Vibratory meters (5), and methods for their use measuring a fluid are provided. Each vibratory meter includes a multichannel flow tube (300) comprising two or more fluid channels (302), a pickoff (170), a driver (180), and meter electronics (20) configured to apply a drive signal to the driver at a drive frequency ω, and measure a deflection of the multichannel flow tube with the pickoff. In examples, at least one fluid channel has an effective diameter that is related to velocity of sound and drive velocity. In further examples, the driver may apply a drive signal to the driver having a drive frequency proportional to the velocity of sound and effective diameter.

A measuring device for determining the density, the mass flow and/or the viscosity of a gas-charged liquid includes an oscillator, having a media-conducting measuring tube and two vibrational modes having media-density-dependent natural frequencies; an exciter for exciting the two vibrational modes; a vibrational sensor for detecting vibrations of the oscillator; and an operating and evaluating circuit to apply an excitation signal to the exciter, detect signals of the vibration sensor, determine current values of the natural frequencies of the two vibrational modes of the oscillator and fluctuations of the natural frequencies. The operating and evaluating circuit is designed to determine a first media state value, wherein the operating and evaluating circuit is furthermore designed to determine a second media state value which represents a gas charge of the medium.

A fluid delivery system includes N first valves. Inlets of the N first valves are fluidly connected to N gas sources, respectively, where N is an integer greater than zero. N mass flow controllers include a microelectromechanical (MEMS) Coriolis flow sensor having an inlet in fluid communication with an outlet of a corresponding one of the N first valves. A second valve has an inlet in fluid communication with an outlet of the MEMS Coriolis flow sensor and an outlet supplying fluid to treat a substrate arranged in a processing chamber. A controller in communication with the MEMS Coriolis flow sensor is configured to determine at least one of a mass flow rate and a density of fluid flowing through the MEMS Coriolis flow sensor.

The invention relates to a Coriolis measuring transducer of a Coriolis measuring device comprising: at least one measuring tube; at least one exciter; at least two sensors; wherein at least one exciter or at least one sensor has a coil device and a magnet device, wherein the magnet device has a holder and at least a first magnet group and at least a second magnet group, wherein the holder has a body with a body length axis and a first end and a second end wherein the first end has an end surface, wherein the body has three recesses, wherein a central recess is separated, in each case, from an outer recess by, in each case, an intermediate wall, wherein each intermediate wall has an opening, and wherein the first magnet group is arranged in a first opening, and wherein the second magnet group is arranged in a second opening.

A device for measuring the mass flow rate, including a flow pipe; a first set of actuators which are arranged in a first plane including a first transverse cross section of the pipe and perpendicular to the fluid flow path, these being configured to move selectively in the first plane; a control circuit configured to control a movement of the first and second actuators so that the cross-sectional area for flow through the pipe in the first plane remains constant; a measurement sensor measuring a force or a stress in a direction perpendicular to the flow path, in the vicinity of the actuators of the first set along the flow path; a computation device configured to calculate the mass flow rate passing through the flow pipe as a function of the force or stress measured by the sensor.

A combined driver and pick-off sensor component (200, 300) for a vibrating meter is provided. The combined driver and pick-off sensor component (200, 300) includes a magnet portion (104B) with at least a first magnet (211). The combined driver and pick-off sensor component (200, 300) further includes a coil portion (204A, 304A) receiving at least a portion of the first magnet (211). The coil portion (204A, 304A) includes a coil bobbin (220), a driver wire (221) wound around the coil bobbin (220), and a pick-off wire (222) wound around the coil bobbin (220).

A meter electronics (20) and a method for detecting and identifying a change in a vibratory meter (5) is provided. The meter electronics (20) includes an interface (201) configured to receive sensor signals (100) from a meter assembly (10) and provide information based on the sensor signals (100) and a processing system (202) communicatively coupled to the interface (201). The processing system (202) is configured to use the information to determine a first stiffness change (244) associated with a first location of a conduit (130, 130′) of the vibratory meter (5), determine a second stiffness change (254) associated with a second location of the conduit (130, 130′) of the vibratory meter (5), and determine a condition of the conduit (130, 130′) based on the first stiffness change and the second stiffness change.

A method for operating a Coriolis measurement device comprises the following steps: recording the measured voltages of sensors for sensing measuring tube vibrations and creating an asymmetric sequence of values by way of the amplitudes of the measured voltages for the purpose of diagnosing the Coriolis measurement device, recording at least one stabilization variable and creating a stabilized asymmetric sequence of values based on the stabilization variable, wherein the stabilization variable is one of the following variables or a first or further temporal derivative thereof: a resonant frequency of the measuring tube containing medium or a variable derived therefrom, time or phase difference between measurement signals from the first sensor and the second sensor or a variable derived therefrom, temperature of the measuring tube wall, temperature difference between two measurement points of the measuring tube wall.

A method for detection of pipeline vibrations with a measuring instrument connected to a pipeline system through which a medium to be measured flows, the measuring instrument having at least one transducer for detection of an input variable and for output of an output variable and at least one evaluation unit. The method involves detecting the input variable, relaying of an output variable based on the input variable to the evaluation unit, determinating the measured value of the measured variable from the output variable. Monitoring of the operating state of a system is achieved in that the measured variable characterizes the medium located within the pipeline system, that the sampling rate for detection of the input variable is at least twice as high as the frequency of the pipeline vibration and a frequency analysis of the brief fluctuations of the measured variable is conducted.

The present disclosure relates to a Coriolis measuring transmitter of a Coriolis measuring device for measuring a mass flow or a density of a medium flowing through a pipe, which includes: at least one pair of measuring tubes arranged to oscillate relative to each other, wherein each measuring tube includes a centrally arranged bend, at least one driver and at least two vibration sensors; two guiding devices, each including a fluid chamber with a first opening for connection with the pipe and second openings for each measuring tube for connection with the measuring tubes, wherein the guiding devices are each formed from multiple parts, for example, formed from two parts, wherein a first part forms a pipe connecting part, and wherein at least one second part forms a measuring tube connecting part.