A housing assembly for a manifold includes a first housing with an inlet and a plurality of outlets, a second housing, and a valve retainer engaged with the first and second housings. The valve retainer includes a retention plate defined between first and second surfaces, a plurality of slot walls extending from the first surface, and a protruding edge that extends from a flanged lip and surrounds the plurality of slot walls. The retention plate defines a plurality of slots corresponding to the plurality of slot walls. The first housing may define a groove that receives the protruding edge, and the second housing may include a rim that engages the flanged lip of the valve retainer. Valve housings including first and second mating structures separated by wall segments may be positioned in outlets of the first housing and corresponding slots of the valve retainer.

The invention can include a device and method for distributing a fluid in an industrial facility that comprises a fluid distribution pipe, a discharge pipe, a distribution valve that is positioned on the distribution pipe and controlling the distribution of fluid between an upstream area and a downstream area, a discharge valve positioned on the discharge pipe, and measuring means for measuring, in real time, a characteristic parameter of the distribution of the fluid within one of the pipes. A module is also included for calculating a sliding threshold value of the characteristic parameter and means configured to control the partial gradual opening or closing of the discharge valve depending on the result of the comparison of said sliding threshold value with an instantaneous value of the characteristic parameter, in order to improve reliability of the industrial facility.

A system includes a source that provides air, a first compressor stage that receives the air from the source and is configured to compress the air to a first pressure, and a second compressor stage that receives the air from the first compressor stage and is configured to compress the air to a second pressure. The system also includes a first component, a second component, valves that control flow of the air, and a controller that is configured to control the valves according to a first control mode, in which the air is supplied to the first component by the first compressor stage, and a second control mode, in which the air is supplied to the second component by the second compressor stage.

Implementations of the present disclosure generally relate to one or more flow ratio controllers and one or more gas injection inserts in the semiconductor processing chamber. In one implementation, an apparatus includes a first flow ratio controller including a first plurality of flow controllers, a second flow ratio controller including a second plurality of flow controllers, and a gas injection insert including a first portion and a second portion. The first portion includes a first plurality of channels and the second portion includes a second plurality of channels. The apparatus further includes a plurality of gas lines connecting the first and second pluralities of flow controllers to the first and second pluralities of channels. One or more gas lines of the plurality of gas lines are each connected to a channel of the first plurality of channels and a channel of the second plurality of channels.

A fluid control apparatus includes a block elongated in a longitudinal direction and having a predetermined width, an internal flow channel formed inside the block so as to extend in the longitudinal direction, a first control valve mounted on the block, a second control valve mounted on the block at a position downstream of the first control valve. In the fluid control apparatus, the internal flow channel has a first outflow channel connected to a first outlet of the first control valve through which a fluid flows out thereof and also has a second inflow channel connected to a second inlet of the second control valve through which the fluid flows thereinto. In addition, the first outflow channel and the second inflow channel are disposed so as to overlap each other at one point as viewed in the width direction through the block.

A system and method for dividing a single mass flow into secondary flows of desired ratios to total flow. Each secondary flow line includes a pressure drop element, an absolute pressure sensor and a differential pressure sensor. The nonlinear relationship between flow and pressures can be transformed into a function of the absolute and differential pressures that has a linear relationship with the flow.

The present application discloses a display panel manufacturing device and a cleaning method. The display panel manufacturing device includes: a machine table, a working pipeline, a gas supply means and a liquid supply means; a detection means is provided on the machine table; a first automatic valve is provided on a gas supply pipeline; and a second automatic valve is provided on a liquid supply pipeline.

An air system for use in an air bed system can include a manifold and one or more valves. The manifold can define a an inlet, an outlet, and a vent fluidically connected to atmosphere. A method of operating an air bed system can include deflating an air chamber through the vent in a first valve configuration and through the vent and an exhaust port in a second valve configuration.

In one aspect, a valve actuation system includes a drive unit including an actuator configured to engage and move multiple valves disposed within a fluid cassette to selectively open and close each valve of the multiple valves and a positioning frame disposed adjacent the fluid cassette and along which the drive unit can be moved in three dimensions to align the actuator with a selected valve of the multiple valves.

In one aspect, a valve actuation system includes a drive unit including an actuator configured to engage and move multiple valves disposed within a fluid cassette to selectively open and close each valve of the multiple valves and a positioning frame disposed adjacent the fluid cassette and along which the drive unit can be moved in three dimensions to align the actuator with a selected valve of the multiple valves.