A conductive structure comprising: a plurality of conductive devices; a first conductive spring sheet, comprising a first connecting point; and a second conductive spring sheet, comprising a second connecting point. Each of the conductive devices comprises a first conductive end and a second conductive end. The second conductive end is connected to the second connecting point, and the first conductive end is connected to the first connecting point corresponding to the second connecting point to which the second conductive end is connected.

Methods and apparatus disclosed herein generally relate to lamp heating of process chambers used to process semiconductor substrates. More specifically, implementations disclosed herein relate to arrangement and control of lamps for heating of semiconductor substrates. In some implementations of the present disclosure, fine-tuning of temperature control is achieved by dividing different lamps within an array of lamps into various subgroups or lamp assemblies defined by a specific characteristic. These various subgroups may be based on characteristics such as lamp design and/or lamp positioning within the processing chamber.

Methods and apparatus disclosed herein generally relate to lamp heating of process chambers used to process semiconductor substrates. More specifically, implementations disclosed herein relate to arrangement and control of lamps for heating of semiconductor substrates. In some implementations of the present disclosure, fine-tuning of temperature control is achieved by dividing different lamps within an array of lamps into various subgroups or lamp assemblies defined by a specific characteristic. These various subgroups may be based on characteristics such as lamp design and/or lamp positioning within the processing chamber.

An infrared-ray lamp tube has; an elongate tube-shaped housing having an inner space defined therein, wherein the elongate tube-shaped housing have both side open ends; an infrared-ray emitting array disposed in the inner space, wherein an infrared-ray emitting array includes a plurality of halogen lamp units spacedly arranged in an array in the inner space in a length direction of the housing; two plugs respectively fitted into the both side open ends of the elongate tube-shaped housing; and a filtering liquid filling the inner space of the elongate tube-shaped housing.

An infrared-ray lamp tube has; an elongate tube-shaped housing having an inner space defined therein, wherein the elongate tube-shaped housing have both side open ends; an infrared-ray emitting array disposed in the inner space, wherein an infrared-ray emitting array includes a plurality of halogen lamp units spacedly arranged in an array in the inner space in a length direction of the housing; two plugs respectively fitted into the both side open ends of the elongate tube-shaped housing; and a filtering liquid filling the inner space of the elongate tube-shaped housing.

A conductive structure comprising: a plurality of conductive devices; a first conductive spring sheet, comprising a first connecting point; and a second conductive spring sheet, comprising a second connecting point. Each of the conductive devices comprises a first conductive end and a second conductive end. The second conductive end is connected to the second connecting point, and the first conductive end is connected to the first connecting point corresponding to the second connecting point to which the second conductive end is connected.

A conductive structure comprising: a plurality of conductive devices; a first conductive spring sheet, comprising a first connecting point; and a second conductive spring sheet, comprising a second connecting point. Each of the conductive devices comprises a first conductive end and a second conductive end. The second conductive end is connected to the second connecting point, and the first conductive end is connected to the first connecting point corresponding to the second connecting point to which the second conductive end is connected.

A conductive structure comprising: a plurality of conductive devices; a first conductive spring sheet, comprising a first connecting point; and a second conductive spring sheet, comprising a second connecting point. Each of the conductive devices comprises a first conductive end and a second conductive end. The second conductive end is connected to the second connecting point, and the first conductive end is connected to the first connecting point corresponding to the second connecting point to which the second conductive end is connected.

A conductive structure comprising: a plurality of conductive devices; a first conductive spring sheet, comprising a first connecting point; and a second conductive spring sheet, comprising a second connecting point. Each of the conductive devices comprises a first conductive end and a second conductive end. The second conductive end is connected to the second connecting point, and the first conductive end is connected to the first connecting point corresponding to the second connecting point to which the second conductive end is connected.

A lamp (10), which is particularly a motor vehicle headlight, comprises a burner (12) for emitting light, which is supported by a holder (16) for mechanically connecting the burner (12) with a socket (14). The holder (16) comprises a metal ring (26) surrounding the burner (12). The metal ring (26) is thermally connected to the burner (12) via a single connecting surface (40), which is in planar contact to the burner (12) over an angle of 350 in circumferential direction. Due to the increased heat transfer to the environment the used materials are less subjected to heat, so that the overall lifetime and the shock resistance of the lamp (10) are increased at the same time.