An actuator includes an electric motor having a stator and a rotor that can be rotated relative to the stator about an axis of rotation (D). The stator comprises an inner stator part, a first outer stator part and a second outer stator part, wherein the inner stator part, the first outer stator part and the second outer stator part are aligned with one another along the axis of rotation (D) and the inner stator part forms an arrangement of first inner stator poles on a first side axially facing the first outer stator part, and forms an arrangement of second inner stator poles on a second side axially facing the second outer stator part, wherein the first inner stator poles and the second inner stator poles are integrally connected to one another as a single piece.

An imaging apparatus includes an imaging unit configured to have a lens barrel that is capable of pivot rotation about an optical axis by a drive mechanism for rotation, a cover configured to cover the imaging unit, a light-shielding member configured to contact an inner surface of the cover, and an illumination device configured to be disposed in a space covered with the cover, wherein the light-shielding member is capable of retracting in a direction away from the cover by the drive mechanism.

An imaging apparatus includes an imaging unit configured to have a lens barrel that is capable of pivot rotation about an optical axis by a drive mechanism for rotation, a cover configured to cover the imaging unit, a light-shielding member configured to contact an inner surface of the cover, and an illumination device configured to be disposed in a space covered with the cover, wherein the light-shielding member is capable of retracting in a direction away from the cover by the drive mechanism.

The present invention refers to a substrate holder loading device to be used in a clean room and a clean room treatment device containing such substrate holder loading device. Furthermore, the present invention refers to a method of loading a substrate holder with a first substrate, more preferably with a first and a second substrate.

The present invention refers to a substrate holder loading device to be used in a clean room and a clean room treatment device containing such substrate holder loading device. Furthermore, the present invention refers to a method of loading a substrate holder with a first substrate, more preferably with a first and a second substrate.

A step motor that drives a rotary body to rotate includes: an output shaft that outputs a rotational driving force to the rotary body, the output shaft having an insertion hole in which the rotary body is arranged so as to be integrally rotatable on an inner circumference side of a top portion of a tip end of the output shaft; a radial bearing radially supporting the output shaft from an outer circumference side; and a cover protruding from the radial bearing radially inward. The cover opposing the top portion through an axial gap at an outer circumference side of the insertion hole. The output shaft has an inner tapered portion which decreases in diameter as approaching the insertion hole radially inward from the top portion. The cover opposes the top portion through the axial gap at an outer circumference side of the inner tapered portion.

A gear motor comprising a reduction gear train and a three-phase electric motor comprising a stator formed of a stack of sheets and 3*k electric coils and a rotor having 5 k*N pairs of magnetized poles, with k=1 or 2, the stator having two separate angular sectors alpha 1 and alpha 2, which are centered on the center of rotation of the motor and comprise an alternation of notches and 3*k*N teeth, which are regularly spaced and converge toward the center of rotation and define a cavity in which the rotor is arranged, the gear motor being characterized in that N=4 and in that alpha 1 is less than or equal to 180° and comprises all of the coils of the motor.

A gear motor comprising a reduction gear train and a three-phase electric motor comprising a stator formed of a stack of sheets and 3*k electric coils and a rotor having 5 k*N pairs of magnetized poles, with k=1 or 2, the stator having two separate angular sectors alpha 1 and alpha 2, which are centered on the center of rotation of the motor and comprise an alternation of notches and 3*k*N teeth, which are regularly spaced and converge toward the center of rotation and define a cavity in which the rotor is arranged, the gear motor being characterized in that N=4 and in that alpha 1 is less than or equal to 180° and comprises all of the coils of the motor.

The application includes a rotating device 1 that includes a variable resistor, a voltage output line configured to output a voltage, and an adjustment resistor. A resistance value Rx of the adjustment resistor is set to a value between a minimum value RxMin determined in a manner for a ratio of an adjustment voltage Vx in a case of having the adjustment resistor to a reference voltage Vo in a case of not having the adjustment resistor to become greater than or equal to a predetermined value, and a maximum value RxMax determined in a manner for noise generated on the voltage output from the voltage output line with the contact position located within a dead zone of a position sensor 80 to become less than or equal to a predetermined value.

The application includes a rotating device 1 that includes a variable resistor, a voltage output line configured to output a voltage, and an adjustment resistor. A resistance value Rx of the adjustment resistor is set to a value between a minimum value RxMin determined in a manner for a ratio of an adjustment voltage Vx in a case of having the adjustment resistor to a reference voltage Vo in a case of not having the adjustment resistor to become greater than or equal to a predetermined value, and a maximum value RxMax determined in a manner for noise generated on the voltage output from the voltage output line with the contact position located within a dead zone of a position sensor 80 to become less than or equal to a predetermined value.