G01N21/3586

INSPECTION APPARATUS AND METHOD OF INSPECTING WAFER
20230204503 · 2023-06-29 ·

An inspection apparatus includes: a first probe including a receiver antenna configured to detect the terahertz wave emitted by an inspection signal source and that has passed through the wafer, wherein the first probe includes: a first probe tip in which the receiver antenna is embedded, the receiver antenna including a first photoconductive switch; a first printed circuit board on which the first probe tip is mounted; a first optical bracket coupled to the first printed circuit board; a first optical connector configured to transmit a first laser beam into the first probe, and coupled to the first optical bracket, wherein the first laser beam is configured to excite the first photoconductive switch.

Integrated mid-infrared, far infrared and terahertz optical Hall effect (OHE) instrument, and method of use

System Stage, and Optical Hall Effect (OHE) system method for evaluating such as free charge carrier effective mass, concentration, mobility and free charge carrier type in a sample utilizing a permanent magnet at room temperature.

Integrated mid-infrared, far infrared and terahertz optical Hall effect (OHE) instrument, and method of use

System Stage, and Optical Hall Effect (OHE) system method for evaluating such as free charge carrier effective mass, concentration, mobility and free charge carrier type in a sample utilizing a permanent magnet at room temperature.

Light measurement apparatus, method, program and recording medium

A light measurement apparatus includes a master laser, a slave laser, an illumination light pulse, and a signal-under-measurement generator. The master laser generates as an output a master laser light pulse, and the slave laser generates as an output a slave laser light pulse having a repetition frequency or a phase different from that of the master laser light pulse. The illumination light pulse generator receives the master laser light pulse and generates as an output an illumination light pulse, and the signal-under-measurement generator, at a point in time when receiving a light pulse under measurement obtained by illuminating the object under measurement with the illumination light pulse and further the slave laser light pulse, generates as an output a signal under measurement according to a power of the light pulse under measurement. The apparatus corrects an error in a measurement of the signal under measurement.

Light measurement apparatus, method, program and recording medium

A light measurement apparatus includes a master laser, a slave laser, an illumination light pulse, and a signal-under-measurement generator. The master laser generates as an output a master laser light pulse, and the slave laser generates as an output a slave laser light pulse having a repetition frequency or a phase different from that of the master laser light pulse. The illumination light pulse generator receives the master laser light pulse and generates as an output an illumination light pulse, and the signal-under-measurement generator, at a point in time when receiving a light pulse under measurement obtained by illuminating the object under measurement with the illumination light pulse and further the slave laser light pulse, generates as an output a signal under measurement according to a power of the light pulse under measurement. The apparatus corrects an error in a measurement of the signal under measurement.

TERAHERTZ MODULATION SYSTEM AND METHOD OF MODULATING A TERAHERTZ SIGNAL

There is described a terahertz modulation system. The terahertz modulation system generally has a terahertz signal emitter emitting a terahertz signal along a path; a modulation unit having a substrate and an electromechanical transducer actuatably mounted to said substrate, said electromechanical transducer having a terahertz interacting surface in said path receiving said terahertz signal and moving in back-and-forth sequences between first and second positions relative to said path upon actuation with a modulation signal, said moving modulating at least a portion of said terahertz signal; and a terahertz signal detector downstream from said modulation unit along said path, said terahertz signal detector synchronously measuring said modulated portion of said terahertz signal using said modulation signal, and generating a differential signal indicative thereof.

TERAHERTZ MODULATION SYSTEM AND METHOD OF MODULATING A TERAHERTZ SIGNAL

There is described a terahertz modulation system. The terahertz modulation system generally has a terahertz signal emitter emitting a terahertz signal along a path; a modulation unit having a substrate and an electromechanical transducer actuatably mounted to said substrate, said electromechanical transducer having a terahertz interacting surface in said path receiving said terahertz signal and moving in back-and-forth sequences between first and second positions relative to said path upon actuation with a modulation signal, said moving modulating at least a portion of said terahertz signal; and a terahertz signal detector downstream from said modulation unit along said path, said terahertz signal detector synchronously measuring said modulated portion of said terahertz signal using said modulation signal, and generating a differential signal indicative thereof.

Imaging techniques and associated apparatus

Imaging techniques of pharmaceutical preparations such as tablets are disclosed. The techniques combine the measurement of reflected/transmitted terahertz radiation originating from within the tablet and data analysis localized in frequency and time in order to enable a three dimensional image indicating composition to be obtained.

Imaging techniques and associated apparatus

Imaging techniques of pharmaceutical preparations such as tablets are disclosed. The techniques combine the measurement of reflected/transmitted terahertz radiation originating from within the tablet and data analysis localized in frequency and time in order to enable a three dimensional image indicating composition to be obtained.

Method and apparatus for non-invasive condition detection using an all fiber portable terahertz imaging system
11262299 · 2022-03-01 · ·

Method and apparatus for non-invasive condition detection using an all fiber portable terahertz imaging system. An imaging system of the present disclosure may comprise a control module comprising a femtosecond pulsed laser configured to generate an output light beam, a dispersion compensation unit configured to receive the output light beam and transmit a laser light beam generated based upon the output light beam, a beam splitter configured to receive the laser light beam and divide the laser light beam into a pump light beam and a reference light beam; and a rapid scanning optical delay line configured to receive the pump light beam and transmit an exit light beam generated based upon the pump light beam, a patch probe comprising a transmitter module, an optics lens, and a detector module.