Provided is a highly reliable acceleration sensor that keeps production costs low and has low zero point drift initially and over time even when used in a poor installation environment. In this acceleration sensor, a weight that rotates when acceleration is applied in the z-direction is disposed in a cavity surrounded by a support substrate and a cap layer. The cap layer is formed such that both sides thereof across the axis of rotation of the weight have different masses per unit area.

Provided is a highly reliable acceleration sensor that keeps production costs low and has low zero point drift initially and over time even when used in a poor installation environment. In this acceleration sensor, a weight that rotates when acceleration is applied in the z-direction is disposed in a cavity surrounded by a support substrate and a cap layer. The cap layer is formed such that both sides thereof across the axis of rotation of the weight have different masses per unit area.

A MEMS sensor includes a movable element positioned in spaced apart relationship above a surface of a substrate and a single centrally located suspension anchor formed on the surface of the substrate. First and second rigid beams are coupled to opposing sides of the suspension anchor and are suspended above the surface of the substrate. A first torsion spring is interconnected between the movable element and the first rigid beam, and a second torsion spring is interconnected between the movable element and the first rigid beam. The rigid beams and the torsion springs are stiff in a lateral direction relative to the surface of the substrate so as to limit slide displacement of the movable element under the condition of a multi-directional overload situation.

A MEMS device includes a movable section, a frame, a beam, and an electrode substrate. The frame surrounds a surrounding of the movable section. The beam extends from at least a part of the frame, and is connected to the movable section. The electrode substrate includes a fixed electrode, an extended electrode, and a substrate section. The fixed electrode is formed on the electrode substrate in at least a part of a region facing a swing section. The extended electrode is connected to the fixed electrode, and is formed on the electrode substrate in at least a part of a region facing the shaft.

According to one embodiment, a sensor includes a structure body, a first flexible unit, and a first sensing unit. The structure body includes a first portion and a second portion. The second portion is linked to the first portion. The first portion is displaced along a first direction intersecting a direction connecting the first portion and the second portion. The second portion is displaced along a second direction according to the displacement of the first portion. The second direction intersects the first direction. The first flexible unit deforms along the second direction according to the displacement of the second portion along the second direction. The first sensing unit senses the deformation of the first flexible unit.