The present invention is intended to provide improved patterned X-ray emitting targets as well as X-ray sources that include patterned X-ray emitting targets as well as X-ray reflectance scatterometry (XRS) systems and also including X-ray photoelectron spectroscopy (XPS) systems and X-ray fluorescence (XRF) systems which employ such X-ray emitting targets.

The present invention is intended to provide improved patterned X-ray emitting targets as well as X-ray sources that include patterned X-ray emitting targets as well as X-ray reflectance scatterometry (XRS) systems and also including X-ray photoelectron spectroscopy (XPS) systems and X-ray fluorescence (XRF) systems which employ such X-ray emitting targets.

A target assembly for generating radiation may comprise a target, a substrate and a window. The target may be capable of generating first radiation when impinged by a beam. The window may be at least partially permeable to the beam. The window and the substrate may form at least part of a hermetically sealed chamber and the target may be positioned in the chamber. The chamber may be filled with air having a normal or reduced content of oxygen.

The invention includes an XRF analyzer with reduced x-ray attenuation between sample and target and between sample and detector. Attenuation can be reduced by removing atmospheric-air paths through which the x-rays must travel. Reduced x-ray attenuation can allow for easier detection of low-atomic-number elements. Cost saving can be achieved by reducing the number of x-ray windows.

An x-ray tube casing is provided which includes a central frame having internal passages to supply a cooling fluid directly to the casing without the need for an external dedicated heat exchanger. The cooling fluid flowing through the passages in the easing can thermally contact the dielectric coolant within the casing to cool the tube coolant during operation of the x-ray tube. The casing is formed in an additive manufacturing process to allow for tight tolerances with regard to the structure for the casing and the internal passages to reduce the size and weight of the casing. The casing can additionally be formed from a metal matrix including a metal with high x-ray attenuation and a filler metal. The metal matrix eliminates the need for a separate x-ray attenuation layer within the casing, further reducing the size, number of parts and assembly complexity of the casing.

An x-ray tube casing is provided which includes a central frame having internal passages to supply a cooling fluid directly to the casing without the need for an external dedicated heat exchanger. The cooling fluid flowing through the passages in the easing can thermally contact the dielectric coolant within the casing to cool the tube coolant during operation of the x-ray tube. The casing is formed in an additive manufacturing process to allow for tight tolerances with regard to the structure for the casing and the internal passages to reduce the size and weight of the casing. The casing can additionally be formed from a metal matrix including a metal with high x-ray attenuation and a filler metal. The metal matrix eliminates the need for a separate x-ray attenuation layer within the casing, further reducing the size, number of parts and assembly complexity of the casing.

A diaphragm for restricting a cross section of an electron beam of an X-ray tube includes a base body made of a first material, which has a first cylindrical or conical diaphragm aperture, and an additional body made of a second material, which has a second cylindrical or conical diaphragm aperture. The additional body in the installed state is arranged on the side near the electron source, wherein the atomic number of the first material is greater than the atomic number of the second material. The diameters of the diaphragm apertures at the end far from the electron source are not smaller than at the end near the electron source, and the second diaphragm aperture at its end far from the electron source lies completely inside the first diaphragm aperture at its end near the electron source.

Embodiments of methods and/or apparatus for a radiographic imaging can include a plurality of x-ray sources disposed in a curve and a detector configured to revolve relative thereto. In one embodiment, a CBCT imaging method and/or apparatus can include performing a first scan at a first speed using stationary angularly distributed x-ray sources to acquire first CBCT projection data that impinge a detector of a first field of view (FOV), identifying an area of interest within the first FOV, and performing a second scan at a second speed using the x-ray sources acquire second CBCT projection data that impinge a portion of the detector of a second smaller FOV including the area of interest within the first FOV using second emissions by the x-ray sources, where the second speed is greater than the first speed.

Embodiments of methods and/or apparatus for a radiographic imaging can include a plurality of x-ray sources disposed in a curve and a detector configured to revolve relative thereto. In one embodiment, a CBCT imaging method and/or apparatus can include performing a first scan at a first speed using stationary angularly distributed x-ray sources to acquire first CBCT projection data that impinge a detector of a first field of view (FOV), identifying an area of interest within the first FOV, and performing a second scan at a second speed using the x-ray sources acquire second CBCT projection data that impinge a portion of the detector of a second smaller FOV including the area of interest within the first FOV using second emissions by the x-ray sources, where the second speed is greater than the first speed.

An X-ray imaging apparatus includes an X-ray generation apparatus including an X-ray generation tube having an electron gun and a target configured to receive an electron beam from the electron gun to generate X-rays, a support structure supporting the tube, and a deflector configured to deflect the electron beam, an X-ray detector configured to detect the X-rays from the X-ray generation apparatus, and a control apparatus configured to control the X-ray generation apparatus. The support structure supports the tube to permit at least the target to be pivoted in a state in which the deflector is fixed, and the control apparatus determines, based on use amount of the X-ray generation apparatus and/or change of the X-rays generated by the X-ray generation apparatus, whether it is necessary to pivot the target.