An industrial magnetron includes an anode cylinder body and a cooling block arranged in a columnar manner around an outer periphery of the anode cylinder body, where the cooling block is provided with a refrigerant flow path that circulates a liquid refrigerant to circulate around the anode cylinder body and directly cool the anode cylinder body, and the refrigerant flow path has a helical groove on an inner wall surface.

Provided is, for an industrial magnetron having a large output, a method for manufacturing an industrial magnetron that can be continuously operated by effectively cooling an anode cylindrical body and a magnet and suppressing performance degradation and failure of the anode cylindrical body. The industrial magnetron includes the anode cylindrical body, annular permanent magnets that are arranged above and below the anode cylindrical body to supply a magnetic field, and a cooling block disposed in a columnar shape on the outer circumference of the anode cylindrical body. The cooling block has an anode cylindrical body contact portion, which is a portion in contact with the anode cylindrical body, and a permanent magnet contact portion, which is a portion in contact with the permanent magnets and both the anode cylindrical body and the permanent magnets are cooled by one cooling block.

Embodiments include a vacuum device, comprising: an enclosure configured to enclose a vacuum, comprising an external base forming at least a portion of the enclosure; an internal base within the enclosure; and at least one thermal dissipative strap assembly, comprising: an internal base thermal conductive base in contact with the internal base, an external base thermal conductive base in contact with the external base, and a flexible thermal dissipative strap coupling the internal base thermal conductive base to the external base thermal conductive base.

Embodiments include a vacuum device, comprising: an enclosure configured to enclose a vacuum, the enclosure including an external base including an opening; an internal base within the enclosure; and an adjustable support assembly adjustably coupling the internal base to the external base and extending through the opening, the adjustable support assembly comprising: a threaded shaft extending along a longitudinal axis and coupled to the internal base; a threaded hole component threadedly engaged with the threaded shaft and coupled to the external base such that the threaded hole component is axially constrained in a direction along the longitudinal axis relative to the external base independent of the threaded shaft; and a flexible component coupled to the external base and the threaded shaft and sealing the opening.

Magnetron configurations that provide more efficient and/or more uniform cooling characteristics and methods for forming the magnetrons are provided. The magnetron includes one or more flow directing structures disposed between parallel cooling fins. The flow directing structures direct air flow across various surfaces of the cooling fins that otherwise would be obstructed by magnetron components, reducing the incidence and/or magnitude of hot spots on the cooling fins and/or on other magnetron components. The flow directing structures also adjust flow rates to improve cooling efficiency.

A magnetron includes an anode cylinder extending in a cylindrical shape along a central axis and a plurality of plate-like vanes at least each one end of which is fixed to the anode cylinder, extending from an inner face of the anode cylinder toward the central axis, in which the anode cylinder includes refrigerant flow paths for directly applying a refrigerant to the plate-like vanes. The refrigerant flow paths 111 are openings formed so that end surfaces (joint end faces of the plate-like vanes) of the plate-like vanes are exposed, which allow the refrigerant to directly contact the plate-like vanes.

An anode structure for a magnetron provides for low eddy currents and efficient water cooling. The anode structure may be made by machining a bimetal blank including an out layer of a first metal and an inner layer of a second metal and formed by explosion bonding. The second metal has a resistivity lower than first metal and a thermal conductivity higher than the first metal. The machining may result in the anode structure with vanes each having a center (tip) portion made of the second metal and the rest made of the first metal. The machined anode structure may be coated with the second metal.

Embodiments of the present disclosure generally provide magnetron configurations that provide more efficient and/or more uniform cooling characteristics and methods for forming the magnetrons. The magnetron includes one or more flow directing structures disposed between parallel cooling fins. The flow directing structures direct air flow across various surfaces of the cooling fins that otherwise would be obstructed by magnetron components, reducing the incidence and/or magnitude of hot spots on the cooling fins and/or on other magnetron components. The flow directing structures also adjust flow rates to improve cooling efficiency.

An industrial magnetron includes an anode cylinder body and a cooling block arranged in a columnar manner around an outer periphery of the anode cylinder body, where the cooling block is provided with a refrigerant flow path that circulates a liquid refrigerant to circulate around the anode cylinder body and directly cool the anode cylinder body, and the refrigerant flow path has a helical groove on an inner wall surface.

A magnetron cooling fin has a flat plate shape in which one or a plurality of corrugated regions are formed in a body of the magnetron cooling fin to improve cooling efficiency thereof. A magnetron cooling fin in which a corrugated region processed to increase a contact area in contact with air is formed around a through-hole through which an anode unit of a magnetron passes, thereby improving cooling efficiency thereof.