Patent classifications
H01J23/02
MAGNETRON
Provided is a magnetron capable of preventing damage to a coil and suppressing oscillation stop due to occurrence of abnormal oscillation. A magnetron is a high-output type industrial magnetron in which all plate-shaped vanes belonging to a first plate-shaped vane group and all plate-shaped vanes belonging to a second plate-shaped vane group have the same number (at least three or more) of through holes near tips in a direction of a central axis, and when n is a numerical value indicating an odd number starting with 1, an n-th pressure equalizing ring penetrates to come into contact with an n-th through hole of all the plate-shaped vanes belonging to the first plate-shaped vane group and an (n+1)-th pressure equalizing ring penetrates to come into contact with an (n+1)-th through hole of all the plate-shaped vanes belonging to the second plate-shaped vane group.
MAGNETRON
Provided is a magnetron capable of preventing damage to a coil and suppressing oscillation stop due to occurrence of abnormal oscillation. A magnetron is a high-output type industrial magnetron in which all plate-shaped vanes belonging to a first plate-shaped vane group and all plate-shaped vanes belonging to a second plate-shaped vane group have the same number (at least three or more) of through holes near tips in a direction of a central axis, and when n is a numerical value indicating an odd number starting with 1, an n-th pressure equalizing ring penetrates to come into contact with an n-th through hole of all the plate-shaped vanes belonging to the first plate-shaped vane group and an (n+1)-th pressure equalizing ring penetrates to come into contact with an (n+1)-th through hole of all the plate-shaped vanes belonging to the second plate-shaped vane group.
INVERTED CYLINDRICAL MAGNETRON (ICM) SYSTEM AND METHODS OF USE
An Inverted Cylindrical Magnetron (ICM) System and Methods of Use is disclosed herein generally comprising a co-axial central anode concentrically located within a first annular end anode and a second annular end anode; a process chamber including a top end and a bottom end in which the first annular end anode and the second annular end anode are coaxially disposed, whereby the first annular end anode, the second annular end anode, and the central anode form a 3-anode configuration to provide electric field uniformity, and the process chamber including a central annular space coupled to a tube insulator disposed about the central annular space wall; a cathode concentrically coupled to the tube insulator and a target; and a plurality of multi-zone electromagnets or hybrid electro-permanent magnets surrounding the exterior of the process chamber providing a tunable magnetic field.
INVERTED CYLINDRICAL MAGNETRON (ICM) SYSTEM AND METHODS OF USE
An Inverted Cylindrical Magnetron (ICM) System and Methods of Use is disclosed herein generally comprising a co-axial central anode concentrically located within a first annular end anode and a second annular end anode; a process chamber including a top end and a bottom end in which the first annular end anode and the second annular end anode are coaxially disposed, whereby the first annular end anode, the second annular end anode, and the central anode form a 3-anode configuration to provide electric field uniformity, and the process chamber including a central annular space coupled to a tube insulator disposed about the central annular space wall; a cathode concentrically coupled to the tube insulator and a target; and a plurality of multi-zone electromagnets or hybrid electro-permanent magnets surrounding the exterior of the process chamber providing a tunable magnetic field.
Traveling wave tube system and control method of traveling wave tube
A traveling wave tube system includes a traveling wave tube, and a power supply device for supplying required power supply voltages to the respective electrodes of the traveling wave tube. The power supply device includes a control voltage generation circuit for generating a control voltage which is a negative DC voltage on the basis of a ground potential and supplying the control voltage to the anode, an anode voltage generation circuit for generating an anode voltage which is a negative DC voltage on the basis of the potential of the anode and supplying the anode voltage to the cathode, and a collector voltage generation circuit for generating a collector voltage which is a positive DC voltage on the basis of the potential of the cathode and supplying the collector voltage to the collector.
Inverted cylindrical magnetron (ICM) system and methods of use
An Inverted Cylindrical Magnetron (ICM) System and Methods of Use is disclosed herein generally comprising a co-axial central anode concentrically located within a first annular end anode and a second annular end anode; a process chamber including a top end and a bottom end in which the first annular end anode and the second annular end anode are coaxially disposed, whereby the first annular end anode, the second annular end anode, and the central anode form a 3-anode configuration to provide electric field uniformity, and the process chamber including a central annular space coupled to a tube insulator disposed about the central annular space wall; a cathode concentrically coupled to the tube insulator and a target; and a plurality of multi-zone electromagnets or hybrid electro-permanent magnets surrounding the exterior of the process chamber providing a tunable magnetic field.
Inverted cylindrical magnetron (ICM) system and methods of use
An Inverted Cylindrical Magnetron (ICM) System and Methods of Use is disclosed herein generally comprising a co-axial central anode concentrically located within a first annular end anode and a second annular end anode; a process chamber including a top end and a bottom end in which the first annular end anode and the second annular end anode are coaxially disposed, whereby the first annular end anode, the second annular end anode, and the central anode form a 3-anode configuration to provide electric field uniformity, and the process chamber including a central annular space coupled to a tube insulator disposed about the central annular space wall; a cathode concentrically coupled to the tube insulator and a target; and a plurality of multi-zone electromagnets or hybrid electro-permanent magnets surrounding the exterior of the process chamber providing a tunable magnetic field.
Bi-metallic anode for amplitude modulated magnetron
An anode structure for a magnetron provides for low eddy currents and efficient water cooling. The anode structure may be made by machining a bimetal blank including an out layer of a first metal and an inner layer of a second metal and formed by explosion bonding. The second metal has a resistivity lower than first metal and a thermal conductivity higher than the first metal. The machining may result in the anode structure with vanes each having a center (tip) portion made of the second metal and the rest made of the first metal. The machined anode structure may be coated with the second metal.
Bi-metallic anode for amplitude modulated magnetron
An anode structure for a magnetron provides for low eddy currents and efficient water cooling. The anode structure may be made by machining a bimetal blank including an out layer of a first metal and an inner layer of a second metal and formed by explosion bonding. The second metal has a resistivity lower than first metal and a thermal conductivity higher than the first metal. The machining may result in the anode structure with vanes each having a center (tip) portion made of the second metal and the rest made of the first metal. The machined anode structure may be coated with the second metal.
FIBER OPTIC POWER FOR ADJUSTABLE MAGNET ASSEMBLIES
An apparatus, system and method for adjustable magnet assemblies that deliver power through fiber optics. An energy storage device that includes a rechargeable battery is located in a magnetron assembly and a fiber optic cable located outside the magnetron assembly delivers power signals to recharge the rechargeable battery.