H01J49/44

EELS Auto-Alignment Using Full Image Simulation
20250391649 · 2025-12-25 · ·

Methods and systems for automatically tuning a charged particle system are disclosed. This includes obtaining an initial image of a probe spot, generating a simulated probe spot to fit to the initial image of the probe spot, estimating a value of an aberration parameter based on the simulated probe spot, and tuning the charged particle system based on the value of the aberration parameter.