H01J41/12

IONIZING FLUIDIC ACCELERATOR AND METHODS OF USE
20200300271 · 2020-09-24 ·

The present disclosure describes systems and methods for using an ionizing fluidic accelerator that may encompass the use of an ionizing fluidic accelerator including a substrate, an electron emitter having a negative bias and being formed on the substrate, an anode having a positive bias and being formed on the substrate, and an attractor having a negative bias and being formed on the substrate. The electron emitter and the anode may be separated in a first direction and the negative bias of the electron emitter and the positive bias of the anode may produce a first electric field in the first direction. The anode and the attractor may be separated in a second direction, the positive bias of the anode and the negative bias of the attractor may produce a second electric field in the second direction, and the second direction may be orthogonal to the first direction.

Rotary electric machine

A rotary electric machine is installed such that a central axis of a rotating shaft is horizontal, and coolant suction apertures are formed at positions on a cylindrical portion of a frame that are vertically above first and second coil ends, and strip-shaped insulating papers are inserted such that a thickness direction is in a radial direction between radially adjacent conductor portions of portions of the conductor wire that constitute the first and second coil ends, and are disposed so as to extend circumferentially across positions that are vertically below the coolant suction apertures inside the first and second coil ends.

SYSTEM AND METHOD FOR ENHANCED ION PUMP LIFESPAN

Within an ion pump, accelerated ions leave the center portion of an anode tube due to the anode tube symmetry and the generally symmetrical electric fields present. The apparent symmetry within the anode tube may be altered by making the anode tube longitudinally segmented and applying independent voltages to each segment. The voltages on two adjacent segments may be time varying at different rates to achieve a rasterizing process.

SYSTEM AND METHOD FOR ENHANCED ION PUMP LIFESPAN

Within an ion pump, accelerated ions leave the center portion of an anode tube due to the anode tube symmetry and the generally symmetrical electric fields present. The apparent symmetry within the anode tube may be altered by making the anode tube longitudinally segmented and applying independent voltages to each segment. The voltages on two adjacent segments may be time varying at different rates to achieve a rasterizing process.

System and method for enhanced ion pump lifespan

Within an ion pump, accelerated ions leave the center portion of an anode tube due to the anode tube symmetry and the generally symmetrical electric fields present. The apparent symmetry within the anode tube may be altered by making the anode tube longitudinally segmented and applying independent voltages to each segment. The voltages on two adjacent segments may be time varying at different rates to achieve a rasterizing process.

System and method for enhanced ion pump lifespan

Within an ion pump, accelerated ions leave the center portion of an anode tube due to the anode tube symmetry and the generally symmetrical electric fields present. The apparent symmetry within the anode tube may be altered by making the anode tube longitudinally segmented and applying independent voltages to each segment. The voltages on two adjacent segments may be time varying at different rates to achieve a rasterizing process.

Methods, apparatus, and system for mass spectrometry

A miniature, low cost mass spectrometer capable of unit resolution over a mass range of 10 to 50 AMU. The mass spectrometer incorporates several features that enhance the performance of the design over comparable instruments. An efficient ion source enables relatively low power consumption without sacrificing measurement resolution. Variable geometry mechanical filters allow for variable resolution. An onboard ion pump removes the need for an external pumping source. A magnet and magnetic yoke produce magnetic field regions with different flux densities to run the ion pump and a magnetic sector mass analyzer. An onboard digital controller and power conversion circuit inside the vacuum chamber allows a large degree of flexibility over the operation of the mass spectrometer while eliminating the need for high-voltage electrical feedthroughs. The miniature mass spectrometer senses fractions of a percentage of inlet gas and returns mass spectra data to a computer.

ION PUMP SHIELD

An ion pump with a housing enclosing an interior, a gas inlet having a through-hole extending into the interior of the ion pump, at least one cathode, at least one anode positioned in proximity to the at least one cathode, a magnet disposed on an opposite side of the at least one cathode from the anode, and a blocking shield disposed between the gas inlet and the at least one cathode. The blocking shield is electrically connected to the at least one anode. An associated method installs the blocking shield by inserting components of the blocking shield assembly through the gas inlet, and assembling (inside the interior of the ion pump) the inserted components to form the blocking shield.

ION PUMP SHIELD

An ion pump with a housing enclosing an interior, a gas inlet having a through-hole extending into the interior of the ion pump, at least one cathode, at least one anode positioned in proximity to the at least one cathode, a magnet disposed on an opposite side of the at least one cathode from the anode, and a blocking shield disposed between the gas inlet and the at least one cathode. The blocking shield is electrically connected to the at least one anode. An associated method installs the blocking shield by inserting components of the blocking shield assembly through the gas inlet, and assembling (inside the interior of the ion pump) the inserted components to form the blocking shield.

Sputter ion pump with penning-trap current sensor

A sputter-ion-pump system includes a sputter ion pump and an electronic drive. The electronic drive supplies a voltage across the ion pump to establish, in cooperation with a magnetic field, a Penning trap within the ion pump. A current sensor measures the Penning-trap current across the Penning trap. The Penning trap is used as an indication of pressure within the ion pump or a vacuum chamber including or in fluid communication with the ion pump. The pressure information can be used to determine flow rates, e.g., due to a load, outgassing, and/or leakage from an ambient.