(s) from at least one section of the SECM system. The mobile device can further include a computer arrangement, with which it is possible to display at least one portion of the anatomical structure(s) as a microscopic image based on the second radiation(s) received by the sensor arrangement.

The invention relates to a device for multispot scanning microscopy, having a multicolour light source for providing at least one illumination light beam, having a splitting device for splitting the illumination light beam into a plurality of illumination sub-beams, having first optical means for providing an illumination optical path for guiding and focussing the individual illumination sub-beams respectively into a light spot on or in a specimen to be examined, having a scan unit for guiding the light spots over the probe, having a detection unit for detecting detection light emitted by the specimen in detection sub-beams after irradiation with the individual illumination sub-beams, having second optical means for providing a detection optical path for guiding the detection sub-beams to the detector unit, having a control and evaluation unit for controlling the scan unit and for evaluating the detection light detected by the detection unit. The device is characterised in that in the illumination optical path for at least two of the illumination sub-beams a controllable beam manipulation means is present for independent setting of a spectral composition of the respective illumination sub-beam, and the control and evaluation unit is designed to control the beam manipulation means. The invention further relates to a method for multispot scanning microscopy.

An optical system includes a scanning unit, a first lens-element group including at least a first lens element, and a focusing unit which is designed to focus beams onto a focus, wherein the focusing unit includes a second lens-element group including at least a second lens element and an imaging lens. The imaging lens further includes a pupil plane and a wavefront manipulator. The wavefront manipulator is arranged in the pupil plane of the imaging lens or in a plane that is conjugate to the pupil plane, or the scanning unit of the optical system is arranged in a plane that is conjugate to the pupil plane and the wavefront manipulator is arranged upstream of the scanning unit in the light direction. The focus of the second lens-element group lies in the pupil plane of the imaging lens in all focal positions of the focusing unit.

A method of analyzing foreign matter in a sample includes: measuring an optical spectrum for each of a plurality of measurement points of a measurement region on the sample by a microscopic spectroscope; calculating a feature value of each measured spectrum by a computer; determining whether each of the measurement points is on the foreign matter or not based on each feature value; retaining the spectrum of the measurement point that is determined to be on the foreign matter, and deleting the spectrum of the measurement point that is not determined to be on the foreign matter or storing the same to a storage unit; and executing multivariate analysis of the spectra of the plurality of the measurement points that are determined to be on the foreign matter or classifying the same with AI search.

A medical imaging system for illuminating tissue samples using three-dimensional structured illumination microscopy is port-based surgery is provided. The system comprises: an image sensor; a mirror device; zoom optics; a light modulator; a processor; and collimating optics configured to convey one or more images from the modulator to the mirror, the mirror configured to convey the images to the zoom optics, the zoom optics configured: to convey the image(s) from the mirror to a tissue sample; and convey one or more resulting images, formed by the image(s) illuminating the sample, back to the mirror, which conveys the resulting image(s) from the zoom optics to the image sensor, and, the processor configured to control the modulator to form the image(s), the image(s) including at least one pattern selected to interact with the sample to generate different depth information in each of resulting image(s).

An optical device comprises a shared phase modulation mask configured to impart a first phase modulation to light of a first wavelength, and imparts a second phase modulation to light of a second wavelength, an irradiation optical system configured to cause the light of the first wavelength and the light of the second wavelength to enter the same incident region in the phase modulation mask, and a light collecting optical system configured to collect the light of the first phase-modulated first wavelength and the light of the second phase-modulated second wavelength to form an image corresponding to a point spread function.

A method for scanning a sample in microscopy includes generating at least three illumination spots in order to form a spot pattern that contains at least two illumination spots having a first wavelength and an illumination spot having a second wavelength that differs from the first wavelength. At least one specified region of the sample is scanned by moving the spot pattern formed by the illumination spots along a first direction for generating scan lines, which are each associated with the illumination spots of the spot pattern, and by moving the spot pattern formed by the illumination spots along a second direction for generating scan lines respectively after the scan lines.

In an example embodiment, a method includes emitting broad bandwidth radiation with high spatial coherence. The method includes applying a time-varying modulation to the broad bandwidth radiation. The method includes identifying optical interactions caused by the time-varying modulation of the broad bandwidth radiation. The method includes identifying one or more signals included in the optical interactions. The method includes extracting one or more respective spectral signatures associated with each respective signal of the one or more signals. The method includes determining a respective characteristic of an optically interacting material that corresponds to a respective spectral signature of the extracted spectral signatures. The method includes identifying one or more optically interacting materials by classifying one or more of the characteristics.