In one embodiment, an apparatus includes a first channel core in communication with a second channel core and a third channel core of a photonic waveguide, a splitter/coupler module movable relative to the channel cores to dynamically adjust a ratio of optical signals at two of the channel cores of the photonic waveguide, and an actuation device operable to move the splitter/coupler module based on input received during operation of the photonic waveguide.

A microelectromechanical system (MEMS) mirror assembly includes a base substrate defining a cavity and a plurality of first features extending upwards from a bottom of the cavity. The MEMS mirror assembly includes a mirror substrate coupled to the base substrate and defining a MEMS actuator and a MEMS mirror platform. Actuation of the MEMS actuator moves the MEMS mirror platform from a first positional state to a second positional state. The MEMS mirror platform defines a plurality of second features on a side of the MEMS mirror platform facing the base substrate that are sized, shaped, and positioned such that the plurality of second features extend into spaces separating the plurality of first features when the mirror platform is in the second positional state. The MEMS mirror assembly includes a reflective material disposed on a side of the MEMS mirror platform facing away from the base substrate.

A microelectromechanical system (MEMS) mirror assembly includes a base substrate defining a cavity and a plurality of first features extending upwards from a bottom of the cavity. The MEMS mirror assembly includes a mirror substrate coupled to the base substrate and defining a MEMS actuator and a MEMS mirror platform. Actuation of the MEMS actuator moves the MEMS mirror platform from a first positional state to a second positional state. The MEMS mirror platform defines a plurality of second features on a side of the MEMS mirror platform facing the base substrate that are sized, shaped, and positioned such that the plurality of second features extend into spaces separating the plurality of first features when the mirror platform is in the second positional state. The MEMS mirror assembly includes a reflective material disposed on a side of the MEMS mirror platform facing away from the base substrate.

The beam distributor includes a housing, at least one beam entrance, two or more beam exits, a motor, and a beam turning part fixed to a rotary axis member of the motor and changing a direction of a beam input to the inside of the housing through the beam entrance so as to guide the input beam to the beam exit. A rotary axis of the motor is arranged parallel to an optical axis of the beam so as to input the beam to the beam turning part at a constant angle independently of a rotational angle about the rotary axis of the motor. The beam exit is arranged in a direction to which the direction of the beam is changed by the beam turning part in response to rotation of the rotary axis member. A storage stores an angular information recorded in advance about the rotary axis.

An optical switch and a wavelength division multiplexing optical system are disclosed. In an embodiment an optical switch includes an input port array, an input collimator array, an input micromirror array, an output micromirror array, an output collimator array, and an output port array. All input micromirrors included in the input micromirror array can be deflected in two mutually perpendicular directions. The maximum movable ranges of reflected light that is output after all the input micromirrors reflect incident light with the same incident angle have no common intersection on a plane on which the output micromirror array is located or have a common intersection, and an area of the intersection is less than an area of a reflection region of the output micromirror array.

A beam branching device capable of suppressing an increase in the cost and the like even when the number of branching directions of an incident beam is large and increasing the coupling efficiency even when the rotation accuracy of a rotary motor is not increased too high and coping with high-speed switching of the optical path is provided. In a beam branching device, a rotation shaft of a rotary motor is rotated to rotate a rotating member together with a plurality of reflection mirrors so that an incident beam is reflected from a reflection mirror surface portion of any one of the plurality of reflection mirrors and the incident beam is branched to a plurality of directions to switch an optical path of a reflection beam. A central axis of the rotating member is at a skewed position in relation to a central line of the incident beam, and the plurality of reflection mirrors are arranged at a position on the rotating member to face both sides in an axial direction of the rotating member with a position closest to the incident beam interposed therebetween.

The beam distributor includes a housing, at least one beam entrance, two or more beam exits, a motor, and a beam turning part fixed to a rotary axis member of the motor and changing a direction of a beam input to the inside of the housing through the beam entrance so as to guide the input beam to the beam exit. A rotary axis of the motor is arranged parallel to an optical axis of the beam so as to input the beam to the beam turning part at a constant angle independently of a rotational angle about the rotary axis of the motor. The beam exit is arranged in a direction to which the direction of the beam is changed by the beam turning part in response to rotation of the rotary axis member. A storage stores an angular information recorded in advance about the rotary axis.

A beam branching device capable of suppressing an increase in the cost and the like even when the number of branching directions of an incident beam is large and increasing the coupling efficiency even when the rotation accuracy of a rotary motor is not increased too high and coping with high-speed switching of the optical path is provided. In a beam branching device, a rotation shaft of a rotary motor is rotated to rotate a rotating member together with a plurality of reflection mirrors so that an incident beam is reflected from a reflection mirror surface portion of any one of the plurality of reflection mirrors and the incident beam is branched to a plurality of directions to switch an optical path of a reflection beam. A central axis of the rotating member is at a skewed position in relation to a central line of the incident beam, and the plurality of reflection mirrors are arranged at a position on the rotating member to face both sides in an axial direction of the rotating member with a position closest to the incident beam interposed therebetween.

A wafer structure includes a diffractive lens disposed on a backside of a wafer and coupled to a front side waveguide, the diffractive lens being configured to receive light and focus the light to the front side waveguide.

A wafer structure includes a diffractive lens disposed on a backside of a wafer and coupled to a front side waveguide, the diffractive lens being configured to receive light and focus the light to the front side waveguide.