A measuring device for determining density, mass flow rate and/or viscosity of a flowable medium includes: an oscillator including at least one oscillatable measuring tube for conveying the medium, and having at least one oscillatory mode, whose eigenfrequency depends on density of the medium; an exciter for exciting the oscillatory mode; at least one oscillation sensor for registering oscillations of the oscillator; and an operating-evaluating circuit, which is adapted to supply the exciter with an excitation signal, to register signals of the oscillation sensor, based on the signals of the oscillation sensor to ascertain current values of the eigenfrequency of the oscillator as well as variations of the eigenfrequency, and to determine a value characterizing density variations of the medium, wherein the value depends on a function, which is proportional to the variation of the eigenfrequency and has an eigenfrequency dependent normalization.

A U-shaped tube is used to measure the mass flow rate of the fluid using both thermal method and the Coriolis principle simultaneously. Two resistant coils are wound on the tube to do the thermal measurement and an excitation coil and two optical sensors are used to do the Coriolis flow measurement. It takes the advantages of both technologies and create a flow sensor which is super accurate, gas type insensitive, long-term stable and fast responsive without too much pressure drop.

A Coriolis measuring sensor of a Coriolis measuring device includes: at least a pair of measuring tubes; a support body; at least one exciter; and at least two electromagnetic sensors per pair of measuring tubes, wherein the electromagnetic sensors are configured to mask interference magnetic fields and to detect local inhomogeneous magnetic fields generated by magnet devices of the sensor according to a winding direction and/or an interconnection configuration of coils of the magnet devices.

A sensor assembly (100, 300) for a vibratory conduit (130a, 330) is provided. The sensor assembly (100, 300) includes a sensor bracket (110, 310) having an outer surface (112, 312) substantially symmetric about an axis (S) and including a complementary portion (112c, 312c). The sensor assembly (100, 300) also includes a tube ring (120, 220, 320) having an outer surface (122, 222, 322) including a complementary portion (122c, 222c, 322c) affixed to the complementary portion (112c, 312c) of the sensor bracket (110, 310). The axis (S) of the sensor bracket (110, 310) is external of the vibratory conduit (130a, 330) when the tube ring (120, 220, 320) is affixed to the vibratory conduit (130a, 330).

The invention relates to a Coriolis measuring transducer (10), comprising:

at least one measuring tube;

at least one exciter mechanism (12.1);

at least two sensor groups of sensor arrangements with, in each case, at least one sensor arrangement,

wherein the at least one measuring tube is at least sectionally bent,

wherein the measuring tube is clamped in the regions of the inlet and the outlet by, in each case, a securement apparatus,

wherein the measuring tube has an inner side (IS) facing a longitudinal axis as well as an outer side (OS) facing away from the longitudinal axis,

wherein the exciter mechanism is arranged in a midlength region of the measuring tube, wherein a first sensor group is arranged in an inlet side intermediate region of the measuring tube, and wherein a second sensor group is arranged in an outlet side intermediate region of the measuring tube,

wherein at least one sensor group (13) is a supplemented sensor group (13.1) and includes at least two sensor arrangements (13.2).

A measuring transducer includes a tube arrangement having a bent tube, an equally embodied tube, a bent tube and a tube embodied equally to the tube, and two flow dividers each having four flow openings. The measuring transducer includes an exciter for exciting and maintaining mechanical oscillations of the tube arrangement and a sensor for registering mechanical oscillations of the tube arrangement and for producing oscillation measuring signals. Each tube is connected to each flow divider to form four parallel flow paths, having a straight segment connected with the flow divider, an arc shaped segment following such straight segment, a straight segment following such arc shaped segment, an arc shaped segment following such straight segment, a straight segment following such arc shaped segment, an arc shaped segment following such straight segment, and a straight segment following such arc shaped segment and is connected with the flow divider.

A method for correcting a measured value of a measured variable with reference to a medium flowing through at least two measuring tubes, wherein each measuring tube is excited by an oscillation exciter to execute oscillations, and wherein the oscillations of each measuring tube are registered by oscillation sensors, wherein an electronic circuit monitors at least two of the following measured variables or, in each case, a measured variable derived therefrom: phase difference between measurement signals, resonant frequency, ratio of an oscillation exciter electrical current amplitude to a measuring tube oscillation amplitude, the method including: determining a plausibility; and, wherein upon failing a plausibility requirement of at least one of the measured variables, determining measured values of the measured variables of at least one, first/second measuring tube as a function of corresponding measured values of the measured variables of at least one, second/first measurement tube.

A mass flow controller assembly includes a housing defining a cavity, a plurality of internal passages, a first inlet, a first outlet, a second inlet, and a second outlet. A valve is connected to the housing, has an inlet fluidly coupled to the second outlet of the housing and an outlet fluidly coupled to the second inlet of the housing. The valve is configured to control fluid flow from the second outlet of the housing to the second inlet of the housing. A microelectromechanical (MEMS) Coriolis flow sensor is arranged in the cavity, includes an inlet fluidly coupled by at least one of the plurality of internal passages to the first inlet of the housing and is configured to measure at least one of a mass flow rate and density of fluid flowing through the MEMS Coriolis flow sensor. An outlet of the MEMS Coriolis flow sensor is fluidly coupled by at least one of the plurality of internal passages to the second outlet of the housing. The second inlet of the housing is fluidly coupled by at least one of the plurality of internal passages to the first outlet of the housing.

A fluid delivery system includes N first valves. Inlets of the N first valves are fluidly connected to N gas sources, respectively, where N is an integer greater than zero. N mass flow controllers include a microelectromechanical (MEMS) Coriolis flow sensor having an inlet in fluid communication with an outlet of a corresponding one of the N first valves. A second valve has an inlet in fluid communication with an outlet of the MEMS Coriolis flow sensor and an outlet supplying fluid to treat a substrate arranged in a processing chamber. A controller in communication with the MEMS Coriolis flow sensor is configured to determine at least one of a mass flow rate and a density of fluid flowing through the MEMS Coriolis flow sensor.

A Coriolis flow meter, includes: a measuring tube arrangement with at least one measuring tube and a fixing body arrangement; at least one oscillation exciter and at least one oscillation sensor; a support apparatus with seat and fixing apparatus, wherein the fixing apparatus has at least one swingable fixing element, wherein the fixing apparatus is adapted to connect the measuring tube arrangement, for example, the at least one measuring tube, via the fixing body arrangement mechanically releasably with the support apparatus body, wherein the at least one fixing element is adapted in the case of connecting the measuring tube arrangement with the support apparatus body to exert a bending force on the fixing body arrangement for elastically bending the fixing body arrangement.