Patent classifications
H01K1/18
Filament holder for hot cathode PECVD source
A chemical vapor deposition source that includes at least one plate to which first and second electrical connection posts are coupled. The chemical vapor deposition source also includes a filament having a first end and a second end. The first end of the filament is electrically connected to the first electrical connection post and the second end of the filament is electrically connected to the second electrical connection post. The chemical vapor deposition source further includes at least one filament holder electrically insulated from the at least one plate. The at least one filament holder holds a portion of the filament between the first end and the second end.
Filament holder for hot cathode PECVD source
A chemical vapor deposition source that includes at least one plate to which first and second electrical connection posts are coupled. The chemical vapor deposition source also includes a filament having a first end and a second end. The first end of the filament is electrically connected to the first electrical connection post and the second end of the filament is electrically connected to the second electrical connection post. The chemical vapor deposition source further includes at least one filament holder electrically insulated from the at least one plate. The at least one filament holder holds a portion of the filament between the first end and the second end.
THERMAL EMITTER MODULE AND THERMAL RADIATION LIGHT SOURCE
A thermal emitter module includes: a thermal emitter; a housing that houses the thermal emitter; and a support member interposed between the thermal emitter and the housing and supporting the thermal emitter, in which a constituent material of the support member contains at least one of an oxide or a nitride.
THERMAL EMITTER MODULE AND THERMAL RADIATION LIGHT SOURCE
A thermal emitter module includes: a thermal emitter; a housing that houses the thermal emitter; and a support member interposed between the thermal emitter and the housing and supporting the thermal emitter, in which a constituent material of the support member contains at least one of an oxide or a nitride.
High power tungsten halogen lamp lifetime improvement through J-hook design
A lamp and epitaxial processing apparatus are described herein. In one example, the lamp includes a bulb, a filament, and a plurality of filament supports disposed in spaced-apart relation to the filament, each of the filament supports having a hook support and a hook. The hook includes a connector configured to fasten the hook to the hook support, a first vertical portion extending from the connector toward the filament, and a rounded portion extending from an end of the first vertical portion distal from the connector and configured to wrap around the filament. A second vertical portion extends from an end of the rounded portion distal from the first vertical portion and the second vertical portion has a length between 60% and 100% of the length of the first vertical portion.
IRRADIATION DEVICE FOR INTRODUCING INFRARED RADIATION INTO A VACUUM PROCESSING CHAMBER USING AN INFRARED EMITTER CAPPED ON ONE END
An irradiation device for introducing infrared radiation into a vacuum processing chamber has an infrared emitter capped on one end and including an emitter casing tube in the form of a round glass tube, of which a closed end projects into the vacuum processing chamber. A vacuum feedthrough holds the emitter casing tube and leads it in a gas-tight manner through an opening of the vacuum processing chamber. A heating filament and a current return are arranged in the emitter casing tube, wherein the heating conductor has, in the section of the emitter casing tube surrounded by the vacuum feedthrough, a connection element that is led out from the emitter casing tube. The connection element of the heating conductor is guided through a tube section and the return conductor has, in the section of the emitter casing tube surrounded by the vacuum feedthrough, a means for compensating for thermal expansion.
Laminated electronic component and laminated electronic component mounting structure
A laminated electronic component includes a main body composed of a stacked body in which dielectric layers and internal electrode layers are alternately laminated, and an external electrode disposed on an outer surface of the stacked body so as to make electrical connection with the internal electrode layers; and a first joining member and a second joining member which are provided on a first face side located in a stacking direction of the dielectric layers and the inner electrode layers. The first joining member and the second joining member are provided on a first side and second side which constitute the first face, respectively, and located in a region which includes midpoints thereof but does not include a vertex of the main body. By mounting such a laminated electronic component to a substrate via the joining members, acoustic noise can be suppressed.
Coil component, circuit board, and electronic device
A coil component includes a base body containing metal magnetic particles and a binder binding together the metal magnetic particles and having a first surface extending along a coil axis and a second surface opposing the first surface, a first external electrode, a second external electrode, and a coil conductor electrically connected to the first and second external electrodes. In one embodiment, the coil conductor has a winding portion, the winding portion has first conductor portions and one or more second conductor portions smaller in number than the first conductor portions. The first and second conductor portions alternate with and are connected to each other. A first dimension of the base body representing a dimension between the first surface and the second surface is greater than a second dimension of the base body representing a dimension of the base body between the third and fourth surface.
Holding device for at least one filament and mass spectrometer
The invention relates to a holding device for at least one filament, comprising: at least one filament receptacle for receiving the at least one filament. The holding device is designed for the detachable attachment, in particular clamping attachment, of the at least one filament receptacle to a container of an ionization device. The invention also relates to a mass spectrometer comprising: an ionization device having a container in which an ionization space for ionizing a gas is formed, at least one holding device which is designed for the detachable attachment, in particular clamping attachment, of the at least one filament receptacle to the container, and a vacuum housing to which the holding device, in particular a base body of the holding device, is detachably connected.
Holding device for at least one filament and mass spectrometer
The invention relates to a holding device for at least one filament, comprising: at least one filament receptacle for receiving the at least one filament. The holding device is designed for the detachable attachment, in particular clamping attachment, of the at least one filament receptacle to a container of an ionization device. The invention also relates to a mass spectrometer comprising: an ionization device having a container in which an ionization space for ionizing a gas is formed, at least one holding device which is designed for the detachable attachment, in particular clamping attachment, of the at least one filament receptacle to the container, and a vacuum housing to which the holding device, in particular a base body of the holding device, is detachably connected.