A repeller assembly mounts in an arc chamber of an ion implanter. The repeller assembly contains a repeller, a tubular insert, first and second insulators, a contact member, and a lock member. The repeller has a knob-shaped body placed on an inner side of the arc chamber opposite to a cathode assembly. A repeller shaft is arranged extending through an opening of a wall of the arc chamber to an outer side. The repeller shaft has a step narrowing down the repeller shaft. The tubular insert is mounted concentrically to the repeller shaft. The first insulator has a collar shape and is attached to the tubular insert so that an inner shoulder of the first insulator is pressed against an outer side of the wall of the arc chamber. The second insulator is cap-nut shaped and is attached to the first insulator with an outer flange thereof.

A repeller assembly mounts in an arc chamber of an ion implanter. The repeller assembly contains a repeller, a tubular insert, first and second insulators, a contact member, and a lock member. The repeller has a knob-shaped body placed on an inner side of the arc chamber opposite to a cathode assembly. A repeller shaft is arranged extending through an opening of a wall of the arc chamber to an outer side. The repeller shaft has a step narrowing down the repeller shaft. The tubular insert is mounted concentrically to the repeller shaft. The first insulator has a collar shape and is attached to the tubular insert so that an inner shoulder of the first insulator is pressed against an outer side of the wall of the arc chamber. The second insulator is cap-nut shaped and is attached to the first insulator with an outer flange thereof.

A wire bonded triode for amplification of electromagnetic signals that includes an electron emitter (cathode), control grid, and an electron collector (anode) and having one or more wire bonded structures. A method of making a triode for amplification of electromagnetic signals that includes wirebonding one or more wires to form a wire bonded structure corresponding with one or more of an anode, grid and/or cathode element.

A wire bonded triode for amplification of electromagnetic signals that includes an electron emitter (cathode), control grid, and an electron collector (anode) and having one or more wire bonded structures. A method of making a triode for amplification of electromagnetic signals that includes wirebonding one or more wires to form a wire bonded structure corresponding with one or more of an anode, grid and/or cathode element.

The disclosed embodiments relate to a charged particle source module for generating and emitting a charged particle beam, such as an electron beam, comprising: a frame including a first frame part, a second frame part, and one or more rigid support members which are arranged between said first frame part and said second frame part; a charged particle source arrangement for generating a charged particle beam, such as an electron beam, wherein said charged particle source arrangement, such as an electron source, is arranged at said second frame part; and a power connecting assembly arranged at said first frame part, wherein said charged particle source arrangement is electrically connected to said connecting assembly via electrical wiring.

The present invention relates to an electron gun cathode mount adapted at one end to secure a thermionic cathode and at the other end to be connected to an attachment member, wherein the electron gun cathode mount is structured so as to be capable of, when in use, reducing heat transfer from the thermionic cathode to the attachment member, and the material forming the electron gun cathode mount has a thermal conductivity of less than 10 Wm.sup.?1K.sup.?1 at the operating temperature of the thermionic cathode in a direction from the thermionic cathode to the attachment member. The present invention also relates to an electron gun assembly having the electron gun cathode mount installed therein.

The present invention relates to an electron gun cathode mount adapted at one end to secure a thermionic cathode and at the other end to be connected to an attachment member, wherein the electron gun cathode mount is structured so as to be capable of, when in use, reducing heat transfer from the thermionic cathode to the attachment member, and the material forming the electron gun cathode mount has a thermal conductivity of less than 10 Wm.sup.?1K.sup.?1 at the operating temperature of the thermionic cathode in a direction from the thermionic cathode to the attachment member. The present invention also relates to an electron gun assembly having the electron gun cathode mount installed therein.

A cathode device includes an emitter tip for generating electrons. An elongate heater is included having proximal and distal ends. The emitter tip can be located at the distal end of the heater. Two spaced apart legs can extend away from the distal end of the heater, terminating at the proximal end and forming an elongate slot therebetween. Two electrical contacts can compressively engage respective opposite outer surfaces of the two legs at the proximal end of the heater to mechanically secure and electrically connect the two legs of the heater to respective electrical contacts at a junction that is at a location spaced away from the emitter tip to keep the junction cooler.

A cathode device includes an emitter tip for generating electrons. An elongate heater is included having proximal and distal ends. The emitter tip can be located at the distal end of the heater. Two spaced apart legs can extend away from the distal end of the heater, terminating at the proximal end and forming an elongate slot therebetween. Two electrical contacts can compressively engage respective opposite outer surfaces of the two legs at the proximal end of the heater to mechanically secure and electrically connect the two legs of the heater to respective electrical contacts at a junction that is at a location spaced away from the emitter tip to keep the junction cooler.

A wire bonded triode for amplification of electromagnetic signals that includes an electron emitter (cathode), control grid, and an electron collector (anode) and having one or more wire bonded structures. A method of making a triode for amplification of electromagnetic signals that includes wirebonding one or more wires to form a wire bonded structure corresponding with one or more of an anode, grid and/or cathode element.