A lithium ion-conductive solid electrolyte including a freestanding inorganic vitreous sheet of sulfide-based lithium ion conducting glass is capable of high performance in a lithium metal battery by providing a high degree of lithium ion conductivity while being highly resistant to the initiation and/or propagation of lithium dendrites. Such an electrolyte is also itself manufacturable, and readily adaptable for battery cell and cell component manufacture, in a cost-effective, scalable manner. An automated machine based system, apparatus and methods assessing and inspecting the quality of such vitreous solid electrolyte sheets, electrode sub-assemblies and lithium electrode assemblies can be based on spectrophotometry and can be performed inline with fabricating the sheet or web (e.g., inline with drawing of the vitreous Li ion conducting glass) and/or with the manufacturing of associated electrode sub-assemblies and lithium electrode assemblies and battery cells.

A method for producing a mirror substrate blank made from titanium-doped silica glass for EUV lithography, having a thickness of at least 40 millimeters, includes steps of face grinding the surface of the blank and identifying data on defects in a surface layer of the blank. Light penetrates the blank at a predetermined angle of incidence of less than 90 at a location on the flat surface of the blank. The light scatters on a defect in the blank, and the scattered light is detected at a distance x from the penetration location on the surface of the blank by a light detection element arranged perpendicularly thereabove. The method further includes steps of determining the position of the defect in the surface layer based on the obtained data, and partial or complete removal of the surface layer in consideration of the position determination and forming the mirror substrate blank.

An optical device and a method for detecting a flaw of a transparent substrate. A first detection unit is configured to detect the substrate at a predetermined low resolution, where the first detection unit includes a first photosensitive element and a first lens between the substrate and the first photosensitive element, and the first photosensitive element and the first lens are disposed such that an object plane is inclined relative to the substrate; a second detection unit configured to detect the substrate at a predetermined high resolution, where the second detection unit includes a second photosensitive element and a second lens between the substrate and the second photosensitive element; and a processor configured to determine a portion of the flaws detected by the first detection unit as flaws to be detected by the second detection unit, and to determine a type of flaw for the substrate imaged.

The invention discloses a new apparatus to photograph glasses in multiple layers for taking high quality photo images with scratch, crash, black/white defect, lack, crack, pin-hole, concave edge and raised edge, bubble and smudge defects on the surface-layer, backside-layer or/and mid-layer of the glasses. The invention also introduces flexible and expendable photographing hardware architecture that will meet various customers inspecting defects requirements and speed requirements.

A standalone lithium ion-conductive sulfide solid electrolyte, methods of making and using the electrolyte, and battery cells and cell components incorporating the electrolyte can include a freestanding inorganic vitreous sheet of sulfide-based lithium ion conducting glass capable of high performance in a lithium metal battery by providing a high degree of lithium-ion conductivity while being highly resistant to the initiation and/or propagation of lithium dendrites. Such an electrolyte is also itself manufacturable, and readily adaptable for battery cell and cell component manufacture, in a cost-effective, scalable manner.

A lithium ion-conductive solid electrolyte including a freestanding inorganic vitreous sheet of sulfide-based lithium ion conducting glass is capable of high performance in a lithium metal battery by providing a high degree of lithium ion conductivity while being highly resistant to the initiation and/or propagation of lithium dendrites. Such an electrolyte is also itself manufacturable, and readily adaptable for battery cell and cell component manufacture, in a cost-effective, scalable manner. An automated machine based system, apparatus and methods assessing and inspecting the quality of such vitreous solid electrolyte sheets, electrode sub-assemblies and lithium electrode assemblies can be based on spectrophotometry and can be performed inline with fabricating the sheet or web (e.g., inline with drawing of the vitreous Li ion conducting glass) and/or with the manufacturing of associated electrode sub-assemblies and lithium electrode assemblies and battery cells.

An optical scanning system includes a radiating source capable of outputting a source light beam, a de-scan lens that is configured to output a de-scanned light beam, the de-scan lens is located approximately one focal length of the de-scan lens from a sample irradiation location, a focusing lens that is configured to output a focused light beam, a first non-polarizing beam splitter configured to be irradiated by at least a portion of the focused light beam, a second non-polarizing beam splitter configured to be irradiated by at least a portion of the focused light beam that is reflected by the first non-polarizing beam splitter, and a detector that is located at approximately one focal length of the focusing lens from the focusing lens, the detector is configured to be irradiated by at least a portion of the focused light beam that is reflected by the second non-polarizing beam splitter.

An optical scanning system including a radiating source capable of outputting a source light beam, a de-scan lens that is configured to output a de-scanned light beam, the de-scanned light beam is created by focusing light reflected from the sample and the de-scan lens is located approximately one focal length of the de-scan lens from an irradiation location where the light beam irradiates the sample, a focusing lens that is configured to output a focused light beam, a collimating lens that is configured to output a collimated light beam, a polarizing beam splitter that is configured to be irradiated by the collimated light beam, and a detector that is configured to be irradiated by at least a portion of the collimated light beam that is not reflected by the polarizing beam splitter.

A substrate mark detection apparatus includes: a detecting module, configured to detect a depth at which a mark is embedded in a substrate to be detected and determine whether the substrate is valid or not according to the depth at which the mark is embedded in the substrate; an information extracting module, configured to parse the mark to obtain parsed information in a case where the substrate is valid, query pre-stored information corresponding to the mark, determine whether the parsed information conforms to the pre-stored information or not, and if yes, to extract the pre-stored information and output the pre-stored information; a sorting module, configured to remove the substrate in a case where the substrate is invalid or the parsed information does not conform to the pre-stored information.

A method and apparatus to measure specular reflection intensity, specular reflection angle, near specular scattered radiation, and large angle scattered radiation and determine the location and type of defect present in a first and a second transparent solid that have abutting surfaces. The types of defects include a top surface particle, an interface particle, a bottom surface particle, an interface bubble, a top surface pit, and a stain. The four measurements are conducted at multiple locations along the surface of the transparent solid and the measured information is stored in a memory device. The difference between an event peak and a local average of measurements for each type of measurement is used to detect changes in the measurements. Information stored in the memory device is processed to generate a work piece defect mapping indicating the type of defect and the defect location of each defect found.