H01J9/24

Lead-free glass composition, glass composite material, glass paste, sealing structure, electrical/electronic component and coated component

The purpose of the present invention is to provide a lead-free glass composition in which crystallization is suppressed and which has a low softening point. This lead-free glass composition is characterized by containing silver oxide, tellurium oxide and vanadium oxide, and further containing at least one compound selected from among yttrium oxide, lanthanum oxide, cerium oxide, erbium oxide, ytterbium oxide, aluminum oxide, gallium oxide, indium oxide, iron oxide, tungsten oxide and molybdenum oxide as an additional component, and in that the content values (mol %) of silver oxide, tellurium oxide and vanadium oxide satisfy the relationships Ag.sub.2O>TeO.sub.2V.sub.2O.sub.5 and Ag.sub.5O2V.sub.2O.sub.5 when calculated in terms of the oxides, and in that the content of TeO.sub.2 is 25-37 mol. %.

METHODS FOR REPAIRING A RECESS OF A CHAMBER COMPONENT

Embodiments of the present disclosure generally relate to a method for forming and treating a component in semiconductor manufacturing. In one embodiment, a method for treating a chamber component used in vacuum processing includes obtaining the chamber component including a recess formed in a surface of the chamber component, the surface being fabricated from a metal, and the recess has a depth ranging from about 0.5 mm to about 10 mm and a width ranging from about 1 mm to about 15 mm. The method further includes polishing the bottom surface of the recess using a laser to form a polished bottom surface having an Ra number of 1 micron or less. The laser can achieve high quality surface finishing.

High-frequency vacuum electronic device

A self-assembling element fabricated using integrated circuit techniques may provide a small diameter helical conductor surrounding an electron beam for the construction of a vacuum electronic device such as a traveling-wave tube for terahertz scale signal.

PROCESSING EQUIPMENT COMPONENT PLATING
20200321197 · 2020-10-08 ·

A method of forming a radio frequency (RF) strap for use in a process chamber is provided. The method includes positioning a core strap including a first material that is electrically and thermally conductive in a first electrochemical bath. The first electrochemical bath includes a first solvent and a first plating precursor. The method further includes forming a first protective coating on an outer surface of the core strap, removing the first solvent and the first plating precursor from the core strap having the first protective coating formed thereon, post-treating the core strap having the first protective coating formed thereon, positioning the core strap having the first protective coating formed thereon in a second electrochemical bath, and forming a second protective coating on an outer surface of the first protective coating. The first protective coating includes nickel, the second electrochemical bath includes a second solvent and a second plating precursor, and the second protective coating includes gold.

HIGH-POWER ULTRAVIOLET (UV) AND VACUUM ULTRAVIOLET (VUV) LAMPS WITH MICRO-CAVITY PLASMA ARRAYS

A product having at least one plasma lamp that includes plates that are approximately parallel, with at least one array of microcavities formed in a surface of at least one plate. When desirable, the plates are separated a fixed distance by spacers with at least one spacer being placed near the plate's edge to form a hermetic seal therewith. A gas makes contact with the microcavity array. Electrodes capable of delivering a time-varying voltage are located such that the application of the time-varying voltage interacts with the gas to form a glow discharge plasma in the microcavities and the fixed volume between the plates. The glow discharge plasma efficiently and uniformly emits radiation that is predominantly in the UV/VUV spectral range with at least a portion of the radiation being emitted from the plasma lamp.

Cell forming device and alignment method

A cell forming device, including a first platform configured to carry a first substrate, a second platform configured to carry a second substrate, and a pre-alignment mechanism. The first platform includes a first suction surface and a second suction surface arranged opposite to each other and configured to attach the first substrate. The pre-alignment mechanism is configured to adjust a position of the first platform to pre-align the first substrate with the second substrate. The cell forming device further includes a turn-over mechanism configured to turn the first platform over to turn the first substrate over, an alignment mechanism configured to adjust a position of the second platform to align the turned first substrate with the second substrate, and a cell forming mechanism configured to move the first substrate to form a cell with the second substrate.

High-power ultraviolet (UV) and vacuum ultraviolet (VUV) lamps with micro-cavity plasma arrays

A plasma lamp includes plates that are approximately parallel, with at least one array of microcavities formed in a surface of at least one plate. When desirable, the plates are separated a fixed distance by spacers with at least one spacer being placed near the plate's edge to form a hermetic seal therewith. A gas makes contact with the microcavity array. Electrodes capable of delivering a time-varying voltage are located on the surface of each plate. At least one electrode is located on an exterior surface of at least one interior plate. Optionally, protective windows may be placed over the electrodes. The application of the time-varying voltage interacts with the gas to form a glow discharge plasma in the microcavities and the fixed volume between the plates (when present). The glow discharge plasma efficiently and uniformly emits UV/VUV radiation over the entire surface of the lamp.

FAST START DIMMABLE RF INDUCTION LAMP

A dimmable induction RF fluorescent lamp comprising a dimming circuit enabling the induction RF fluorescent lamp to dim in response to a signal from an external dimming circuit, and having a main mercury amalgam having a vapor pressure at room temperature which is higher than the vapor pressure of the mercury amalgam formed on the flag.

Fast start fluorescent light bulb

An RF fluorescent lamp, comprising a bulbous vitreous portion of the RF fluorescent lamp comprising a vitreous envelope filled with a working gas mixture, a power coupler to induce an alternating electric field within the vitreous envelope, an electronic ballast, and a mercury amalgam accommodating structure mounted within the lamp envelope and adapted to absorb power from the electric field to rapidly heat and vaporize an amalgam of mercury to rapidly illuminate the lamp envelope during a turn-on phase of the RF fluorescent lamp, wherein the structure is comprised of a substrate material coated with a mixture of indium and gold.

Differential Coating of High Aspect Ratio Objects Through Methods of Reduced Flow and Dosing Variations
20200006042 · 2020-01-02 ·

A channel electron multiplier having a high aspect ratio and differential coatings along its channel length is disclosed. The elongated tube has an input end, an output end, and an interior surface extending along the length of the tube between the input end and the output end. The channel electron multiplier also has first and second conductive layers formed on the interior surface of the tube. The first conductive layer is selected to provide a first electrical resistance, a first electron emission characteristic, or both, and the second conductive layer is selected to provide a second electrical resistance, a second electron emission characteristic, or both. A method of making a channel electron multiplier having two or more different conductive layers is also disclosed.