An LSP broadband light source is disclosed. The LSP broadband light source may include a pump source configured to generate a pump beam and one or more collimating optical elements configured to collimate the pump beam into a collimated pump beam. The light source may include one or more focusing optical elements and a beamsplitter located at a conjugate plane between the one or more collimating optical elements and the one or more focusing optical elements. The light source may include a gas containment structure. The beamsplitter may be configured to split the collimated pump beam into a set of pump beamlets, wherein the one or more focusing optical elements are configured to focus the set of pump beamlets to a set of focus positions within the gas to generate multiple plasma regions at the different focus positions.

An excimer lamp does not cause a significant decrease in the emission intensity of ultraviolet light and transmission capacity, and that takes into consideration the adverse effect on the human body while securing a sufficient intensity of ultraviolet light. The excimer lamp includes a discharge vessel, a discharge gas sealed in the discharge vessel, and an ultraviolet light transmitting thin film provided on at least an inner surface of the discharge vessel, in which the ultraviolet light transmitting thin film includes first particles that are dispersed in the ultraviolet light transmitting thin film and that scatter ultraviolet light, and second particles that fill voids between the first particles, and an average particle diameter of the first particles is larger than an average particle diameter of the second particles.

A cathode-ray ultraviolet light source comprising: an elongated glass envelope having a first end and second end, the glass envelope defining an evacuated volume; an electron gun positioned within the evacuated volume proximate to the first end and being capable of developing an electron beam; a target disposed within the evacuated volume between the first and second end of the glass envelope, the target comprising a phosphor material covered with a reflective metal film; and an electron beam focusing and deflecting mechanism disposed within the evacuated volume between the electron gun and the target to direct the electron beam towards the reflective metal film of the target.