Provided is an ultra-high vacuum forming device containing an ion pump having a compact size in the central axis direction. The ultra-high vacuum forming device (1) is provided with at least one ion pump (100). The ion pump (100) is provided with: a casing (110) having at least one opening (111, 112); a board-shaped electrode group (120) formed by means of a central opening (120a) being formed along a predetermined central axis (C) disposed within the casing (110), and a plurality of electrodes (121) being joined with spaces therebetween; a pair of board-shaped electrodes (131, 132) having a different polarity than that of the electrode group (120) and that are disposed at positions sandwiching both sides of the electrode group (120) within the casing (110); and a pair of board-shaped magnets (141, 142) disposed at positions sandwiching both sides of the pair of board-shaped electrodes (131, 132).

Provided is an ultra-high vacuum forming device containing an ion pump having a compact size in the central axis direction. The ultra-high vacuum forming device (1) is provided with at least one ion pump (100). The ion pump (100) is provided with: a casing (110) having at least one opening (111, 112); a board-shaped electrode group (120) formed by means of a central opening (120a) being formed along a predetermined central axis (C) disposed within the casing (110), and a plurality of electrodes (121) being joined with spaces therebetween; a pair of board-shaped electrodes (131, 132) having a different polarity than that of the electrode group (120) and that are disposed at positions sandwiching both sides of the electrode group (120) within the casing (110); and a pair of board-shaped magnets (141, 142) disposed at positions sandwiching both sides of the pair of board-shaped electrodes (131, 132).

A getter pumping system for linear accelerators or high-volume environments, is described. A plurality of getter cartridges having a linear support and a plurality of linear heaters are connected in a high-density configuration to a wall that has a surface area of at least 0.5 m.sup.2.

A getter pumping system for linear accelerators or high-volume environments, is described. A plurality of getter cartridges having a linear support and a plurality of linear heaters are connected in a high-density configuration to a wall that has a surface area of at least 0.5 m.sup.2.

An ion pump is equipped with a monitoring system that, by monitoring the temperature present inside the ion pump, makes it possible to determine whether the ion pump is in an OFF state or an ON state while an electric potential difference is being applied between the pump electrodes. The monitoring system further makes it possible to assess the ON state or OFF state of the ion pump even when the ion pump is operating under low-pressure conditions, with an electric current below the minimum value detectable by conventional reading scales. A method for operating the ion pump utilizes the monitoring system to assess the ON/OFF state of the ion pump while an electric potential difference is being applied between the pump electrodes.

An ion pump is equipped with a monitoring system that, by monitoring the temperature present inside the ion pump, makes it possible to determine whether the ion pump is in an OFF state or an ON state while an electric potential difference is being applied between the pump electrodes. The monitoring system further makes it possible to assess the ON state or OFF state of the ion pump even when the ion pump is operating under low-pressure conditions, with an electric current below the minimum value detectable by conventional reading scales. A method for operating the ion pump utilizes the monitoring system to assess the ON/OFF state of the ion pump while an electric potential difference is being applied between the pump electrodes.