A micromechanical sensor system that includes a mass that is deflectable at least in the z direction. A stop element having an elastic design is situated on the mass on at least one of the sides oriented in the z direction, via a connection element.

This disclosure is related to devices, systems, and techniques for determining an acceleration. For example, an accelerometer system includes a proof mass, a pole piece connected to the proof mass, and a coil disposed around the pole piece and connected to the proof mass, where the coil is rectangular in shape. Additionally, the accelerometer system includes circuitry configured to deliver an electrical signal to the coil in order to maintain the proof mass at a null position and determine an electrical current value corresponding to the electrical signal. Additionally, the circuit is configured to identify, based on the electrical current value, an acceleration of the accelerometer system.

The disclosure describes a magnetic circuit assembly that includes a magnet assembly and an excitation ring. The magnet assembly defines a central axis and includes a pole piece and a magnet underlying the pole piece. The excitation ring includes a base and an outer ring positioned around the magnet assembly. The base includes a platform layer underlying the magnet, an upper base layer underlying the platform layer, and a lower base layer underlying the upper base layer. The outer ring overlies the upper base layer and is configured to couple to an outer radial portion of a proof mass assembly. The platform layer and lower base layer are made from high coefficient of thermal expansion (CTE) materials, while the upper base layer and outer ring are made from low CTE materials. Each relatively high CTE material has a higher CTE than each relatively low CTE material.

This disclosure is related to devices, systems, and techniques for determining an acceleration. For example, an accelerometer system includes a proof mass, a pole piece connected to the proof mass, and a coil disposed around the pole piece and connected to the proof mass, where the coil is rectangular in shape. Additionally, the accelerometer system includes circuitry configured to deliver an electrical signal to the coil in order to maintain the proof mass at a null position and determine an electrical current value corresponding to the electrical signal. Additionally, the circuit is configured to identify, based on the electrical current value, an acceleration of the accelerometer system.

A sensor component. The sensor component includes a microelectromechanical z inertial sensor, including two sensor elements situated on a substrate and each designed in the form of a z rocker. The sensor elements each includes a seismic mass structure, elastically deflectable with respect to the substrate with the aid of a torsion spring, which has a heavy side and an oppositely situated light side with regard to the torsion springs. The seismic mass structure of the two sensor elements have different perforations on its heavy and/or light side(s), which effectuate a different sensitivity of the two sensor elements to a temperature gradient running in the z direction. The sensor component also includes an evaluation circuit designed to ascertain an acceleration in the z direction by evaluating the deflection of the seismic mass structure of the two sensor elements.

The disclosure describes a magnetic circuit assembly that includes a magnet assembly and an excitation ring. The magnet assembly defines an input axis and includes a pole piece and a magnet underlying the pole piece. The excitation ring includes a base and an outer ring positioned around the magnet assembly. The base includes a platform layer underlying the magnet and a base layer underlying the platform layer. The outer ring overlies the base layer. An inner portion of the outer ring faces the magnet assembly and an outer portion of the outer ring is configured to couple to an outer radial portion of a proof mass assembly. The pole piece and the platform layer include a high magnetic permeability material.

The disclosure describes a magnetic circuit assembly that includes a magnet assembly and an excitation ring. The magnet assembly defines a central axis and includes a pole piece and a magnet underlying the pole piece. The excitation ring includes a base and an outer ring positioned around the magnet assembly. The base includes a platform layer underlying the magnet, an upper base layer underlying the platform layer, and a lower base layer underlying the upper base layer. The outer ring overlies the upper base layer and is configured to couple to an outer radial portion of a proof mass assembly. The platform layer and lower base layer are made from high coefficient of thermal expansion (CTE) materials, while the upper base layer and outer ring are made from low CTE materials. Each relatively high CTE material has a higher CTE than each relatively low CTE material.

A device includes a micro-electromechanical system (MEMS) device layer comprising a proof mass. The proof mass includes a first proof mass portion and a second proof mass portion. The first proof mass portion is configured to move in response to a stimuli. The second proof mass portion has a spring attached thereto. The device further includes a substrate disposed parallel to the MEMS device layer. The substrate comprises a bumpstop configured to limit motion of the first proof mass portion. The device includes a first electrode disposed on the substrate facing the second proof mass portion. The first electrode is configured to apply a pulling force onto the second proof mass portion and to move the second proof mass portion towards the first electrode.

An accelerometer comprising a plurality of proof-masses moveable along a measurement axis; a respective spring rigidly attached to each proof-mass, configured to exert an elastic recall on the proof-mass in the measurement axis; and a fixed stop associated with each proof-mass, arranged to intercept the proof-mass when the acceleration in the measurement axis increases by a step. The proof-masses are suspended in series with respect to one another by springs in the measurement axis, the stops being arranged to successively intercept the respective proof-masses for increasing thresholds of acceleration.

An accelerometer includes a membrane; a laser source, the laser source producing a laser beam, the laser beam directed at the membrane causing the membrane to vibrate; a transparent cap, the transparent cap disposed between the laser source and the membrane; an antireflecting film disposed on an outer surface of the transparent cap; and a detector sensing a reflected portion of the laser beam, the reflected portion including a modulated intensity. An acceleration signal is based in part on the frequency of the modulated intensity of the reflected portion of the laser beam.