A wavelength tunable interference filter includes an electrostatic actuator that changes the dimension of a gap between a fixed reflection film and a movable reflection film, a fixed drawn electrode and a movable drawn electrode that are connected to the electrostatic actuator, and a third substrate having a top surface portion and a sidewall portion. An end surface of the sidewall portion is bonded to a first substrate so that a space surrounded by the top surface portion, the sidewall portion, and the first substrate is hermetically sealed. A second substrate and the electrostatic actuator are disposed in the space, and the fixed drawn electrode and the movable drawn electrode are disposed on the first substrate and extend both inside and outside the space.

An X-ray generator is provided using a transmission type target having a long life span, where it is possible to change the point for generating X-rays on the surface of the target while maintaining the vacuum chamber in a high vacuum state. A portion of a vacuum chamber 1 that includes a target 2 is linked to a main body portion 1a of the chamber through a linking member 5 as a movable chamber portion 1b. A fixed anode 12 is provided between the target 2 and the electrode 10 at the final stage from among a group of electrodes 8, 9 and 10 for electrostatically accelerating and converging electrons from an electron source 7 and is fixed to the main body portion 1a of the chamber in order to prevent the form of the electrical field from changing when the movable chamber portion 1b is shifted.

Optoelectronic devices (e.g., optical proximity sensors), methods for fabricating optoelectronic devices, and systems including optoelectronic devices, are described herein. An optoelectronic device includes a light detector die that includes a light detector sensor area. A light source die is attached to a portion of the light detector die that does not include the light detector sensor area. An opaque barrier is formed between the light detector sensor area and the light source die, and a light transmissive material encapsulates the light detector sensor area and the light source die. Rather than requiring a separate base substrate (e.g., a PCB substrate) to which are connected a light source die and a light detector die, the light source die is connected to the light detector die, such that the light detector die acts as the base for the finished optoelectronic device. This provides for cost reductions and reduces the total package footprint.

An x-ray generating apparatus comprises: a vacuum container having a main body, and a moving member coupled movably and airtightly to the main body via a vacuum bellows; and a guide mechanism, provided on an outer side of the vacuum container, for regulating the movement and inclination of the moving member in an approaching/separation direction with respect to an electron gun. The guide mechanism includes a guide portion where a guide flat surface along a plane orthogonal to a central axis of the electron beam is formed, the guide portion being provided on the main body side, a guided portion where a guided flat surface facing the guide flat surface is formed, the guided portion being provided on the moving member side, and at least three rolling elements placed between the guide flat surface and the guided flat surface.

A camera module is provided. The camera module includes: a printed circuit board on which an image sensor is to be mounted; a base arranged on an upper side of the printed circuit board; a cover can coupled to an upper side of the base; and a sealing member interposed between the base and the cover can.

A photoelectric converting module includes a circuit board and an optical coupling member. The circuit board includes a substrate defining a plurality of heat-conducting through holes and a hot-curable adhesive layer covering the heat-conducting through holes. The optical coupling member is fixed to the substrate via the hot-curable adhesive layer.

A system including a vacuum cell, an ion pump, and a multi-layer magnetic shield is described. The vacuum cell includes a magnetic field-sensitive section, a pump section, and a channel section providing a vacuum conductance path between the magnetic field-sensitive section and the pump section. The ion pump is in the pump section. The multi-layer magnetic shield surrounds at least a portion of the ion pump. The multi-layer magnetic shield has a first layer and a second layer. The first layer is between the second layer and the ion pump. The first layer has a moderate relative magnetic permeability and a high saturation magnetization. The second layer has a high relative magnetic permeability and a moderate saturation magnetization.

A system including a vacuum cell, an ion pump, and a multi-layer magnetic shield is described. The vacuum cell includes a magnetic field-sensitive section, a pump section, and a channel section providing a vacuum conductance path between the magnetic field-sensitive section and the pump section. The ion pump is in the pump section. The multi-layer magnetic shield surrounds at least a portion of the ion pump. The multi-layer magnetic shield has a first layer and a second layer. The first layer is between the second layer and the ion pump. The first layer has a moderate relative magnetic permeability and a high saturation magnetization. The second layer has a high relative magnetic permeability and a moderate saturation magnetization.