An electron microscope specimen sample holder including a thin sheet base member with a first surface and an opposing second surface, the first surface defining a seat and support surface for a specimen holding film held by the sample holder, the base member including an aperture through the second surface exposing the holding film held by the sample holder, and including a grip engagement zone defined at least on part of the first surface arranged to engage a gripping device, and wherein at least one of the first or second surface has machine readable structures formed thereon arranged in patterns embodying data that defines at least one predetermined characteristic of the sample holder.

An inspection apparatus capable of facilitating reduction in cost of the apparatus is provided. The inspection apparatus includes: beam generation means for generating any of charged particles and electromagnetic waves as a beam; a primary optical system that guides the beam into an inspection object held on a movable stage in a working chamber and irradiates the inspection object with the beam; a secondary optical system that detects secondary charged particles occurring from the inspection object; and an image processing system that forms an image on the basis of the detected secondary charged particles. The inspection apparatus further includes: a linear motor that drives the movable stage; and a Helmholtz coil that causes a magnetic field for canceling a magnetic field caused by the linear motor when the movable stage is driven.

A magnetic lens for focusing a beam of charged particles traveling along an optical axis includes an axial bore disposed around said optical axis; magnetic field generating means; and magnetic yoke, to guide and concentrate said magnetic field toward said optical axis so as to form a focusing region,
wherein Said yoke has a composite structure, comprising an outer primary portion and an inner secondary portion; Said secondary portion is mounted as a monolithic insert within said primary portion so as to be disposed around said focusing region; Said secondary portion comprises a waist region surrounding said bore and acting as a magnetic constriction, configured such that said magnetic field undergoes saturation in said waist region, thereby causing magnetic flux to exit the waist region and form a focusing field in said focusing region.

A device for applying a constant magnetic field to a volume of interest (VOI) has been developed. At least one magnetic field source and a permeable yoke, which guides the magnetic flux generated by this magnetic field source into the volume of interest (VOI). The yoke is guided through at least one closed conductor loop, which can be switched to the superconducting state so that, in the superconducting state of the conductor loop, a change in the flux through the yoke effects a current counteracting this change along the conductor loop. It has been identified that, in this way, the stabilizer for the magnetic field can be spaced so far apart from the volume of interest (VOI) that the field distribution in this volume is virtually no longer influenced. At the same time, the quality of the stabilization is also improved, since the conductor loop is no longer exposed to the entire magnetic field prevailing in the volume of interest (VOI). The entire critical current that the conductor loop can carry is available as a control range for compensating for fluctuations in the flux. In comparison with the prior art, the invention first accepts the apparent disadvantage that, in general, additional means are required for switching the conductor loop back and forth between the superconducting state and the normal-conducting state. However, this disadvantage is more than compensated for.

A nanoscale positioning system for positioning a positionable component includes a motion platform including a first end, a second end, a shuttle positioned between the first end and the second end and configured to support the positionable component, a flexure member, and a fluid passage extending through the flexure member from the first end to the second end of the motion platform, and a pressure controller coupled to the motion platform and fluidically connected to the fluid passage, wherein the pressure controller is configured to selectably provide a fluid pressure in the fluid passage to flex the flexure member whereby the shuttle is displaced along a motion axis of the motion platform.

This weak signal detection system has: a statistical data acquisition unit which measures the average value or distribution of an input signal in which is noise superimposed on a desired signal, calculates parameters such as the amplitude or noise dispersion of the desired signal, and outputs the calculated data obtained thereby; a nonlinear characteristic unit which outputs a signal having a nonlinear response with respect to the magnitude of the voltage or the current of the input signal; a signal detection ratio evaluation unit which determines whether the output signal from the nonlinear characteristic unit is the desired signal, calculates the detection ratio in the event that the signal is the desired signal, and outputs detection ratio data; a parameter adjustment unit which, on the basis of detection ratio data obtained by the signal detection ratio evaluation unit and calculated data obtained by the statistical data acquisition unit, adjusts a control parameter pertaining to the responsiveness of the nonlinear characteristic unit; and a signal processing unit which performs signal processing of the output signal of the nonlinear characteristic unit, and conversion to digital data or image data. In so doing, it is possible to provide a weak signal detection system having improved signal detection accuracy, and an electron microscope equipped with the system.

A multipole lens is provided which is for use in electron microscopy and which is simple in structure but capable of producing X- and Y-components of a quadrupole field and X- and Y-components of an octopole field. The multipole lens (100) comprises: first through twelfth polar elements (10-1 to 10-12); first through sixteenth coils (20-1 to 20-16); a first power supply (30-1) for supplying currents to the coils (20-1, 20-4, 20-9, 20-12); a second power supply (30-2) for supplying currents to the coils (20-3, 20-5, 20-11, 20-13); a third power supply (30-3) for supplying excitation currents to the coils (20-6, 20-8, 20-14, 20-16); and a fourth power supply (30-4) for supplying excitation currents to the coils (20-2, 20-7, 20-10, 20-15). The coils (20-1, 20-3, 20-6, 20-7, 20-9, 20-11, 20-14, 20-15) produce magnetic fields in a first direction. The coils (20-2, 20-4, 20-5, 20-8, 20-10, 20-12, 20-13, 20-16) produce magnetic fields in a direction opposite to the first direction.

The invention is directed to a sample support design and sample cooling devices for single-particle cryo-electron microscopy that simplify sample preparation and handling, dramatically reduce errors and improve outcome reproducibility, and dramatically reduce overall costs. A system includes a grid based sample support system, grid handling tools, grid blotting tools, a plunge cooling system, and jet cooling systems.

An electrode structure for guiding and, for example, for splitting a beam of charged particles, for example an electron beam, along a longitudinal path has multipole electrode arrangements that are spaced apart from one another along the longitudinal path and that have DC voltage electrodes. The electrode arrangements are configured to generate static multipole fields centered around the path in transverse planes oriented perpendicular to the longitudinal path, wherein the field strengths of the static multipole fields in the transverse planes each have a local minimum at the location of the path and increase as the distance from the location of the path increases. Field directions of the static multipole fields vary periodically with a period length along the path so that the particles propagating along the path are subjected to an inhomogeneous alternating electric field due to their intrinsic movement and experience a transverse return force towards the longitudinal path on average over time.

A sample inspection system includes: a charged particle beam device irradiating a sample with a charged particle beam to acquire an image of the sample; an overall control device controlling the charged particle beam device; a magnetic shield that configures an internal space for accommodating the charged particle beam device and the overall control device and blocks an external magnetic field; and an air cooling device that takes air into the magnetic shield to cool the internal space of the magnetic shield. The magnetic shield includes highly conductive material layers and high-permeability material layers, and includes an air inlet of the air for cooling in each of the highly conductive material layers and the high-permeability material layers, and a gap that is a spatial clearance is provided between the highly conductive material layer and the high-permeability material layer in a portion where the air inlet is present.