Patent classifications
H
H01
H01J
49/00
H01J49/44
H01J49/44
EELS Auto-Alignment Using Full Image Simulation
Methods and systems for automatically tuning a charged particle system are disclosed. This includes obtaining an initial image of a probe spot, generating a simulated probe spot to fit to the initial image of the probe spot, estimating a value of an aberration parameter based on the simulated probe spot, and tuning the charged particle system based on the value of the aberration parameter.