Systems and approaches for semiconductor metrology and surface analysis using Secondary Ion Mass Spectrometry (SIMS) are disclosed. In an example, a secondary ion mass spectrometry (SIMS) system includes a sample stage. A primary ion beam is directed to the sample stage. An extraction lens is directed at the sample stage. The extraction lens is configured to provide a low extraction field for secondary ions emitted from a sample on the sample stage. A magnetic sector spectrograph is coupled to the extraction lens along an optical path of the SIMS system. The magnetic sector spectrograph includes an electrostatic analyzer (ESA) coupled to a magnetic sector analyzer (MSA).

A method of separating a sample of ions according to their ion mobilities is provided. The method comprises receiving the sample of ions into a drift tube; applying a first electric field component within the drift tube so as to cause the sample of ions to move along a path within the drift tube, whereby the sample of ions separates along the path; and applying a second electric field component within the drift tube. The first and second electric field components have a combined electric field strength to modify the ion mobility of at least a portion of the sample of ions and to increase the separation of at least a portion of the sample of ions along the path The second electric field component substantially does not cause a net change in the velocity of the sample of ions perpendicular to the path. An apparatus for separating a sample of ions according to their ion mobilities is also provided.

A method of separating a sample of ions according to their ion mobilities is provided. The method comprises receiving the sample of ions into a drift tube; applying a first electric field component within the drift tube so as to cause the sample of ions to move along a path within the drift tube, whereby the sample of ions separates along the path; and applying a second electric field component within the drift tube. The first and second electric field components have a combined electric field strength to modify the ion mobility of at least a portion of the sample of ions and to increase the separation of at least a portion of the sample of ions along the path The second electric field component substantially does not cause a net change in the velocity of the sample of ions perpendicular to the path. An apparatus for separating a sample of ions according to their ion mobilities is also provided.

A method for removing deposits in a mass spectrometer ion source housing includes delivering a liquid from a liquid source to a surface within the ion source housing. The surface including an ultrasonic transducer embedded within the surface. The method further includes activating the ultrasonic transducer to ultrasonically remove the deposit.

A method for removing deposits in a mass spectrometer ion source housing includes delivering a liquid from a liquid source to a surface within the ion source housing. The surface including an ultrasonic transducer embedded within the surface. The method further includes activating the ultrasonic transducer to ultrasonically remove the deposit.

A method for predicting whether an early stage (IA, IB) non-small-cell lung cancer (NSCLC) patient is at a high risk of recurrence of the cancer following surgery involves subjecting a blood-based sample from the patient (obtained prior to, at, or after the surgery) to mass spectrometry and classification with a computer implementing a classifier. If the patients blood sample is classified as “high risk”, highest risk“or the equivalent, the patient can be guided to more aggressive treatment post-surgery. The classifier, or combination of classifiers, can be arranged in a hierarchical manner to make intermediate classifications, such as intermediate/high or intermediate/low, as well as low risk” or “lowest risk” classifications. Such additional classifications may guide clinical decisions as well.

Examples are directed toward systems and methods relating to collecting and analyzing samples. For example, a system includes a cold trap that directly collects a sample. The cold trap operates to serve as a collection filter while the system draws in a flow across the cold trap. A thermal heater, coupled to the cold trap, flash heats the cold trap to produce a released sample from the cold trap at a release concentration. An analyzer entrains the released sample at the release concentration into a sampling flow of the analyzer for analysis.

Apparatus comprise an electrode arrangement comprising a plurality of electrodes defining a volume, an ion entrance, and an ion exit, and a voltage source coupled to the plurality of electrodes and configured to apply a nonlinear DC voltage sequence to the electrodes between the ion entrance and the ion exit that directs ions through the volume with the volume at a pressure of at least 1 Torr. Ions can be focused using nonlinear DC voltage sequences, including at atmospheric pressure. Related methods are also disclosed.

Apparatus comprise an electrode arrangement comprising a plurality of electrodes defining a volume, an ion entrance, and an ion exit, and a voltage source coupled to the plurality of electrodes and configured to apply a nonlinear DC voltage sequence to the electrodes between the ion entrance and the ion exit that directs ions through the volume with the volume at a pressure of at least 1 Torr. Ions can be focused using nonlinear DC voltage sequences, including at atmospheric pressure. Related methods are also disclosed.

An ion pulse generator (100) includes a triboelectric generator (110), an ion emitter (132) and a conductive surface (134). The triboelectric generator (110) includes a first electrode (114), a spaced apart second electrode (120) and a first triboelectric layer (116). The triboelectric generator (110) generates a predetermined amount of charge as a result of relative movement of the first triboelectric layer (116). The ion emitter (132) is electrically coupled to the first electrode (114). The conductive surface (134) is electrically coupled to the second electrode (120) and is spaced apart from the ion emitter (132) at a predetermined distance. Generation of the predetermined amount of charge causes formation of ions between the ion emitter (132) and the conductive surface (134).