Patent classifications
H
ELECTRICITY
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H01
ELECTRIC ELEMENTS
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H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
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2237/00
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
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H01J2237/006
Details of gas supplies, e.g. in an ion source, to a beam line, to a specimen or to a workpiece,
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