Technologies for fabricating a vertical dynamic random access memory (DRAM) structure include forming a DRAM cell hole through a word line layer and an associated substrate such that a first section of the DRAM cell hole extends through the word line layer and a second section of the DRAM cell hole extends through the substrate in vertical alignment with the first section. A pillar capacitor structure is initially formed using the second section of the DRAM cell hole, followed by the formation of a transistor using the first section of the DRAM cell hole as a channel for the transistor. Due to the use of a common DRAM cell hole, the pillar capacitor structure and the channel are in vertical alignment. The substrate is subsequently flipped and removed from the pillar capacitor structure, which is further processed to form a pillar capacitor. In some embodiments, the channel may be formed from a deposition of indium gallium zinc oxide (IGZO).

Systems, methods and apparatus are provided for an array of vertically stacked memory cells having horizontally oriented access devices and access lines and vertically oriented digit lines having a first source/drain region and a second source drain region separated by a channel region, and gates opposing the channel region formed fully around every surface of the channel region as gate all around (GAA) structures, horizontal oriented access lines coupled to the gates and separated from a channel region by a gate dielectric. The memory cells have horizontally oriented storage nodes coupled to the second source/drain region and vertically oriented digit lines coupled to the first source/drain regions. A vertical body contact is formed in direct electrical contact with a body region of one or more of the horizontally oriented access devices and separate from the first source/drain region and the vertically oriented digit lines by a dielectric.

In a semiconductor device, a first stack is positioned over substrate and includes a first pair of transistors and a second pair of transistors stacked over the substrate. A second stack is positioned over the substrate and adjacent to the first stack. The second stack includes a third pair of transistors and a fourth pair of transistors stacked over the substrate. A first capacitor is stacked with the first and second stacks. A second capacitor is positioned adjacent to the first capacitor and stacked with the first and second stacks. A first group of the transistors in the first and second stacks is coupled to each other to form a static random-access memory cell. A second group of the transistors in the first and second stacks is coupled to the first and second capacitors to form a first dynamic random-access memory (DRAM) cell and a second DRAM cell.

The operation speed of a semiconductor device is improved.

The semiconductor device includes a first memory region and a second memory region; in the semiconductor device, a first memory cell in the first memory region is superior to a second memory cell in the second memory region in data retention characteristics such as a large storage capacitance or a large channel length-channel width ratio (L/W) of a transistor. When the semiconductor device is used as a cache memory or a main memory device of a processor, the first memory region mainly stores a start-up routine and is not used as a work region for arithmetic operation, and the second memory region is used as a work region for arithmetic operation. The first memory region becomes an accessible region when the processor is booted, and the first memory region becomes an inaccessible region when the processor is in normal operation.

A semiconductor memory device including an access transistor configured as a vertical transistor comprises a channel portion and a pair of source/drain regions; a storage capacitor connected to one of the pair of source/drain regions; a bit line connected to the other of the pair of source/drain regions, a first semiconductor layer provided in the source/drain region to which the bit line is connected. Preferably, the first semiconductor layer comprises SiGe.

A method includes forming a plurality of first line-shaped mask patterns over a substrate including a memory cell region and an array edge region; forming a plurality of second line-shaped mask patterns over the plurality of first line-shaped mask patterns; removing first portions from the plurality of first line-shaped mask patterns in the memory cell region to leave a plurality of island-shaped mask patterns above the memory cell region; removing second portions from the plurality of first line-shaped mask patterns in the array edge region to leave a holes-provided mask pattern above the array edge region; forming a mask pattern which includes a plurality of holes provided on portions; and forming, with the mask pattern which includes the plurality of holes, a plurality of contact holes in the array edge region to provide a plurality of contact electrodes connected to a plurality of word-lines.

In a dynamic flash memory cell including: a HfO.sub.2 layer and a TiN layer surrounding a lower portion of a Si pillar standing on a P-layer substrate; a HfO.sub.2 layer surrounding an upper portion of the Si pillar; a TiN layer; and N.sup.+ layers connected to a bottom portion and a top portion of the Si pillar, and an SGT transistor including: a SiO.sub.2 layer surrounding a lower portion of a Si pillar standing on the same P-layer substrate; a HfO.sub.2 layer surrounding an upper portion of the Si pillar; a TiN layer; and N.sup.+ layers sandwiching the HfO.sub.2 layer in a perpendicular direction and connected to a top portion and a middle portion of the Si pillar, bottom positions of the Si pillar and the Si pillar are at the same position A. A bottom portion of an upper transistor portion of the dynamic flash memory cell composed of the HfO.sub.2 layer and the TiN layer in an upper portion of the Si pillar, and a bottom portion of an SGT transistor portion composed of the HfO.sub.2 layer and the TiN layer in an upper portion of the Si pillar are at the same position B.

On a substrate, dynamic flash memory cell transistors and, on their outside, driving-signal processing circuit transistors are disposed. A source line wiring layer, a bit line wiring layer, a plate line wiring layer, and a word line wiring layer extend in the horizontal direction relative to the substrate and connect, from the outside of a dynamic flash memory region, in the perpendicular direction, to lead-out wiring layers on an insulating layer. The transistors in driving-signal processing circuit regions connect, via multilayered wiring layers, to upper wiring layers on the insulating layer. A high-thermal-conductivity layer is disposed over the entirety of the dynamic flash memory region and in a portion above the bit line wiring layer.

To compensate switching of a dielectric component of a non-linear polar material based capacitor, an explicit dielectric capacitor is added to a memory bit-cell and controlled by a signal opposite to the signal driven on a plate-line.

To compensate switching of a dielectric component of a non-linear polar material based capacitor, an explicit dielectric capacitor is added to a memory bit-cell and controlled by a signal opposite to the signal driven on a plate-line.