Provided are a scanning-type X-ray source and an imaging system therefor. The scanning-type X-ray source comprises a vacuum cavity (1), wherein a cathode (2) and a plurality of anode target structures (3) are arranged in the vacuum cavity (1); a gate electrode (4) is arranged in a position, close to the cathode (2), in the vacuum cavity (1); a focusing electrode (5) is arranged in a position, close to the gate electrode (4), in the vacuum cavity (1); and a deflection coil (6) is arranged in a position, close to the gate electrode (4), at the outer periphery of the vacuum cavity (1). The scanning-type X-ray source generates electron beams by using cathode (2), controls the powering-on/off of the electron beams by the gate electrode (4), and the deflection coil (6) controls the direction of motion of the electron beams, so as to complete the switching between multiple focuses.

An X-ray tube, including: an envelope (11) that holds inside thereof at a predetermined pressure; a filament (12) for emitting electrons and a focus electrode (13) provided in the envelope: and a target (15) for generating X-ray provided in the envelope facing to the filament (12) and the focus electrode (13), wherein the envelope (11) has an envelope body (11a) and an X-ray window portion (16) having a higher X-rays transmissivity and a higher electric conductivity than the envelope body (11a), when the X-ray window portion (16) or the anode (14) is set to a lower electric potential than both of an electric potential of the anode (14) or the X-ray window portion (16) and an electric potential of the filament (12) and the focus electrode (13), detection of at least one of an ion current (Ii) or an electron current (Ie) through the X-ray window portion (16) or the anode (14) is possible.

An X-ray tube, including: an envelope (11) that holds inside thereof at a predetermined pressure; a filament (12) for emitting electrons and a focus electrode (13) provided in the envelope: and a target (15) for generating X-ray provided in the envelope facing to the filament (12) and the focus electrode (13), wherein the envelope (11) has an envelope body (11a) and an X-ray window portion (16) having a higher X-rays transmissivity and a higher electric conductivity than the envelope body (11a), when the X-ray window portion (16) or the anode (14) is set to a lower electric potential than both of an electric potential of the anode (14) or the X-ray window portion (16) and an electric potential of the filament (12) and the focus electrode (13), detection of at least one of an ion current (Ii) or an electron current (Ie) through the X-ray window portion (16) or the anode (14) is possible.

X-ray transparent insulation can be sandwiched between an x-ray window and a ground plate. The x-ray transparent insulation can include aluminum nitride, boron nitride, or polyetherimide. The x-ray transparent insulation can include a curved side. The x-ray transparent insulation can be transparent to x-rays and resistant to x-ray damage, and can have high thermal conductivity. An x-ray window can have high thermal conductivity, high electrical conductivity, high melting point, low cost, and matched coefficient of thermal conductivity with the anode. The x-ray window can be made of tungsten. For consistent x-ray spot size and location, a focusing plate and a filament can be attached to a cathode with an open channel of the focusing plate aligned with a longitudinal dimension of the filament. Tabs of the focusing plate bordering the open channel can be bent to align with a location of the filament.

An embodiment of the inventive concept provides an X-ray tube including a chamber having a hollow pillar shape using a first axis as a central axis, a cathode electrode disposed on a bottom surface of the chamber, an emitter provided at a position at which the cathode electrode meets the first axis, an anode electrode including a through-hole using the first axis as a central axis and a target layer inclined to the first axis, a gate electrode disposed between the cathode electrode and the anode electrode and having an opening exposing the emitter, a focusing electrode disposed between the gate electrode and the anode electrode, a window spaced apart from the target layer of the anode electrode, and a window electrode provided on a top surface of the chamber to fix a side surface of the window. Here, the window electrode is grounded.

A system for x-ray analysis includes at least one x-ray source configured to emit x-rays. The at least one x-ray source includes at least one silicon carbide sub-source on or embedded in at least one thermally conductive substrate and configured to generate the x-rays in response to electron bombardment of the at least one silicon carbide sub-source. At least some of the x-rays emitted from the at least one x-ray source includes Si x-ray emission line x-rays. The system further includes at least one x-ray optical train configured to receive the Si x-ray emission line x-rays and to irradiate a sample with at least some of the Si x-ray emission line x-rays.

An embodiment of the inventive concept provides an X-ray tube including a chamber having a hollow pillar shape using a first axis as a central axis, a cathode electrode disposed on a bottom surface of the chamber, an emitter provided at a position at which the cathode electrode meets the first axis, an anode electrode including a through-hole using the first axis as a central axis and a target layer inclined to the first axis, a gate electrode disposed between the cathode electrode and the anode electrode and having an opening exposing the emitter, a focusing electrode disposed between the gate electrode and the anode electrode, a window spaced apart from the target layer of the anode electrode, and a window electrode provided on a top surface of the chamber to fix a side surface of the window. Here, the window electrode is grounded.

A mounted x-ray window can be strong and transmissive to x-rays, can have a hermetic seal, and can withstand high temperatures. The mounted x-ray window can include a film located on an inner-side of a flange of a housing and can be attached to the flange by a ring of elastic adhesive. The film can comprise silicon nitride. A method of mounting an x-ray window can include placing a ring of elastic adhesive on an inner-side of a flange of a housing, placing a film on the ring of elastic adhesive, and baking the housing, the ring of elastic adhesive, and the film.

A system for x-ray analysis includes at least one x-ray source configured to emit x-rays. The at least one x-ray source includes at least one silicon carbide sub-source on or embedded in at least one thermally conductive substrate and configured to generate the x-rays in response to electron bombardment of the at least one silicon carbide sub-source. At least some of the x-rays emitted from the at least one x-ray source includes Si x-ray emission line x-rays. The system further includes at least one x-ray optical train configured to receive the Si x-ray emission line x-rays and to irradiate a sample with at least some of the Si x-ray emission line x-rays.

An X-ray source for ionizing of gases includes a field emission tip array within a vacuum region enclosed by a hood and a part of a support plate. The field emission tip array is arranged electrically insulated with respect to the carrier plate and wired as a cathode connected to a high-voltage source. A transmission window transparent to X-ray radiation is arranged in the hood centrally above the field emission tip array, and the hood is wired as an anode.