H01L29/40

Electronic device and method of manufacturing the same

Provided are an electronic device and a method of manufacturing the same. The electronic device may include a first device provided on a first region of a substrate; and a second device provided on a second region of the substrate, wherein the first device may include a first domain layer including a ferroelectric domain and a first gate electrode on the first domain layer, and the second device may include a second domain layer including a ferroelectric domain and a second gate electrode on the second domain layer. The first domain layer and the second domain layer may have different characteristics from each other at a polarization change according to an electric field. At the polarization change according to the electric field, the first domain layer may have substantially a non-hysteretic behavior characteristic and the second domain layer may have a hysteretic behavior characteristic.

SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME
20180012992 · 2018-01-11 ·

A semiconductor device and a forming method thereof, the semiconductor device includes a first and a second wells, a source region, a drain region, two gate structures and at least one doping region. The first well with a first conductive type is disposed in a substrate, and the source region is disposed in the first well. The second well with a second conductive type is disposed adjacent to the first well in a substrate, and the drain region is disposed in the second well. Two gate structures are disposed on the substrate between the source region and the drain region. At least one doping region with the first conductive type is disposed in the second well between the two gate structures.

High Voltage Laterally Diffused MOSFET With Buried Field Shield and Method to Fabricate Same
20180012966 · 2018-01-11 ·

A structure includes a laterally diffused (LD) MOSFET with an n-type drift region disposed on a surface of a substrate and a p-type body region contained in the drift region. The structure further includes an n-type source region contained in the p-type body region; an n-type drain region contained in the n-type drift region; a gate electrode disposed on a gate dielectric overlying a portion of the p-type body region and the n-type drift region and an electrically conductive field shield member disposed within the n-type drift region at least partially beneath the p-type body region and generally parallel to the gate electrode. The electrically conductive buried field shield member is contained within and surrounded by a layer of buried field shield oxide and is common to both a first LD MOSFET and a second LD MOSFET that are connected in parallel. Methods to fabricate the structure are also disclosed.

STRESS LAYOUT OPTIMIZATION FOR DEVICE PERFORMANCE

The present disclosure relates to semiconductor structures and, more particularly, to a layout optimization for radio frequency (RF) device performance and methods of manufacture. The structure includes: a first active device on a substrate; source and drain diffusion regions adjacent to the first active device; and a first contact in electrical contact with the source and drain diffusion regions and which is spaced away from the first active device to optimize a stress component in a channel region of the first active device.

CHIP-SUBSTRATE COMPOSITE SEMICONDUCTOR DEVICE

A semiconductor device includes a high-voltage semiconductor transistor chip having a front side and a backside. A low-voltage load electrode and a control electrode are disposed on the front side of the semiconductor transistor chip. The semiconductor device further includes a dielectric inorganic substrate having a first side and a second side opposite the first side. A pattern of first metal structures runs through the dielectric inorganic substrate and is connected to the low-voltage load electrode. At least one second metal structure runs through the dielectric inorganic substrate and is connected to the control electrode. The front side of the semiconductor transistor chip is attached to the first side of the dielectric inorganic substrate. The dielectric inorganic substrate has a thickness measured between the first side and the second side of at least 50 μm.

SEMICONDUCTOR DEVICE WITH TRENCH ISOLATION STRUCTURES IN A TRANSITION REGION AND METHOD OF MANUFACTURING

A semiconductor device includes a semiconductor layer, an electronic element and laterally separated trench isolation structures. The semiconductor layer includes an element region having an inner region, an outer region on opposite sides of the inner region, and a transition region that laterally separates the inner region and the outer region. The electronic element includes a first doped region formed in the inner region and a second doped region formed in the outer region. The trench isolation structures are formed at least in the transition region. Each trench isolation structure extends from a first surface of the semiconductor layer into the semiconductor layer.

Terminal Structure of Power Device and Manufacturing Method Thereof, and Power Device
20230238426 · 2023-07-27 ·

A terminal structure of a power device includes a substrate and a plurality of field limiting rings disposed on a first surface of the substrate. The substrate includes a drift layer and a doped layer. The doped layer is formed through diffusion inward from the first surface of the substrate. The doped layer and the drift layer are a first conductivity type, and an impurity concentration of the doped layer is greater than an impurity concentration of the drift layer. The field limiting rings are a second conductivity type. In the terminal structure, lateral diffusion of impurities in the field limiting rings is limited through a design of the doped layer.

SEMICONDUCTOR DEVICE AND MANUFACTURING PROCESS FOR THE SAME
20230238435 · 2023-07-27 ·

A semiconductor device includes: a semiconductor substrate, a gate oxide layer, and a polysilicon field plate. The semiconductor substrate includes a drift region and a well region. An end of the drift region is arranged with a drain region, and an end of the well region is arranged with a source region. The gate oxide layer is arranged on the semiconductor substrate and disposed between the source region and the drain region. The polysilicon field plate is arranged on the gate oxide layer. At least a portion of the polysilicon field plate is projected onto the drift region and includes at least two field-plate regions. While the semiconductor device is operating, in a direction from an end of the drift region near the well region approaching the drain region, an equivalent electrical thickness of an insulating layer between the polysilicon field plate and the drift region gradually increases.

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
20230238438 · 2023-07-27 · ·

A semiconductor substrate (1) includes a front surface and a back surface opposite to each other, and a through-hole (9) penetrating from the back surface to the front surface. A metal film (10) surrounding the through-hole (9) is formed in a ring shape on the front surface. A front-surface electrode (6) includes a wiring electrode (11,12) covering the through-hole (9) and the metal film (10) and is joined to the front surface outside the metal film (10). A back-surface electrode (15) is formed on the back surface and inside the through-hole (9) and connected to the wiring electrode (11,12). The metal film (10) has a lower ionization tendency and a higher work function than the wiring electrode (11,12).

METHODS FOR IMPROVEMENT OF PHOTORESIST PATTERNING PROFILE

A method of forming a semiconductor structure is provided. The method includes forming a gate structure over an active region of a substrate, forming an epitaxial layer comprising first dopants of a first conductivity type over portions of the active region on opposite sides of the gate structure, the epitaxial layer, applying a cleaning solution comprising ozone and deionized water to the epitaxial layer, thereby forming an oxide layer on the epitaxial layer, forming a patterned photoresist layer over the oxide layer and the gate structure to expose a portion of the oxide layer, forming a contact region second dopants of a second conductivity type opposite the first conductivity type in the portion of the epitaxial layer not covered by the patterned photoresist layer, and forming a contact overlying the contact region.