Patent classifications
H01J41/12
Vacuum cell configured for reduced inner chamber helium permeation
A vacuum cell is described. The vacuum cell includes an inner chamber, a buffer channel, and a buffer ion pump. The buffer channel is fluidically isolated from the inner chamber and fluidically isolated from an ambient external to the vacuum cell. The buffer ion pump is fluidically coupled to the buffer channel and fluidically isolated from the ambient and the inner chamber.
Vacuum cell configured for reduced inner chamber helium permeation
A vacuum cell is described. The vacuum cell includes an inner chamber, a buffer channel, and a buffer ion pump. The buffer channel is fluidically isolated from the inner chamber and fluidically isolated from an ambient external to the vacuum cell. The buffer ion pump is fluidically coupled to the buffer channel and fluidically isolated from the ambient and the inner chamber.
VACUUM CELL CONFIGURED FOR REDUCED INNER CHAMBER HELIUM PERMEATION
A vacuum cell is described. The vacuum cell includes an inner chamber, a buffer channel, and a buffer ion pump. The buffer channel is fluidically isolated from the inner chamber and fluidically isolated from an ambient external to the vacuum cell. The buffer ion pump is fluidically coupled to the buffer channel and fluidically isolated from the ambient and the inner chamber.
VACUUM CELL CONFIGURED FOR REDUCED INNER CHAMBER HELIUM PERMEATION
A vacuum cell is described. The vacuum cell includes an inner chamber, a buffer channel, and a buffer ion pump. The buffer channel is fluidically isolated from the inner chamber and fluidically isolated from an ambient external to the vacuum cell. The buffer ion pump is fluidically coupled to the buffer channel and fluidically isolated from the ambient and the inner chamber.
Dewar vacuum maintenance systems for intermittently powered sensors
Systems and methods that maintain a vacuum for a long period of time in a portable vacuum chamber are disclosed. Systems and methods for the maintenance of a vacuum in cryogenic Dewars for imaging systems with high gas loads using an integral pump and getter are also disclosed.
Dewar vacuum maintenance systems for intermittently powered sensors
Systems and methods that maintain a vacuum for a long period of time in a portable vacuum chamber are disclosed. Systems and methods for the maintenance of a vacuum in cryogenic Dewars for imaging systems with high gas loads using an integral pump and getter are also disclosed.
Sputter ion pump with penning-trap current sensor
A sputter-ion-pump system includes a sputter ion pump and an electronic drive. The electronic drive supplies a voltage across the ion pump to establish, in cooperation with a magnetic field, a Penning trap within the ion pump. A current sensor measures the Penning-trap current across the Penning trap. The Penning trap is used as an indication of pressure within the ion pump or a vacuum chamber including or in fluid communication with the ion pump. The pressure information can be used to determine flow rates, e.g., due to a load, outgassing, and/or leakage from an ambient.
Sputter ion pump with penning-trap current sensor
A sputter-ion-pump system includes a sputter ion pump and an electronic drive. The electronic drive supplies a voltage across the ion pump to establish, in cooperation with a magnetic field, a Penning trap within the ion pump. A current sensor measures the Penning-trap current across the Penning trap. The Penning trap is used as an indication of pressure within the ion pump or a vacuum chamber including or in fluid communication with the ion pump. The pressure information can be used to determine flow rates, e.g., due to a load, outgassing, and/or leakage from an ambient.
SYSTEM AND METHOD FOR ENHANCED ION PUMP LIFESPAN
Within an ion pump, accelerated ions leave the center portion of an anode tube due to the anode tube symmetry and the generally symmetrical electric fields present. The apparent symmetry within the anode tube may be altered by making the anode tube longitudinally segmented and applying independent voltages to each segment. The voltages on two adjacent segments may be time varying at different rates to achieve a rasterizing process.
SYSTEM AND METHOD FOR ENHANCED ION PUMP LIFESPAN
Within an ion pump, accelerated ions leave the center portion of an anode tube due to the anode tube symmetry and the generally symmetrical electric fields present. The apparent symmetry within the anode tube may be altered by making the anode tube longitudinally segmented and applying independent voltages to each segment. The voltages on two adjacent segments may be time varying at different rates to achieve a rasterizing process.