Patent classifications
H01J65/04
PLASMA ILLUMINATION DEVICE WITH MICROWAVE PUMP
The present disclosure describes a plasma illumination device with microwave pumping, comprising:
a hermetically sealed casing, a magnetron, a microwave resonator containing a rotatable electrodeless plasma lamp,
a coaxial coupling line running parallel to the casing axis, for transmitting microwave power from the magnetron to the microwave resonator, at least one heat sink located on the inner walls of the casing and providing heat transfer through the casing to the external environment, and a light-transmitting hermetically sealed hollow cylinder fitted in a hermetically sealed way on the casing above the microwave resonator. This results in an illumination device with microwave pumping, which may be used to illuminate objects located in unfavorable environmental conditions, particularly those in which there is a high content of dust or other contaminants, or in an aqueous environment at great depths.
Lamp
The invention relates to a lamp (1) comprising a light source (2) that can be excited by microwaves to provide illumination and a housing (4) surrounding the light source, said housing having at least one light exit opening (5). The light exit opening (5) has associated therewith a grille structure (6) or a labyrinth structure (7) acting as a microwave shield.
Photon source, metrology apparatus, lithographic system and device manufacturing method
A radiation driven light source comprises laser and focusing optics. These produce a beam of radiation focused on a plasma forming zone within a first container containing a gas (e.g. Xe). Collection optics collects photons emitted by a plasma maintained by the laser radiation to form a beam of output radiation. First container is enclosed within a hermetically sealed second container. Any ozone generated within the second container as a result of ultraviolet components of the output radiation is completely contained within the second container. Second container further filters out the ultraviolet components. Microwave radiation may be used instead of laser radiation to form the plasma.
Photon source, metrology apparatus, lithographic system and device manufacturing method
A radiation driven light source comprises laser and focusing optics. These produce a beam of radiation focused on a plasma forming zone within a first container containing a gas (e.g. Xe). Collection optics collects photons emitted by a plasma maintained by the laser radiation to form a beam of output radiation. First container is enclosed within a hermetically sealed second container. Any ozone generated within the second container as a result of ultraviolet components of the output radiation is completely contained within the second container. Second container further filters out the ultraviolet components. Microwave radiation may be used instead of laser radiation to form the plasma.
Compact air-cavity electrodeless high intensity discharge lamp with coupling sleeve
A novel compact air-cavity electrodeless high intensity discharge lamp is disclosed that provides added flexibility in its design to improve performance and reliability. A coupling sleeve surrounds a bulb assembly that can replace the output coupling element require for effective operation of the lamp. The coupling sleeve couples the RF energy from the input coupling element to the bulb and the bulb assembly serves to provide the heat sinking needed for the bulb to operate within the temperature range necessary to achieve optimum performance with good reliability. Changing the design of the bulb assembly does not impact the resonant frequency of the air-cavity resonator. De-coupling the bulb assembly design from the operating frequency of the resonator gives more flexibility to designer to optimize the overall performance of the electrodeless HID lamp.
PLASMA LAMP AS A RADIATION SOURCE IN AN APPARATUS FOR ARTIFICIAL WEATHERING
An apparatus for artificial weathering or lightfastness testing of samples or for simulating solar radiation, the apparatus comprises a weathering chamber, an electrodeless lamp provided in the weathering chamber and comprising a bulb filled with a composition that emits light when in a plasma state, and a radio frequency source being arranged so that it radiate a radio frequency field into the bulb to generate a luminous plasma for emitting a radiation comprising spectral emission characteristics similar to natural solar radiation.
EXCIMER LAMP
An excimer lamp includes a housing portion having a sealed internal space, an internal electrode, and a discharge gas with which the internal space is filled. One end side of the internal electrode is electrically connected to a power supply member provided with a metal foil electrically connected to the internal electrode and is sealed together with the power supply member to one end side of the housing portion via a sealing portion. The other end side of the internal electrode protrudes into the internal space. A protrusion length, being a length of the internal electrode in the internal space and a length from one end of the internal space to the other end of the internal electrode, is equal to or less than a length from the other end of the internal electrode to the other end of the internal space in a direction along the axis.
ULTRAVIOLET EXCIMER LAMP SYSTEMS AND METHODS
An excimer lamp includes a first electrode, a dielectric plate, and a second electrode. The dielectric plate has a first side and a second side opposite the first side. The dielectric plate is spaced a distance from the first electrode to define a volume configured to hold a gas. The first side of the dielectric plate is oriented toward the first electrode. The second electrode is oriented toward the dielectric plate, wherein the dielectric plate is interposed between the first electrode and the second electrode.
LIGHT EMITTING SEALED BODY, LIGHT EMITTING UNIT, AND LIGHT SOURCE DEVICE
A light emitting sealed body includes a housing which stores a discharge gas in an internal space and is provided with a first window portion to which first light is incident and a second window portion from which second light is emitted. The housing includes at least one flow path which is partitioned from the internal space and extends toward at least one of the first window portion and the second window portion.
Light emitting unit and light source device
A light emitting unit includes a light emitting sealed body and a voltage application circuit. The light emitting sealed body includes a container to which laser light for maintaining plasma is incident and from which light from the plasma is emitted, a first electrode which includes a first discharge portion, and a second electrode which includes a second discharge portion. An end portion of the first discharge portion has a shape in which a thickness is thinned as it goes toward the second discharge portion and an end surface of the second discharge portion extends along a plane perpendicular to an extending direction of the first discharge portion. The voltage application circuit controls a potential difference between the first electrode and the second electrode by adjusting a voltage applied to at least the first electrode.