Patent classifications
G
PHYSICS
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G01
MEASURING; TESTING
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G01N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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21/00
Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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G01N21/84
Systems specially adapted for particular applications
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G01N21/88
Investigating the presence of flaws or contamination
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G01N21/95
characterised by the material or shape of the object to be examined
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G01N21/956
Inspecting patterns on the surface of objects
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G01N21/95607
using a comparative method
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G01N2021/95615
with stored comparision signal
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